MJ400306A1
7
4. Standard Specifications
Item
Specifications
Model Name
8700 MC/MM
8750MC/MM
F.S. flow rate (N
2
)
10SCCM
~
20SLM
20SLM
~
100SLM
Specifiable gas
N
2
, Air , O
2
, CO
2
, Ar , H
2
, He , etc.
Sensor type
Thermal winding sensor
Valve actuator
※1
Solenoid normally closed type
Control
Control range
※2
2
~
100% F.S.
5
~
100
%
F.S.
Response
2 sec Max.
(
0→98%
)
3 sec Max.
(
0→98%
)
Accuracy
Accuracy
±1.0 % F.S.
(
25
℃)
±1.5 % F.S.
(
25
℃)
Repeatability
±0.5 % F.S.
Pressure
Proof pressure
1 MPa (G)
Operating
pressure
500kPa (G) Max.
Operating
differential
pressure
※1
50
~
300kPa
(
F.S.
≦
5SLM
)
100
~
300kPa
(
F.S. > 5SLM
)
150
~
300kPa
(
F.S.
≦
50SLM
)
200
~
300kPa
(
F.S. >50SLM
)
Pressure
characteristic
0.3% F.S./100 kPa
Temperature
Working
temperature
5
~
45
℃
Temperature
characteristic
0.1
%
F.S./
℃
0.2%F.S./
℃
Humidity
Allowable
operating
humidity
10 – 90 %
(no condensation)
Flow rate setting
※1※3
Digital
①
Indicator
②
Communications
③
Event input selection
Analog
Standard: 0 – 5 V (Input impedance 100 kΩ min.)
Selection: 4 – 20 mA (Input impedance approx. 250 Ω)
Flow rate output
※3
Analog
Standard: 0 – 5 V (External load resistance 250 kΩ min.)
Selection: 4 – 20 mA (External load resistance approx. 300 Ω max.)
Display
Method
7-segment LED, 4 digits
Other
input/output
functions
Event input
5 contacts
Alarm output
1x NPN open collector output Max 35V : 50mA
Event output
2x NPN open collector output Max 35V : 50mA
Summary of Contents for 8700 MC
Page 1: ...MJ400306A1 1 Thermal Mass Flow Meter Controller MODEL 8700 SERIES INSTRUCTION MANUAL...
Page 33: ...MJ400306A1 33 19 External View 1 Integrated indicator type...
Page 34: ...MJ400306A1 34...
Page 35: ...MJ400306A1 35 2 Separate indicator type Main unit...
Page 36: ...MJ400306A1 36...
Page 37: ...MJ400306A1 37 Indicator URL http www kofloc co jp...