2
Contents
Stages Covered by this Manual…..……………………………………………………………………………………...3
Before Setting Up Your Equipment……………………………………………………………………………………...3
Important Notice...................................................................................................................4
Warranty..............................................................................................................................4
Equipment Maintenance........................................................................................................4
Handling Liquid Nitrogen.......................................................................................................4
Pressure Warning……………....................................................................................................4
Safety Precautions................................................................................................................5
Symbol Reference.....................................................................................................5
Introduction..........................................................................................................................6
THMS600 Stage Specification.....................................................................................6
THMS600 System..................................................................................................................6
Stage Anatomy.....................................................................................................................7
Stage Assembly.........................................................................................................7
Lid Assembly.............................................................................................................7
Mounting Stage to Microscope with Dovetail Substage.............................................................8
Setting up the Condenser......................................................................................................8
Vacuum Tweezers.................................................................................................................9
Setting up the ECP water circulation pump…………………………………………………………………………10
Sample preparation.............................................................................................................11
THMS/CC Crucible Carrier and Quartz Crucible..................................................................11
THMS/CC Crucible Carrier and Stainless Steel Ring............................................................12
Cooling Connections............................................................................................................13
Purging Procedure...............................................................................................................14
Purging the Stage Method 1............................................................................................14
Purging the Stage Method 2............................................................................................15
Appendix............................................................................................................................16
Window Assembly...............................................................................................................16
Lid Window Assembly..............................................................................................16
Bottom Window Assembly........................................................................................16
Troubleshooting..................................................................................................................17
Alternate Configuration: THMS600-
PS………………………………………………………………………………..18
THMS600-
PS Stage anatomy…………………………………………………………………………………19
Connecting pressure tubing…………………………………………………………………………………..20
Alternate Configuration: FTIR600………………………………………………………………………………………21
FTIR600 Vertical stage………………………………………………………………………………………….22
Alternate Configuration: THMSEL600………………………………………………………………………………….25
THMSEL600 Stage anatomy……………………………………………………………………………………26
Ellipsometer window assembly……………………………………………………………………………….27
Alternate configuration: THMSG600…………………………………………………………………………………..28
THMSG600 Sample preparation………………………………………………………………………………29
Alternate configuration: BCS196…...…………………………………………………………………………………..32
BCS196 Stage anatomy…………..…………………………………………………………………………….33
BSC196 with Quench Cooling…………………………………………………………………………………34
Using the Quench Cooling manipulator…………………………………………………………………..37
Sample seeding with Seeding Post…………………………………………………………………………39
Alternate Configuration: HFS600E-
PB4/PB2…………..……………………………………………………………40
HFS600E-
PB4/PB2 Stage Anatomy………………………………………………………………………...41
Probe preparation………………………………………………………………………………………………..42
Adjusting the Probes…………………………………………………………………………………………...44
HFS600 Stage window assembly…………………………………………………………………………..46
Contact Details....................................................................................................................48
