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Convectron

®

ATM Vacuum Gauge Module Instruction Manual

79

Appendix B Theory of Operation

The module measures gas pressures from 1 x 10

–4

Torr to 1000 Torr.

Vacuum chamber pressure is measured by a Convectron
convection-enhanced Pirani heat-loss gauge. The differential between
atmospheric and vacuum chamber pressures is measured by a Piezo
resistive diaphragm sensor. Figure B-1 illustrates the Convectron gauge and
diaphragm sensor.

Figure B-1

Convectron heat-loss gauge and Piezo resistive diaphragm sensor

B.1

Piezo resistive diaphragm
sensor

The Piezo resistive diaphragm sensor measures the differential between
atmospheric and vacuum chamber pressures. Changes in the differential
between atmospheric and vacuum chamber pressures cause the diaphragm
to move.

The differential pressure sensor connects to the vacuum chamber through a
port on the Convectron gauge. A second port, extending from the sensor, is
open to atmosphere and provides the pressure comparison that enables
differential pressure measurement.

The differential pressure sensor provides a direct, accurate,
electromechanical measurement of differential pressure regardless of the
gas composition. Changes in pressure on the diaphragm cause activation
and deactivation of relays at programmable setpoints that correspond to
increasing and decreasing differential pressures.

Piezo resistive diaphragm
sensor

Measures differential between
atmospheric and vacuum
chamber pressures

Convectron heat-loss Pirani gauge

Measures vacuum chamber pressure as a
function of heat loss through sensing wire

Ribbon cable

Connects differential pressure

sensor board to main PC board

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Summary of Contents for GRANVILLE-PHILLIPS Convectron ATM

Page 1: ...GRANVILLE PHILLIPS HELIX TECHNOLOGY CORPORATION Convectron ATM Vacuum Gauge Module Instruction Manual Instruction manual part number 385004 Revision 01 September 2004 ...

Page 2: ......

Page 3: ...A 8 AM to 5 PM weekdays excluding holidays Toll free phone 1 800 776 6543 Phone 1 303 652 4400 FAX 1 303 652 2844 Email custserv helixtechnology com 2004 Helix Technology Corporation All rights reserved Convectron is a registered trademark of Helix Technology Corporation Granville Phillips is a trademark of Helix Technology Corporation All other trademarks and registered trademarks are the propert...

Page 4: ......

Page 5: ...ep 1 Install pressure relief devices 7 Step 2 Locate and orient module 7 Locate the module 7 Orient the module 8 Step 3 Attach module to vacuum chamber 9 1 8 NPT pipe thread 9 VCR type fitting 9 KF flange 9 ConFlat flange 9 Step 4 Assemble and connect wiring 10 Connecting cable 10 Wiring terminals 10 Grounding 12 Step 5 Configure setpoint relays for the application 13 Step 6 Calibrate the Convectr...

Page 6: ...settings 38 Chapter 4 RS 485 Module Operation 39 4 1 Preparing to operate the RS 485 module 39 4 2 Address 42 4 3 RS 485 commands 43 Error response from module 43 Parity 43 Baud rate 44 4 4 Setpoint relays 45 Reading pressure values 45 Adjusting setpoints 49 Disabling an operable relay 53 Reading setpoints 53 Programming or reading setpoint relay assignments 53 Reading setpoint relay status 54 4 5...

Page 7: ...solutions 62 RS 485 error messages 64 5 3 Convectron gauge test 66 5 4 Convectron gauge removal and replacement 67 Removing the Convectron gauge 68 Replacing the Convectron gauge 69 5 5 Returning a damaged module 70 Appendix A Specifications 73 Appendix B Theory of Operation 79 B 1 Piezo resistive diaphragm sensor 79 B 2 Convectron heat loss Pirani gauge 80 B 3 Wheatstone bridge circuit descriptio...

Page 8: ...iv Convectron ATM Vacuum Gauge Module Instruction Manual ...

