LEYBOLD MAG W 2010 CHT Operating Instructions Manual Download | Manualshive

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Installation

17

GA 05.139/1.02 - 06/99

21.5

l

l > 15 mm in aluminium
l > 10 mm in steel

Outer ring (stainless steel)

Sealing (FPM)

Centering ring (stainless steel)

Splinter guard

Max. torque = 60,000 Nm

Fig. 15 Fixing the intake flange

Bolts: M10 x 35 / M10 x 40
Quality 12.9 according to DIN 898:
0,2% yield strength > 1080 N/mm

2

Bolt torque: 40 Nm

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Summary of Contents for MAG W 2010 CHT

Page 1: ...ecular Pump with Magnetic Bearing MAG DRIVE 2000 Electronic Frequency Converter Software version 1 4 xx Cat Nos 121 31 121 44 Operating Instructions Vacuum Solutions Application Support Service LEYBOL...

Page 2: ...8 4 3 Operating menu 40 4 3 1 Basic menu 40 4 3 2 Settings converter 41 4 3 3 Settings pump 42 4 3 4 Settings temperature management system 42 4 3 6 Total view of the menu 43 4 4 Temperature managemen...

Page 3: ...anges without reduction of the maxi mum gas throughput The MAG DRIVE 2000 frequency converter The electronic converter converts the single phase line supply voltage into a three phase DC voltage to dr...

Page 4: ...on In order to handle gases or media e g AlCl3 WOCl4 which can form deposits insi de the pump it is required to use the TMS Temperature Management System The temperature selected for such processes ha...

Page 5: ...ly controls the pump rotor in five axes closed loop control All parameters required for pump operation and the listed faults and operating hours are stored in a non volatile memory in the pump When th...

Page 6: ...as dry nitrogen argon or similar Purge gas throughput 0 5 to 0 65 mbar l s 1 30 to 40 sccm Connection VCR Nut 1 4 1 5 Standard specification MAG The turbomolecular pumps are shipped complete sealed in...

Page 7: ...Start Stop Esc Mon Prog Enter _ Each Fuse 4 A Fig 3 Front panel X14 Connection control plug X19 Mains connection X20 Connection magnetic bearing X21 Connection pump motor and TMS Fig 4 Rear panel wit...

Page 8: ...tand by approx 100 W Continuous rated speed 810 W Maximum 1800 W Max voltage motor 60 V Maximum pump current 20 A rms Continuous pump current max 15 A rms Maximum frequency 480 Hz Load capability rela...

Page 9: ...raight 121 17 3 m DRIVE TMS straight straight 121 18 5 m BEARING bended 225 straight 121 19 5 m DRIVE TMS bended 180 straight 121 20 10 m BEARING bended 225 straight 121 21 10 m DRIVE TMS bended 180 s...

Page 10: ...drawing and standard fixing of the MAG DRIVE dimensions in mm START STOP Com Status Main X7 Fuses TMS MAG D RIVE 2000 Each Fuse 4 A 19 installation frame 4 x M3 screws 455 113 196 128 135 27 max 115 1...

Page 11: ...escription 11 GA 05 139 1 02 06 99 Fig 7 MAG W 2010 CHT Dimensions in mm DN 40 DN 250 ISO F 272 386 303 16 355 335 261 400 199 320 5 284 201 310 336 12x60 360 11 310 30 18 51 18 1 0 3 0 3 5 421 102 11...

Page 12: ...pressure Rotor speed 480 Hz Purge gas flow 36 sccm Nitrogen with splinter guard Forepump D 65 B WS 251 Pipe 1 m DN 40 according to PNEUROP 1500 1000 500 0 2000 10 2 10 1 1 Torr 10 3 10 4 l s MAG W 201...

Page 13: ...pump while connecting or remo ving the MAG The MAG is shipped in a sealed PE bag with desiccant Do not open the sealed package until immediately befo re installing Do not remove the covers and blankin...

Page 14: ...sealed PE bag with desiccant Do not open the package until immediately before instal ling Do not remove the covers and blanking flanges until you are ready to make the connections to ensure that the M...

Page 15: ...ssary to secure it in any other way The vacuum chamber must be securely attached to the floor or a solid wall In case of lighter vacuum vessels secure the pump addi tionally The pump s bottom is equip...

Page 16: ...GA 05 139 1 02 06 99 Installation 16 M 60 000 Nm M 60 000 Nm Correct Wrong Fig 13 Vacuum chamber fixed to the floor 125 7 0 3 0 310 15 Fig 14 Fixing the pump at the bottom Boreholes M8 15 mm deep...

Page 17: ...m l 10 mm in steel Outer ring stainless steel Sealing FPM Centering ring stainless steel Splinter guard Max torque 60 000 Nm Fig 15 Fixing the intake flange Bolts M10 x 35 M10 x 40 Quality 12 9 accord...

Page 18: ...bomolecular pump 2 Forevacuum gauge point 3 Backing pump 4 Anti vibration bellows 5 Forevacuum valve 6 High vacuum valve 7 Purge gas connection 8 Valve in the roughing line 9 Electronic frequency conv...

