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MJ400306A1

1

Thermal Mass Flow Meter / Controller

MODEL 8700 SERIES

INSTRUCTION MANUAL

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Summary of Contents for 8700 MC

Page 1: ...MJ400306A1 1 Thermal Mass Flow Meter Controller MODEL 8700 SERIES INSTRUCTION MANUAL...

Page 2: ...improvement Prior to shipment every care has been taken in preparing this manual not to mention the product itself but if you notice any imperfections errors or omission please contact KOFLOC Prior to...

Page 3: ...ion Prior to Use 14 9 Nomenclature and Functions of the Indicator 15 10 Nomenclature and Functions of the Main Unit 16 11 Basic Operation of the Indicator 17 12 Changing Over the Operation Modes 20 13...

Page 4: ...ure that the proof pressure on the input equipment side is sufficient The output may possibly be in a range of 1 to 7 V in the case of voltage and 0 to 26 mA in the case of current 2 Items to Check ab...

Page 5: ...s may occur When it is expected that the product will be kept in storage for a long time take the following precautions Store the product in the package in which it was received from KOFLOC wherever p...

Page 6: ...large flow rate realized by a small body by employing a high lift actuator Controller type An indicator is installed and can be operated with a single 24 VDC power supply only Both of digital control...

Page 7: ...S 5SLM 150 300kPa F S 50SLM 200 300kPa F S 50SLM Pressure characteristic 0 3 F S 100 kPa Temperature Working temperature 5 45 Temperature characteristic 0 1 F S 0 2 F S Humidity Allowable operating h...

Page 8: ...US316 SUS316L SUS430 Fluor rubber PTFE Chloroprene rubber Optional Joint Rc1 4 Rc3 8 Optional 1 4SWL 1 8SWL 1 4VCR 3 8SWL Weight Integrated type approx 1200 g separate type approx 1400 g Integrated ty...

Page 9: ...d flow rate for one minute maximum from the storage to the power failure is lost 3 Upper lower limit flow rate alarm allowable range OK judgment function To use this function refer to 13 Applied Opera...

Page 10: ...in a place where ambient temperature is 15 to 35 The use of the equipment in a condition deviating from the conditions described in the specifications is a cause of failure When installing the mass f...

Page 11: ...to see if the connections of gas piping are not leaking If such a check is omitted and unsafe gas is used serious accidents may occur Give careful attention to piping after the unit also to ensure tha...

Page 12: ...6 Flow rate setting input 1 0 5 V 4 20 mA 7 Flow rate output 20 5 V 4 20 mA 8 Operation mode input 5V FULL OPEN S GND CLOSE OPEN CONTROL 9 5V output 5V Valve motion mode input only 10 ALARM output NPN...

Page 13: ...13 Do not connect different power supplies to the power input terminals of the above connector and the pin jack power terminals simultaneously Such a practice may cause a fire or damage to the equipm...

Page 14: ...ero adjust function Pressing the ZERO switch on the side of the main unit corrects deviation of the zero point This step is not needed when the auto zero function is active 3 Introducing gas After con...

Page 15: ...ey Digit Used to select a digit of the indicated value to change when setting a flow rate and various functions RUN key Used to change over the operation mode between fully closed control fully opened...

Page 16: ...hts when the event output 2 is on 7 segment LED 4 digits Indicates various flow rates and function set modes 10 Nomenclature and Functions of the Main Unit Side view of the main unit Never peel off th...

Page 17: ...w indication Not shown when the upper SV lamp on DISP key or mid upper values of the integrated Upper of integ flow indication flow rate value are zero SV lamp on DISP key Instantaneous flow rate indi...

Page 18: ...usly every 0 5 second Determination of a numeric value After getting a desired numeric value by the above operation press the ENT key The flashing will stop and the set value will be indicated When th...

Page 19: ...vided to 4 digits each and indicated three times Resetting the integrated flow rate When an integrated value is being indicated TF lamp lit pressing and holding the ENT key for 3 seconds or longer res...

Page 20: ...ode to the fully opened mode press and hold the RUN key for 2 seconds or longer Control mode RUN key less than RUN key 2 sec less than 2 sec Fully closed mode RUN key 2 sec or longer RUN key less than...

Page 21: ...ng in D 01 Flow rate setting method selection in 14 List of Function Setting Modes six SP values SP0 5 can be changed over by event inputs as shown below In the case of no event input or multiple even...

Page 22: ...blue line Upper limit alarm When the PV value exceeded the SV value AL Hi the flow rate alarm is turned on after the passage of AL dt Lower limit alarm When the PV value dropped below the SV value AL...

Page 23: ...AL Hi Flow rate alarm upper limit value D 15 AL Lo Flow rate alarm lower limit value D 16 AL dt Flow rate alarm delay time D 17 PV Instantaneous flow rate Upper limit alarm When the PV value exceeded...

Page 24: ...r limit alarm value the OK LED lights Refer to D 18 to D 21 in 14 List of Function Setting Modes 6 Using the integration setting function Integration event occurrence When an integration event flow ra...

Page 25: ...other than SP 02 Key lock of all settings D 07 RUN key action selection 01 00 RUN key not used 01 RUN key used D 08 Auto zero function 00 00 0FF 01 0N 01 The zero point is automatically adjusted when...

Page 26: ...alarm upper limit value F S 10 0 Settable range 0 5 100 0 For Controller 100 0 Settable range 0 0 100 0 For Meter D 16 Flow rate alarm lower limit value F S 10 0 Settable range 0 5 100 0 For Controlle...

Page 27: ...6 times 05 Moving average of sampling 32 times D 28 Indication update cycle indicator 02 00 No update cycle 01 50 msec cycle 02 100 msec cycle 03 200 msec cycle 04 500 msec cycle 05 1000 msec cycle D...

Page 28: ...le range 0 to full scale D 37 SP2 Expanded set flowrate 0000 Settable range 0 to full scale D 38 SP3 Expanded set flowrate 0000 Settable range 0 to full scale D 39 SP4 Expanded set flowrate 0000 Setta...

Page 29: ...top the supply of gas set the operation mode to the fully closed mode or reset the set flow rate to zero This will prevent counterflow AL 4 Upper limit alarm Insufficient flow rate alarm delay time un...

Page 30: ...leaned or replaced Please send it to KOFLOC h The sensor tube is clogged 1 If the tube is clogged gas keeps flowing Check it The sensor needs to be replaced Please send it to KOFLOC 2 The output will...

Page 31: ...in unit is leaking 1 Same as above When checking leak using leak detect fluid apply such fluid only to the joints before and after the unit but do not apply it to the inside of the main unit cover Aft...

Page 32: ...it will be charge free repaired in our factory But if a malfunction of the machine occurs due to the following reasons even within the warrant period it becomes the outside for a warranty a Malfuncti...

Page 33: ...MJ400306A1 33 19 External View 1 Integrated indicator type...

Page 34: ...MJ400306A1 34...

Page 35: ...MJ400306A1 35 2 Separate indicator type Main unit...

Page 36: ...MJ400306A1 36...

Page 37: ...MJ400306A1 37 Indicator URL http www kofloc co jp...

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