Inficon IC6, Operating Manual

Page: 223 / 342

10 - 53
IP
N 07
4-
50
5-
P1
E
IC6 Operating Manual
3
(0x03)
Go to Non-Deposit
Control
This cannot be done from Ready, Stop, Suspend or Crucible
Switch. When there is no good crystal, this command will go
to Non-Deposit Hold if the previous state was Time Power,
otherwise, is not allowed.
4 (0x04) Go to Post-Deposit
(Feed Ramp)
Cannot be done if in Crucible Switch
5
(0x05)
Continue Deposit Go to Deposit, but don't zero thickness.This cannot be done
from Ready, Idle, Stop, Suspend, Crystal Switching or
Crucible Switch.When there is no good crystal, this command
will go to Time Power if the previous state was Non-Deposit
Hold, otherwise, is not allowed.
6
(0x06)
Go to Manual. (Source shutter does not change position) Cannot be done if
in STOP, Suspend or Crucible Switch, or there is not a good
crystal.
7
(0x07)
Set Power Level <Float> Range is 0-99.99. Only allowed if in Manual, Time Power, or
Non-Deposit Hold State. If the value is greater than the Max
Power or less than the Min Power, a value error is returned.
8
(0x08)
Open Source
shutter
Only allowed if in Manual
9
(0x09)
Close Source
shutter
Only allowed if in Manual
10
(0x0a)
Set Averaged Rate <Float> Range is 0-999.9. Only in Time power or Non Deposit Hold -
the estimated rate used.
11
(0x0b)
N/A
Table 10-16 Remote layer (continued)
RL
Command
ID
Meaning
Action
Value
Notes