Page 9: ...er 5 explains troubleshooting Convectron gauge testing removal and replacement and module return procedures Appendix A provides specifications for the module Appendix B explains terminology and explains how the Convectron convection enhanced Pirani heat loss gauge and Piezo resistive diaphragm sensor measure pressure 1 2 Caution and warning statements This manual contains caution and warning state...

Page 10: ...y with all instructions while you are installing operating or maintaining the module Failure to comply with the instructions violates standards of design manufacture and intended use of the module Granville Phillips and Helix Technology Corporation disclaim all liability for the customer s failure to comply with the instructions Read instructions Read all instructions before installing or operatin...

Page 11: ...il custserv helixtechnology com Table 1 1 Terms describing Convectron ATM module and components Term Description Module The Convectron ATM vacuum gauge module which contains a Convectron convection enhanced Pirani heat loss pressure gauge and a Piezo resistive diaphragm pressure sensor and electronics Convectron gauge The Convectron convection enhanced Pirani heat loss gauge which measures pressur...

Page 12: ...4 Convectron ATM Vacuum Gauge Module Instruction Manual ...

Page 13: ...ctor on the module Figure 2 1 illustrates the analog version of the module In the analog version setpoint relay 1 is assigned to the Convectron gauge and setpoint relay 2 is assigned to the differential pressure sensor Figure 2 1 Analog version of module WARNING Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damag...

Page 14: ...cuum chamber 4 Assembling and connecting module wiring 5 Configuring the setpoint relays to the desired voltage levels analog version or digital pressure values RS 485 version 6 Calibrating the Convectron gauge at atmospheric and vacuum pressures This chapter also explains what to do if radio frequency interference RFI disrupts operation of the RS 485 version of the module Vacuum chamber fitting S...

Page 15: ...n area where ambient temperature remains reasonably constant Do not locate the module where it requires long lengths of tubing or has constricted tubing Length of tubing depends on the application Longer lengths will affect vacuum pressure limit and response time Do not locate the module near the pump where gauge pressure might be lower than normal vacuum chamber pressure Do not locate the module ...

Page 16: ...on gauge will read correctly below 1 Torr with the module mounted in any position inaccurate readings will result at pressures above 1 Torr if the module axis is not horizontal Figure 2 3 Module orientation Mount module axis horizontally to ensure accurate measurement above 1 Torr Vacuum chamber Vacuum chamber Vacuum chamber Vacuum chamber V a c u u m c h a m b e r V a c u u m Vacuum Recommended N...

Page 17: ... Assemble the components and tighten them to finger tight d While holding a back up wrench stationary tighten the female nut 1 8 turn past finger tight on 316 stainless steel or nickel gaskets or 1 4 turn past finger tight on copper or aluminum gaskets KF flange The KF mounting system requires O rings and centering rings between mating flanges a Tighten the clamp wing nut to compress the mating fl...

Page 18: ... end of the cable connect the shield to the outer shell of the subminiature D connector On both versions of the module connect the 11 5 to 26 5 VDC power supply to terminals 3 and 4 Terminal 4 ground is negative Terminal 3 input is positive For grounding instructions see page 12 Wiring terminals Figure 2 4 illustrates the D subminiature terminals for the analog version of the module Figure 2 5 ill...

Page 19: ...djust 2 Setpoint 1 adjust 1 15 Relay 1 common 14 Relay 1 normally closed 13 Relay 2 normally closed 12 Relay 2 common 11 Relay 2 normally open 10 Relay 1 normally open 9 No connection 8 No connection 7 Diaphragm zero adjust 6 Signal ground No connection 5 Power ground 4 11 26 V power input 3 RS 485 B line 2 RS 485 A line 1 15 Relay 1 common 14 Relay 4 common 13 No connection 12 Relay 2 common 11 R...

Page 20: ...o the gauge stem of the housing b Install a 3 31 mm2 12 AWG or larger copper wire between the clamp and a metal ground lug bolt or stud on the vacuum chamber Figure 2 6 Ground connection to vacuum chamber WARNING Improper grounding could cause product failure serious personal injury or death To reduce the risk of product failure serious personal injury or death follow ground network requirements f...

