ISVT GMC1100, Instruction Manual, Page: 47 / 54

- 47 -
EX)
<Host> 'RR1<CR>'
<GMC1100> '1.500<CR>'
<Host> 'RR2<CR>'
<GMC1100> ' 1000<CR>'
RU1 ~ RU8 - Read Unit
- Return Value : 6byte data
EX)
<Host> 'RU1<CR>'
<GMC1100> ' SCCM<CR>' or ' SLM<CR>' or ' Torr<CR>' or
'mTorr<CR>'
RMS - Read MFC Status
- Return Value : 9byte data
EX)
<Host> 'RMS<CR>'
<GMC1100> '11001011<CR>'
Return Value means that
LSB
11001011
MSB
is MFC Flow ON/OFF
Status.
Each bit means each Channel. MSB is 8Ch and LSB is 1Ch.
1 means MFC Flow ON and 0 mean MFC Flow OFF.
String '11001011' means that Ch1, Ch2, Ch5, Ch7, Ch8 is ON
other Channels OFF.
RD1 ~ RD8 - Read Device
- Return Value : 4byte data
EX)
<Host> 'RD1<CR>'
<GMC1100> 'MFC<CR>' or ' CM<CR>'
Install Card Data.