Inficon Sion, Operating Manual, Page: 45 / 52

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Sion Operating Manual
Chapter 3
Maintenance and Diagnosing Problems
3.1 Introduction
All maintenance for this instrument should be referred to INFICON service or
technically qualified personnel. Refer to
How To Contact Customer Support .
WARNING - Risk Of Electric Shock
Do not open the instrument case! There are no
user-serviceable components within the instrument
case.
Refer all maintenance to INFICON service or technically
qualified personnel.
3.2 Disconnecting One Detector While
Other Detectors Are Running
CAUTION
When routine maintenance is conducted on a process
tool and more than one Detector is connected to the
Breakout box, a signal level variance may occur if a
Detector is disconnected. The signal variance may be as
high as 26 mv. This variance may not have any affect on
the additional Detectors, but this depends on the tool and
application.