Inficon IC6, Operating Manual

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IC6 Operating Manual
In many cases, a braided ground strap is sufficient. However, there are cases when
a solid copper strap (0.030 in. thick and 1 in. wide) is required because of its lower
RF impedance.
Figure 2-3 System grounding diagram
2.2.3 Minimizing Noise Pickup From External Cabling
When a IC6 is fully integrated into a deposition system, there can be many wire
connections, each a potential path for electrical noise to reach the inside of the IC6.
The likelihood of these wires causing a problem can be greatly diminished by
adhering to the following guidelines.
 Use shielded coax cable or twisted pairs for all connections.
 Minimize cable lengths.

Avoid routing cables near areas that have the potential to generate high levels
of interference. For example, large power supplies such as those used for
electron beam guns or sputtering sources can be a source of large, rapidly
changing electromagnetic fields. Placing cables as little as one foot away from
these problem areas can significantly reduce noise pickup.
 Be sure that a good ground system and straps are in place per the
recommendations in
section 2.2.2 on page 2-5 .
 Ensure that all IC6 covers and option panels are in place and tightly secured
with the provided fasteners.
NOTE: Always use shielded cables when making connections to the IC6 rear
panel to minimize electrical noise pickup.
Back Panel
Ground
Stud
Earth
Ground
Transducer
Feedthrough
Vacuum System