Page 19: ...on valve between chamber and MAG The foreline isolation valve is recommended to protect the MAG from shock venting in case of uncontrolled shut down of the backing pump This valve must be able to clos...

Page 20: ...e size 150 m Electrical conductivity 500 S cm pH value 7 to 8 5 Overall hardness total alkaline earths max 20 German hardness scale 3 57 mmol l Further information on request Connect the cooling water...

Page 21: ...Installation 21 GA 05 139 1 02 06 99 Fig 19 Connecting the cooling water Cooling water out Cooling water in Cooling water in WRONG Cooling water out IN OUT Cooling valve MAG cooling circuit...

Page 22: ...ccm is required You may use a flow controller to ensure the flow Inadequate purge gas flow voids the warranty Connect purge gas to the VCR nut 1 4 as shown in Fig 20 Warning Monitor the purge gas cont...

Page 23: ...Installation 23 GA 05 139 1 02 06 99 Fig 20 Purge gas connection with connection kit VCR Nut 1 4 Port connector Tube to VCR Male connector Tube OD 1 4 ISO male pipe size 1 4...

Page 24: ...t be connected to the metal housings of the SUB D connector and SUB D socket Installation 24 GA 05 139 1 02 06 99 2 8 Installing the MAG DRIVE The converter can be installed in a 19 cabinet It is 1 2...

Page 25: ...is inserted at connector X19 at the rear of the converter Caution The converter will be damaged if it is ope rated with the incorrect supply voltage 25 GA 05 139 1 02 06 99 1 2 3 s 1 Phase L 2 Not ass...

Page 26: ...Connect the converter X21 to the pump motor connec tion X25 and to the TMS connection X30 using the combined DRIVE TMS cable Also refer to Fig 21 and 23 Make sure that you have fixed all cables prope...

Page 27: ...ription of the Emergency Off connection Pins 47 and 48 of control plug X14 make it possible to disable the output stage of the frequency converter via the hardware The power flow to the motor is then...

Page 28: ...ively used to output motor current actual frequency motor temperature rotor displacement signals PW24 PV13 PZ12 The output value can be increased or reduced by a scale factor see Section 4 3 2 Setting...

Page 29: ...X14 38 Function analog input 2 Analog input 2 Frequency setpoint X14 16 Analog input 1 Analog input 1 X14 32 33 Analog ground X14 35 X14 19 X14 2 Actual frequency Normal operation Start command applie...

Page 30: ...PZ12peak Current limiting 80 mA 1 2 3 4 5 6 7 9 Pump standstill Start command Power supply o k Threshold Threshold Motor or bearing temperature Motor current Act frequency Function signal relay Functi...

Page 31: ...rge gas OFF1 Vent ON1 The functions are active if a High signal 15 V e g Pins 28 or 29 is connected at the digital input Remote Start if Remote is active The functions Start and Remote are active if a...

Page 32: ...urge may cause the rotor to make contact with the touch down bearings This will cause increased wear Do not disconnect the MAG and MAG DRIVE while they are operating If MAG and MAG DRIVE have been dis...

Page 33: ...peration 33 GA 05 139 1 02 06 99 103 Forevacuum pressure mbar 102 101 100 10 1 10 2 10 3 Fig 30 Curve for safe venting of the MAG pressure rise as a function of venting time 0 10 20 30 40 50 60 Time s...

Page 34: ...s fast flashing green When the STA TUS LED is off the pump has come to a standstill Close the cooling water supply when the pump is switched off in order to avoid condensate formation in the pump The...

Page 35: ...t connected Start Stop via the operator control panel Jumper X14 11 X14 10 Start Stop via control input X14 12 0 1 P12 0 1 2 S R Q Q 1 s 0 1 2 1 1 START REMOTE 15 V X14 11 X14 12 X14 30 31 P36 1 X14 4...

Page 36: ...ration 1 0 A 480 Hz is displayed The backing pump and the MAG can be switched on simultaneously In such a situation the MAG serves from the very outset as an effective baffle Switching off The MAG DRI...

Page 37: ...use of the failure has been removed Increases a parameter value or proceeds to the next option Lowers a parameter value or returns to the previous option Selects the programming menu from the operatin...

Page 38: ...celerate up to the frequen cy setpoint Overload The speed is continuously monitored and controlled If the speed even at maximum current cannot be held at the setpoint as a result of external influence...

Page 39: ...time START command Mains ok Frequency P 25 x P24 Mains failure Mains failure Frequency P25 x P24 Frequency P25 x P24 Mains failure STOP command If a failure occurs the pump is decelerated Frequency 1...

Page 40: ...actual value C r Actual PVW 13 Rotor displacement in the magnetic bearing actual value r plane VW13 Actual PVW 24 Rotor displacement in the magnetic bearing actual value r plane VW24 Actual PZ 12 Rot...

Page 41: ...ing temp 100 C 10Vxscale factor V Actual PVW13 100 10Vxscale factor V Actual PVW24 100 10Vxscale factor V Actual PZ12 100 10Vxscale factor V Scale Factor Scale factor for the analog output 0 2 1 r w A...

