46
HFS600 Window Assembly
Lid Window Assembly
To replace the windows in the Stage Lid (1) use
the Window Tool V2 (2) and align the two wide
spacing pins to the Tube Clip Holder holes and
unscrew the Lid Insert (3).
The Lid Insert should be screwed down until the
cover slips are held firmly, then turn the assembly
over and screw down the Lid Insert until it is felt
to come to a stop.
This is the same principle for the Ellipsometer Lid
top window assembly.
Ellipsometer Side Windows
Assembly
Use the Side Window Locking Tool (5) to remove
the Side Window Locking Ring (6) and reassem-
ble the Side Window as shown in the diagram
6.
Side Window Locking Tool
7.
Side Window Locking Ring
8.
Silicon Rubber Ring (17 x 12mm)
9.
Side Window (up to 5mm thick)
Bottom Window Assembly
Use two narrow spacing pins of Window Tool (4)
to align it to the two holes of Window Locking
Ring (5) and unscrew.
Reassemble the bottom window as shown in the
opposite diagram.
1
2
3
Glass (W22G)
22 x 0.17mm
Silicon
rubber
rings
4
5
Glass
(W22G0.3)
22 x 0.3mm
Silicon
rubber
rings
6
7
8
9
9