Page 21: ... Convectron gauge for the analog version of the module see pages 34 37 To calibrate the Convectron gauge for the RS 485 version of the module see pages 56 57 Atmospheric pressure calibration An atmospheric calibration is performed on the Convectron gauge using N2 at the factory before the module is shipped The factory calibration sets the atmospheric calibration point to 760 Torr of N2 Because per...

Page 22: ...is manual may cause harmful interference to radio and television communications However there is no guarantee that interference will not occur in a particular installation If operating the module in a residential area causes interference the customer will be required to eliminate the interference at the customer s own expense If the module causes interference to radio or television reception which...

Page 23: ... illustrates the analog version front panel Table 3 1 lists features of the front panel Figure 3 1 Analog version front panel WARNING Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage personal injury or death Do not use the module to measure the pressure of flammable or explosive gases Test points Setpoint pot...

Page 24: ... ATM ZERO adjust potentiometer Enables calibration of differential pressure sensor zero DIAPHRAGM ZERO and COMMON test points 4 000 V SP1 ADJ potentiometer Enables setting of vacuum pressure at which relay 1 activates and deactivates SETPOINT1 and COMMON test points Application specific SP2 ADJ potentiometer Enables setting of differential pressure at which relay 2 activates and deactivates SETPOI...

Page 25: ...u may use the module front panel and the jumpers inside the module to perform the tasks listed in Table 3 3 Table 3 2 Relay setpoints and activation direction Relay Setpoint V Pressure corresponding to setpoint Torr Activation direction Relay 1 Activate with decreasing vacuum chamber pressure Relay 2 Activate with increasing differential pressure factory default Activate with decreasing differenti...

Page 26: ...on page 19 to calculate pressure in Torr y as a function of output voltage x Figure 3 2 and Figure 3 3 on pages 20 21 are graphs that represent true pressure for N2 or air y axis versus voltage x axis Output impedance is 100 Ω The output is normalized to 0 375 VDC at vacuum chamber pressure and to 5 659 VDC at 1000 Torr for N2 or air Commonly used gases other than N2 or air Refer to Table 3 5 on p...

Page 27: ...ert Torr to mbar multiply y by 1 333 To convert Torr to Pa multiply y by 133 3 Segment Output voltage Equation where y pressure in Torr and x voltage Coefficients 1 0 375 to 2 842 V a 0 02585 b 0 03767 c 0 04563 d 0 1151 e 0 04158 f 0 008737 2 2 842 to 4 945 V a 0 1031 b 0 3986 c 0 02322 d 0 07438 e 0 07229 f 0 006866 3 4 94 to 5 659 V a 100 624 b 0 37679 c 20 5623 d 0 0348656 y a bx cx 2 dx 3 ex ...

Page 28: ...M Vacuum Gauge Module Instruction Manual Figure 3 2 Analog output voltage vs indicated N2 or air pressure 1 mTorr to 100 mTorr 0 3 0 4 0 5 0 6 0 7 0 8 0 9 1 0 1 2 5 10 20 50 100 Analog Output VDC Pressure in mTorr for N 2 or air ...

Page 29: ...gin Installation Analog Operation RS 485 Operation Maintenance Figure 3 3 Analog output voltage vs indicated N2 or air pressure 100 mTorr to 1000 Torr 0 1 0 2 0 3 0 4 0 5 0 6 0 7 0 100 200 500 1 2 5 10 20 50 100 200 500 1000 Analog Output VDC Pressure in mTorr and Torr for N 2 or air mTorr Torr ...

Page 30: ...6 1 921 2 429 2 734 2 966 3 075 3 134 3 269 3 384 3 466 3 526 3 573 3 613 3 632 3 645 3 674 CO 2 375 376 377 381 385 395 412 462 536 705 900 1 179 1 668 2 172 2 695 3 316 3 670 3 903 4 071 4 154 4 336 4 502 4 621 4 708 4 775 4 830 4 860 4 877 4 919 4 955 O 2 375 376 377 380 384 392 417 453 521 679 868 1 141 1 664 2 195 2 814 3 672 4 225 4 620 4 916 5 026 5 106 5 200 5 315 5 422 5 515 5 592 5 633 5...

