LEYBOLD 230110 Instruction Manual Download

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Catalog No.

230110
230111

Vacuum Gauge Controller

CM 51

COMBIVAC

CM 51

COMBIVAC

Instruction Manual GA130001441

_002_C0

Summary of Contents for 230110

Page 1: ...Catalog No 230110 230111 Vacuum Gauge Controller CM 51 COMBIVAC CM 51 COMBIVAC Instruction Manual GA130001441_002_C0...

Page 2: ......

Page 3: ...OMBIVAC CM 51 11 3 2 THERMOVAC Pirani Method of Measurement 11 3 3 PENNINGVAC cold cathode Method of Measurement 11 3 4 Connectable Gauge Heads 11 4 Technical Data 12 4 1 General Data 12 4 1 1 Mechani...

Page 4: ...RS485 Interface Interface RS232 RS485 23 5 3 8 Profibus DP Interface Interface Profibus DP 23 5 3 9 Relay Output Relay Output 24 6 Operation 25 6 1 Front Panel 25 6 1 1 Display 25 6 1 2 Control Pushb...

Page 5: ...n 41 8 2 1 Protocol 41 8 2 2 General String Structure 41 8 3 Command Set Mnemonics 42 8 3 1 Command Overview 42 8 3 2 RPV Read Pressure Value 43 8 3 3 RVN Read Version Number 43 8 3 4 RSS Read Set Poi...

Page 6: ...6 GA130001441_002_C0 09 2016 10 Storing and Waste Disposal 52 10 1 Packaging 52 10 2 Shelving 52 10 3 Waste Disposal 52 Annex 1 EU Declaration of Conformity 54 Annex 2 Declaration of Contamination 55...

Page 7: ...nment for the THERMOVAC gauge head 30 Figure 19 Behaviour of a switching function in response to pressure changes 34 0 2 Table of Tables Table 1 Part Numbers 8 Table 2 Connectable gauge heads 11 Table...

Page 8: ...information Figure 1 Nameplate Examble 1 2 Conforming Utilisation The COMBIVAC CM 51 is a universal vacuum gauge which owing to the combination of two principles of measurement Pirani Thermovac and Pe...

Page 9: ...mentation Subject to technical alterations without prior notice The figures are not binding 1 4 Shipping Damage Examine the shipping package as to any external damage In case any damage is determined...

Page 10: ...prevent injury to persons and damage to equipment in connection with electricity NOTICE General information pointing to further information respectively reference sections 2 3 Basic Safety Information...

Page 11: ...y exclusively the principle of the controlled Pirani where the measurement filament is part of a Wheatstone Bridge When the temperature of the filament changes due to pressure changes then the bridge...

Page 12: ...1 Mechanical Data Dimensions Breite 106 4 mm 1 4 19 H he 128 4 mm 3 HE Tiefe 174 5 mm Wight 1 4 kg Installation depth 230 mm approx including connected plugs Usage Rack installation Front panel instal...

Page 13: ...gas type correction characteristic nitrogen PENNINGVAC gas type correction factor Switch on type for sensor Switch off type for sensor Table 4 Sensor parameters factory defaults 4 1 2 2 General Parame...

Page 14: ...ses 2 x T1 6A H Power consumption 10 W Current consumption 0 2 0 1 A approx Overvoltage category II Protection category 1 Connection Cold device plug IEC 320 C14 4 3 Measurement Channels Number Two TH...

Page 15: ...ycles at maximum load Connection SUB D 25 way plug 4 5 Outputs and Inputs 4 5 1 Analog Output Number 1 per measurement channel Voltage range 0 10 VDC limit values 0 10 5 VDC Output voltage for fault 1...

Page 16: ...tion 4 5 3 Serial Interfaces 4 5 3 1 RS232 Standard RS232 Parameters 8 data bits 1 stop bit no parity no protocol Signals RXD and TXD Baud rate 9600 19200 38400 baud Connection SUB D 9 way socket join...

