Keithley 2182, Service Manual, Page: 93 / 120

Keithley Instruments, Inc.
Cleveland, Ohio 44139
DRN.
CKD.
APP.
DATE
DATE
DATE
PART NUMBER
LTR REVISIONS APP. DATE
FORM 28777A-SBG
BRUNING 40-21 62198-SBG
SPECIFICATIONS
SPEC-2182A
A Released 29844 SZ 6/11/04
HW 6/11/04
SK 6/11/04
RKN 6/08/04
Rev A
Page 1 of 3
2182A Nanovoltmeter Specifications
VOLTS SPECIFICATIONS (20% OVER RANGE)
CONDITIONS: 1PLC with 10 reading digital filter or 5PLC with 2 reading digital filter.
ACCURACY:
±
(ppm of r ppm of range)
(ppm = parts per million) (e.g., 10ppm = 0.001%)
CHANNEL 1
RANGE RESOLUTION INPUT RESISTANCE
24 Hour
1
T
CAL
±
1°C
90 Day
T
CAL
±
5°C
1 Year
T
CAL
±
5°C
2 Year
T
CAL
±
5°C
TEMPERATURE
COEFFICIENT
0°-18°C & 28°-50°C
10.000000 mV
2,3,4
1 nV
>10 G
Ω
20 + 4 40 + 4 50 + 4 60 + 4 (1 + 0.5)/°C
100.00000 mV 10 nV
>10 G
Ω
10 + 3 25 + 3 30 + 4 40 + 5 (1 + 0.2)/°C
1.0000000 V 100 nV
>10 G
Ω
7 + 2 18 + 2 25 + 2 32 + 3 (1 + 0.1)/°C
10.000000 V 1
µ
V
>10 G
Ω
2 + 1
5
18 + 2 25 + 2 32 + 3 (1 + 0.1)/°C
100.00000 V
4
10
µ
V
10 M
Ω±
1%
10 + 3 25 + 3 35 + 4 52 + 5 (1 + 0.5)/°C
CHANNEL 2
6,10
100.00000 mV 10 nV
>10 G
Ω
10 + 6 25 + 6 30 + 7 40 + 7 (1 + 1)/°C
1.0000000 V 100 nV
>10 G
Ω
7 + 2 18 + 2 25 + 2 32 + 3 (1 + 0.5)/°C
10.000000 V 1
µ
V
>10 G
Ω
2 + 1
5
18 + 2 25 + 2 32 + 3 (1 + 0.5)/°C
CHANNEL 1/CHANNEL 2 RATIO: Ratio accuracy =
±
channel 2 reading (accuracy channel 1 range) + channel 1 reading (accuracy channel 2 range)
(channel 2 reading)
2
DELTA (hardware-triggered coordination with 24XX series or 622X series current sources for low noise R measurement): accuracy = accuracy of selected
Channel 1 range plus accuracy of I source range.
DELTA measurement noise with 6220 or 6221 : Typical 3nVRMS/
√
Hz (10mV range)
21
. 1 Hz achieved with 1PLC, delay = 1ms, RPT filter = 23 (20 if 50Hz)
PULSE-MODE (with 6221): line synchronized voltage measurements within current pulses from 50us to 12ms, pulse repetition rate up to 12 Hz
Pulse measurement noise:
(typical RMS noise, R
DUT
<10 ohms) (0.009ppm of range
*
)/meas_time/
√
pulse_avg_count + 3nV
/
√
(2 · meas_time · pulse_avg_count) for 10mV range
**
*
0.0028ppm for the 100mV range, 0.0016ppm for ranges 1V and above
**
8nV/
√
Hz for ranges above 10mV meas_time(sec) = pulsewidth – pulse_meas_delay in 33us incr.
DC
NOISE PERFORMANCE
7
(DC NOISE EXPRESSED IN VOLTS PEAK-TO-PEAK)
Response time = time required for reading to be settled within noise levels from a stepped input, 60Hz operation.
RANGE
CHANNEL 1
RESPONSE TIME NPLC, FILTER 10mV 100mV 1V 10V 100V NMRR
8
CMRR
9
25.0 s 5, 75 6 nV 20 nV 75 nV 750 nV 75
µ
V 110 dB 140 dB
4.0 s 5, 10 15 nV 50 nV 150 nV 1.5
µ
V 75
µ
V 100 dB 140 dB
1.0 s 1, 18 25 nV 175 nV 600 nV 2.5
µ
V 100
µ
V 95 dB 140 dB
667 ms 1, 10 or 5, 2 35 nV 250 nV 650 nV 3.3
µ
V 150
µ
V 90 dB 140 dB
60 ms 1, Off 70 nV 300 nV 700 nV 6.6
µ
V 300
µ
V 60 dB 140 dB
CHANNEL 2
6,10
25.0 s 5, 75 - 150 nV 200 nV 750 nV - 110 dB 140 dB
4.0 s 5, 10 - 150 nV 200 nV 1.5
µ
V - 100 dB 140 dB
1.0 s 1, 10 or 5, 2 - 175 nV 400 nV 2.5
µ
V - 90 dB 140 dB
85 ms 1, Off - 425 nV 1
µ
V 9.5
µ
V - 60 dB 140 dB
VOLTAGE NOISE VS. SOURCE RESISTANCE
11
(DC NOISE EXPRESSED IN VOLTS PEAK-
TO-PEAK)
SOURCE
RESISTANCE NOISE ANALOG FILTER DIGITAL FILTER
0
Ω
6 nV Off 100
100
Ω
8 nV Off 100
1 k
Ω
15 nV Off 100
10 k
Ω
35 nV Off 100
100 k
Ω
100 nV On 100
1 M
Ω
350 nV On 100