Page 31: ...tion RS 485 Operation Maintenance Figure 3 4 True pressure versus indicated pressure for commonly used gases 10 4 to 10 1 Torr Indicated pressure in Torr Nitrogen equivalent True pressure in Torr Convectron gauge axis must be horizontal Pressure unit equivalents 1 µm Hg 1 mTorr 1 x 10 3 Torr 1000 µm Hg 1 Torr 1 mbar 100 Pa ...

Page 32: ...True pressure versus indicated pressure for commonly used gases 10 1 to 1000 Torr Indicated pressure in Torr Nitrogen equivalent True pressure in Torr Convectron gauge axis must be horizontal Pressure unit equivalents 1 µm Hg 1 mTorr 1 x 10 3 Torr 1000 µm Hg 1 Torr 1 mbar 100 Pa ...

Page 33: ...tion RS 485 Operation Maintenance Figure 3 6 True pressure versus indicated pressure for commonly used gases 10 1 to 1000 Torr Indicated pressure in Torr Nitrogen equivalent True pressure in Torr Convectron gauge axis must be horizontal Pressure unit equivalents 1 µm Hg 1 mTorr 1 x 10 3 Torr 1000 µm Hg 1 Torr 1 mbar 100 Pa ...

Page 34: ...3 7 In default mode relay 2 activates with increasing differential pressure and deactivates at a lower pressure than the activation pressure as illustrated in Figure 3 8 on page 27 Use internal jumpers to reconfigure relay 2 activation direction See page 33 Figure 3 7 Setpoint relay 1 behavior Table 3 6 Setpoint relay activation direction range and hysteresis Relay Assignment Activation direction ...

Page 35: ...plosion Test points on the module front panel Table 3 5 on page 22 and Figure 3 10 and Figure 3 11 on pages 29 30 enable you to determine the amount of voltage that corresponds to a specific pressure 1 Make sure the module is properly installed the axis is horizontal see page 8 and the power supply is ON 2 Figure 3 10 and Figure 3 11 are graphs that show test point voltage versus pressure for N2 o...

Page 36: ...e using a gas independent transfer standard such as a capacitance manometer 3 Use a high precision high input impedance Zin 1 MΩ digital voltmeter DVM to measure the voltage across the SETPOINT1 and COMMON or SETPOINT2 and COMMON test points on the module front panel Figure 3 9 illustrates SETPOINT2 and COMMON test points 4 Use a flat head instrument screwdriver to adjust the SETPOINT1 potentiomet...

Page 37: ...ual 29 Before You Begin Installation Analog Operation RS 485 Operation Maintenance Figure 3 10 Example test point voltage 0 64 V equals 40 mTorr of N2 or air 0 3 0 4 0 5 0 6 0 7 0 8 0 9 1 0 1 2 5 10 20 50 100 Test Point Voltage Pressure in mTorr for N 2 or air 0 64 V 40 mTorr ...

Page 38: ...nstruction Manual Figure 3 11 Example test point voltage 4 8 V equals 40 Torr of N2 or air 0 1 0 2 0 3 0 4 0 5 0 6 0 7 0 100 200 500 1 2 5 10 20 50 100 200 500 1000 Test Point Voltage Pressure in mTorr and Torr for N 2 or air mTorr Torr 40 Torr 4 8 V ...

Page 39: ... impedance Zin 1 MΩ DVM to adjust relay 2 1 Use the following equation or the data in Figure 3 12 to determine the analog output voltage that corresponds to the differential pressure in Torr at which relay 2 will activate and deactivate Figure 3 12 Setpoint relay 2 differential pressure sensor analog voltage Output voltage 4 000 Pdifferential 0 004 V 1000 750 500 250 0 250 0 1 0 2 0 3 0 4 0 5 0 6 ...

