Troubleshooting
54
GA 05.139/1.02 - 06/99
Failure Message on
Display
MB
An abnormal displacement
ot the rotor occured at fre-
quencies between 146 Hz
and 480 Hz.
MB-Code Wrong
Magnetic bearing controller
does not work.
Starting Time
The frequency has not rea-
ched 40 Hz 2 minutes after
the start command was
applied.
Accel. Time
The pump does not reach
the normal operation fre-
quency after the set maxi-
mum acceleration time.
Overload Time
The rotational speed has
dropped below normal ope-
ration frequency and stays
there for longer than the
maximum „Accel. Time“.
Shutdown Freq.
Rotational speed dropped
below the shutdown frequen-
cy threshold (140 Hz).
Cooling Temp. SC
The cooling water tempera-
ture sensor reads a tempera-
ture lower than 1
°
C.
Measures
Acknowledge failure message and restart
the pump. If failure message persists
contact Leybold service.
Check the chamber pressure during the
operation. Refer to Section 3.1 for correct
venting of the pump.
Contact Leybold service.
Contact Leybold service.
Reduce backing pressure.
Check if the rotor rotates freely. Contact
Leybold service if the rotor is damaged or
blocked.
Reduce backing pressure.
Set parameter „Accel. Time“ to default 1000
s; see Section 4.3.3.
Reduce backing pressure. Additionally
check process gas flow.
Set parameter „Normal Operation“ to
default 95 % and parameter „Accel. Time“ to
default 1000 s; see Section 4.3.3.
Reduce backing pressure. Additionally
check process gas flow.
Repeat step 1 of „failure Cooling Temp.“.
Contact Leybold service if the resistance of
the sensor is less than 100
Ω
.
Repeat step 2 of „failure Cooling Temp.“.
Contact Leybold service if the resistance of
the sensor is less than 100
Ω
.
Contact Leybold service.
Possible Cause
Mechanical shocks, possibly due to tool
maintenance.
Shock venting.
Converter failure.
Converter failure.
Backing pressure too high during start-up.
Rotor blocked.
Backing pressure too high during start-up.
Parameter „Accel. Time“ is not set correctly.
Backing pressure too high during operation.
Parameters „Accel. Time“ or „Normal Opera-
tion“ are not set correctly.
Backing pressure too high during operation.
Temperature sensor Pt 100 short-circuited.
TMS cable short-circuited.
Converter failure.
Summary of Contents for MAG W 2010 CHT
Page 63: ...Notes 63 GA 05 139 1 02 06 99...
