V100 (2019-11)
Doc. Ref. XGC-320-100119
85
9
Service
9.1
Calibration
Every Ideal Vacuum Products XGS-321 sensor is calibrated prior
to shipment using nitrogen (N
2
). However, you can calibrate the
instrument by adjusting zero (vacuum) and span (atmosphere)
using the procedure described previously in section 4.3 titled
"Programming". Zero and span (atmosphere) calibration affect
the displayed value and the output signal. Zero calibration opti-
mizes performance of the gauge when operating at a low pres-
sure range of 1.00×10
-4
Torr to 1.00×10
-3
Torr. If your minimum
operating pressure is higher than 1.00×10
-3
Torr, it is not nor-
mally necessary to perform calibration at zero and thus span
calibration should be adequate. If you are able to evacuate your
system to below 1.00×10
-4
Torr, it is always a good practice to
check and set zero if necessary. This will also improve perfor-
mance in cases where gauge contamination is causing higher
readings than 1.00×10
-4
Torr even though the system has been
evacuated to below 1.00×10
-4
Torr. Care should be exercised
when using gases other than nitrogen (N
2
).
9.2
Maintenance
In general, maintenance is not required for your Ideal Vacuum
Products sensor and controller. Periodic performance checks
may be done by comparing the sensor to a known reference
standard.