27
Ellipsometer Windows
Assembly
If the windows need to be replaced they should be
reassembled as shown in the diagram.
Top Window Assembly
Use the Window Tool (1) to remove the 22mm
Locking Ring (2) and reassembled the Top Win-
dow as shown in the diagram.
1.
Window Tool (1)
2.
Locking Ring (22mm)
3.
Silicon Rubber Ring (22 x 18mm)
4.
Glass Window (22 x 0.17mm)
Side Windows Assembly
Use the Side Window Locking Tool (5) to remove
the Side Window Locking Ring (6) and reassem-
ble the Side Window as shown in the diagram
5.
Side Window Locking Tool
6.
Side Window Locking Ring
7.
Silicon Rubber Ring (17 x 12mm)
8.
Side Window (up to 5mm thick)
Bottom Window Assembly
Use the Window Tool (1) to remove the 22mm
Locking Ring (2) and reassembled the Bottom
Window as shown in the diagram.
1.
Window Tool (1)
2.
Locking Ring (22mm)
3.
Silicon Rubber Ring (22 x 18mm)
9.
Glass Window (22 x 0.3mm)
1
2
3
5
6
4
7
8
1
2
3
9
8