Page 42: ...point Temperature 20 62 62 C r w Management System 4 3 5 Settings purge vent Not active at MAG W 2010 CHT Menu item Description Adjustable value option Ac cess min max stan Unit value value dard Purge...

Page 43: ...Option 1 Enter or Main menus Software Version 104 xx Enter German TMS OK No Purge Gas No Cooling Water Frequency Set Converter Enter Motor Current Option Relay 1 Bearing Temp Scale factor 1 0 x Enter...

Page 44: ...ow If the flow is very high and the temperature low a high temperature setpoint might not be reached For temperature sensitive applications observe the cooling water specifications refer to Section 1...

Page 45: ...llwert TMS TMS Code Heizung EIN K hlung EIN TMS OK Warnung TMS St rung TMS 1 The TMS status code is displayed on the operation display see Section 4 2 Heater or cooling active Fig 36 Function diagram...

Page 46: ...ted pumps For storage of contaminated pumps during tool maintenance the seal kit provi ded with the pump can be used Proceed as follows to seal the turbomolecular pump immediately after removing it fr...

Page 47: ...ve film washer 6x screw 6x nut 4x dry cartridge plastic adhesive film plastic cap Seal the high vacuum connection flange with the cover and the screws Pack the pump so that it may not be damaged durin...

Page 48: ...upon request A copy of this form is printed at the end of the Operating Instructions Declaration of Contamination of Vacuum Equipment and Components Either fasten this form at the pump or simply enclo...

Page 49: ...th the metal seal kit bolts collar flange retaining ring blank flange Centering ring with O ring desiccant nuts sealing disc screwed sealing plug for purge gas connector cap polyethylene bag with cabl...

Page 50: ...es Refer to Section 2 8 for the correct mounting of the converter in a rack max ambient temperature 45 C Apply cooling water according to specificati ons Check cooling water tubes for deposits See als...

Page 51: ...contact Ley bold If warning message persists contact Leybold service Check the chamber pressure during operati on Contact Leybold service Reduce backing pressure Additionally check process gas flow Se...

Page 52: ...ged or in case the measurement of the resistance shows abnormal values 3 4 k now Contact Leybold service Apply cooling water according to specifications Check cooling water tubes for deposits See also...

Page 53: ...s typically between 110 and 130 20 C to 70 C Replace the cable if it is damaged or in case the measurement of the resistance shows abnormal values now Check chamber temperature If the red LED at the w...

Page 54: ...old service Reduce backing pressure Check if the rotor rotates freely Contact Leybold service if the rotor is damaged or blocked Reduce backing pressure Set parameter Accel Time to default 1000 s see...

Page 55: ...onnectors straighten pins if required Deactivate Emergency off via control plug X14 and acknowledge failure message Reconnect or replace DRIVE cable Step 1 Check fuse Replace fuse TMS F4A 5x20 mm if b...

Page 56: ...ervice if the sensor is defective Step 3 Check TMS DRIVE cable Check TMS DRIVE cable connector X21 In parti cular measure resistance between pins X21 K and X21 M as well as between pins X21 K and X21...

Page 57: ...venting valve via control plug X14 LED on the valve must light up and a clicking noise can be heard Foreline pressure drops while the valve is closed Set purge flow according to specification Leave th...

Page 58: ...EWG When using the appropriate Leybold accessories e g connector lines and when powering the pump with the specified Leybold frequency converters the protection level prescribed in the EMC Guidelines...

Page 59: ...g No 121 35 121 36 121 37 121 44 The product indicated solely for fitting in another machine Commissioning is prohibited until the conformity of the end product with EC directive 89 392 EEC has been e...

Page 60: ...marketed by us correspond to the basic health and safety regulations specified in the EEC Directives This declaration is no longer valid if the product is modified without us being in full agreement T...

Page 61: ...compatibility The applicable measurements were made taking into account the following standards EN 50081 Part 2 EN 50082 Part 2 Note Attention must be paid to the information provided on proper insta...

Page 62: ...in compliance to the tested stan dards NRTL Report No E9814034E01 The tested system includes the following components Turbomolecular pump MAG W 1600 2000 Cat Nos 121 31 121 32 894 14 894 15 894 16 894...

Page 63: ...Notes 63 GA 05 139 1 02 06 99...

Page 64: ...pment and components which have been contaminated by biological explosive or radioactive substances will not accepted without written evidence of decontamination Please list all substances gases and b...

Page 65: ...er Turbopump Serial Number Complaint Process OEM Equipment Name and Model Process Gas Was the turbopump replaced Yes No If yes replacement pump P N replacement pump S N Date Installed Date Removed Dat...

Page 66: ...G 1600 C CT MAG W 1600 C CT MAG 2000 C CT MAG W 2000 C CT MAG DRIVE L MAG DRIVE L2 GA 05 130 3 02 May 1998 MAG 1600 C CT MAG W 1600 C CT MAG 2000 C CT MAG W 2000 C CT MAG DRIVE 2000 GA 05 135 1 02 Aug...

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