Page 17: ...2 Neck collar screws 4 Plastic sleeves 4 Edge protection 2 Adhesive feet 2 Table 6 Supplied equipment 5 2 Mechanical Installation The COMBIVAC CM 51 gauge can be used as follows Rack installation Fron...

Page 18: ...stallation Attach the sub rack within the rack Push the COMBIVAC CM 51 into the sub rack Affix the instrument to the sub rack with the neck collar screws and the plastic sleeves included in the delive...

Page 19: ...e delivery onto the bottom edge of the front panel WARNING Risk of suffering injury When using the COMBIVAC CM 51 as a benchtop instrument fit the two edge protection rubber pieces onto the top and bo...

Page 20: ...ure 7 A page 20 is intended only for a mains cord which on the instrument side is provided with a inlet connector for non heating apparatus NOTICE Mains cord Included in the delivery of the instrument...

Page 21: ...ecting TM 1 connect the gauge head using the corresponding connecting cable to connection TM1 on the rear of the COMBIVAC CM 51 TM 2 connect the gauge head using the corresponding connecting cable to...

Page 22: ...t and External Control Analog Output Extern Control The Connection Analog Output Extern Control Figure 7 G page 20 and Figure 8 page 22 provides the connections of the analog outputs for the signals o...

Page 23: ...rface RS232 use a serial extension cable with a 9 way plug and a 9 way socket The wires in the cable must not be crossed Utilisation of the RS485 requires a special cable 5 3 8 Profibus DP Interface I...

Page 24: ...es and ready signals Figure 11 Connection plug for relay output SUB D 25 way DANGER Dangerous voltage Voltages exceeding 60 VDC or 30 VAC are dangerous when touched You may only switch at the connecto...

Page 25: ...splay of channel 3 with two corresponding switching thresholds D Status indication operating pushbuttons 6 1 1 Display Display Description Measured value or status message SP1 SP2 Switching function s...

Page 26: ...able to enter data in the parameter mode or switch the PENNINGVAC gauge head on or off Chapter 6 4 3 3 Switching the PENNINGVAC on and 6 4 3 4 Switching the PENNINGVAC off page 29 By operating the pu...

Page 27: ...tching on the COMBIVAC CM 51 it will automatically run the measurement mode If running the parameter mode and when not operating a key for 10 seconds the instrument will then automatically revert back...

Page 28: ...l will flash for 10 seconds Figure 13 Operating the pushbutton CHANNEL 6 4 3 2 Parameter Mode Selection Press the pushbutton PARA and keep it depressed for approximately 2 seconds o The instrument wil...

Page 29: ...switched on Either the measured value or a status message will be displayed Table 8 Page 27 Figure 15 Operating the pushbutton UP 6 4 3 4 Switching the PENNINGVAC off The PENNINGVAC gauge head can be...

Page 30: ...ale alignment for the THERMOVAC gauge head In order to ensure a stable but also precise alignment of the 100 point the alignment potentiometer 100 should be turned further by 90 in the clockwise direc...

Page 31: ...s In this way you can configure the instrument Table 9 Page 31 depicts all available parameters Parameter Groups Parameter Table 9 Parameter groups and corresponding parameters The available parameter...

Page 32: ...lue of the parameter is changed Repeat the last 2 steps so as to change further parameters of the same parameter group After having accessed the last parameter of a parameter group the instrument will...

Page 33: ...dual relays is defined in each case through two parameters the lower threshold and the upper threshold value of the switching function Lower threshold value SPx Lo The lower threshold value governs sw...

Page 34: ...s Keep the pushbutton PARA depressed for approximately 2 seconds o The instrument is now running the parameter mode in the parameter group SP Press the pushbutton PARA to select the desired parameter...

Page 35: ...parameter are displayed Use the arrow keys to change the parameter setting Repeat the steps to change further parameters of the parameter group 7 2 1 Filament Material THERMOVAC FIL Filament material...

Page 36: ...4 3 3 Switching the PENNINGVAC on page 29 ECt Externally through optocoupler PLC compatible high level 13 VDC 7 mA at 24 VDC Hot Warm start The sensor is switched on automatically upon switching on t...

