Inficon IC6, Operating Manual

Page: 47 / 342

2 - 5
IP
N 07
4-
50
5-
P1
E
IC6 Operating Manual
2.2.2 Connections to Earth Ground
There are two required earth ground connections:
 The earth ground connection on the IC6 is a threaded stud with a hex nut.
Connect a ring terminal to the ground strap, thus allowing a good connection
and easy removal and installation. This connection must be made at
installation. For best protection against high frequency noise, the
length-to-width ratio of the earth conductor should not exceed 5:1
.
See Figure 2-3 for the suggested method of grounding.
 This IC6 is also connected to earth ground via a sealed three-core power cable,
which must be plugged into a socket outlet with a protective earth ground
terminal. Extension cables must always have three conductors including a
protective earth ground conductor.
WARNING - Risk Of Electric Shock
Never interrupt the protective earth ground intentionally.
Any interruption of the protective earth ground
connection inside or outside the IC6 or disconnection of
the protective earth ground terminal is likely to make the
IC6 dangerous.
This symbol indicates where the protective earth ground
is connected inside the IC6. Never unscrew or loosen this
connection.
CAUTION
An external earth ground connection is required to
ensure proper operation, especially in electrically noisy
environments.
When used with RF powered sputtering systems, the grounding method may have
to be modified to the specific situation. An informative article on the subject of
Grounding and RFI Prevention was published by H.D. Alcaide, in “Solid State
Technology”, p.117, April, 1982.