Page 37: ...eter t off you can define a switch off value When the pressure in the measurement channel TM2 exceeds the switch off value then the sensor is switched off 7 2 7 Sensor Switch off Value t off This para...

Page 38: ...display Figure 12 Page 25 Position E 7 3 2 Analog Output AnALoG Analog output fort he gauge heads Display Description CM31 mode Chapter 4 5 1 Analog Output page 15 CM 51 mode Chapter 4 5 1 Analog Out...

Page 39: ...ing restarted the instrument 7 3 6 Baud Rate bAud Baud rate oft he interface Display Description Baud rate 9600 baud Baud rate 19200 baud Baud rate 38400 baud Table 17 Values for the parameter bAud CA...

Page 40: ...1 2 Nomenclature The following terms and symbolical spellings are used in order to describe the computer interface Terms Description Send Data transfer from the host to the instrument receive Data tr...

Page 41: ...the communication the computer is always the master The input buffer of the computer must have a capacity of at least 50 bytes 8 2 2 General String Structure Input of Address is necessary for RS485 o...

Page 42: ...al Address Read address for RS485 SSA Set Serial Address Set address for RS485 RGP Read General Parameter Read instrument settings SGP Set General Parameter Set instrument settings RGC Read Gas Correc...

Page 43: ...Measured value measurement range 3 Measured values measurement range Err Lo 4 Measured values measurement range Err Hi 5 Sensor off S oFF 6 HV on HU on 7 Sensor error Err S 9 No sensor no Sen 10 No sw...

Page 44: ...2 TM2 3 Channel 3 PM b Status SP1 0 low 1 high c Status SP2 0 low 1 high 8 3 5 SHV Set HV on off Setting HV on off for PENNINGVAC if switch on and switch off type have been set to manual S SHV a b CR...

Page 45: ...escription a Adress 1 126 01 7E output in the HEX format 8 3 9 SSA Set Serial Adress Setting adress for RS485 S SSA a CR E OK CR Parameter Description a Adress 1 126 01 7E entry must be in the HEX for...

Page 46: ...b Analog output 0 CM 31 mode 1 CM 51 mode X Parameter remains unchanged c Number of displayed digits 0 2 1 3 X Parameter remains unchanged d Brightness 0 hoch 1 gering X Parameter remains unchanged e...

Page 47: ...nel number 3 Channel 3 PM b Gas type correction factor channel Format X XX with a range of values 0 20 8 00 8 3 14 RSC Read Sensor Control Reading the type of sensor control for PENNINGVAC S RSC a CR...

Page 48: ...xx Switch off value in the current unit of measurement 8 3 16 RSP Read Set Point Reading the switching thresholds for a channel S RSP a CR E b TAB c TAB d TAB e CR Parameter Description a Channel numb...

Page 49: ...value of the switching threshold in the current unit of measurement in the form of x xxxxE xx c SP1 high pressure value of the switching threshold in the current unit of measurement in the form of x x...

Page 50: ...or display Fault cause and remedy Measurement signal from the gauge head significantly below the permissible range Measurement signal from the gauge head significantly above the permissible range Sens...

Page 51: ...1 6A H specified on the rear of the instrument The two fuses of the instrument are located in the fuse insert at the mains filter Figure 7 page 20 which may be levered out using a small screwdriver 9...

Page 52: ...room During storage the following ambient conditions need to be maintained Ambient temperature 20 60 C Humidity of the air As low as possible Preferably in a sealed plastic bag with desiccant 10 3 Wa...

Page 53: ...GA130001441_002_C0 09 2016 53 Notes...

Page 54: ......

Page 55: ...ication Process B Condition of the equipment No1 Yes No Contamination No1 Yes 1 1 Has the equipment been used toxic 2 Drained Product service fluid corrosive 3 All openings sealed airtight flammable 4...

Page 56: ...rvice zh leybold com Spain Leybold Spain S A C Huelva 7 E 08940 Cornell de Llobregat Barcelona Sales T 34 93 666 43 11 F 34 93 666 43 70 sales ba leybold com Service T 34 93 666 46 11 F 34 93 685 43 7...

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