Page 40: ...l Figure 3 13 illustrates SETPOINT2 and COMMON test points 3 Use a flat head instrument screwdriver to adjust the SETPOINT2 potentiometer for the desired setpoint voltage at which relay 2 will activate and deactivate See Figure 3 13 A built in 8 Torr hysteresis prevents oscillation around the setpoint Figure 3 13 Test points and potentiometer for setpoint relay 2 COMMON test point SETPOINT2 test p...

Page 41: ...ld the front cover of the housing in place but do not remove the screws that hold the back cover in place 3 Set the jumpers as indicated in Figure 3 14 The jumpers are on the main PC board Exposing the back pins sets relay 2 to activate when differential pressure increases above the setpoint This is the default mode Exposing the front pins sets relay 2 to activate when differential pressure decrea...

Page 42: ...t if a gas other than N2 or air is being used Periodic resets of the atmospheric calibration point also improve the accuracy and repeatability of the Convectron gauge near atmospheric pressure even if the process gas is N2 or air Regardless of the process gas that is being used you should always use N2 or air to calibrate the Convectron gauge at atmospheric pressure 1 Shut off the pump and using N...

Page 43: ...otentiometers CONVECTRON ADJUST ATM potentiometer COMMON test point CONVECTRON ANALOG test point Table 3 7 Typical atmospheric pressures at altitude Torr voltage relationships Altitude ft above sea level Pressure of N2 or air Torr Analog output voltage VDC 0 760 5 534 1000 733 5 513 2000 707 5 493 3000 681 5 473 4000 656 5 454 5000 632 5 435 6000 609 5 417 7000 586 5 399 8000 564 5 382 9000 543 5 ...

Page 44: ...ng of 0 375 VDC Figure 3 17 Vacuum chamber pressure calibration test points and potentiometers 3 7 Modules operating below 10 3 Torr During a fast pumpdown from atmospheric pressure thermal effects temporarily prevent the module from measuring pressure accurately below 10 3 Torr After approximately 15 minutes pressure indications the 10 4 Torr range will be accurate and response will be rapid When...

Page 45: ...s stability is 0 020 V or approximately 5 Torr 1 Allow atmospheric and vacuum chamber pressures to achieve the same value This is a pressure differential of zero which should be represented by a 4 000 V output across the DIAPHRAGM ZERO and COMMON test points 2 Refer to Figure 3 18 and use a high precision high input impedance Zin 1 MΩ DVM to measure the voltage across the DIAPHRAGM ZERO and COMMON...

Page 46: ...ets relay 1 to deactivated state Returning pressure hysteresis 30 mV not programmable Activation direction Activates below vacuum chamber pressure setpoint not programmable Relay 2 Setpoint Activates at 0 0 Torr differential between Convectron gauge and atmospheric pressures State Deactivated resets relay 2 to deactivated state Returning pressure hysteresis 8 Torr not programmable Activation direc...

Page 47: ...function 3 Use Table 4 1 to record the proposed activation and deactivation setpoints in Torr and assignments for each relay WARNING Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage personal injury or death Do not use the module to measure the pressure of flammable or explosive gases Table 4 1 Relay setpoints...

Page 48: ... 42 44 7 If the module will measure the pressure of a gas other than N2 or air you must adjust relay setpoints for the process gas that will be used See pages 49 54 If you need application assistance phone a Helix Technology application engineer at 1 303 652 4400 or 1 800 776 6543 within the U S A or mail custserv helixtechnology com Figure 4 1 illustrates the RS 485 version front panel Table 4 2 ...

Page 49: ...and or sign to left of 1 digit window is for the exponent Pressure unit indicators Indicate pressure measurement unit Pa mBar or Torr Setpoint activation indicators Setpoint indicators are ON green when relays are activated Activation state for relays is determined by relay configuration Table 4 3 Tasks and page references for RS 485 module operation Task For instructions see this page Programming...

Page 50: ... settings for the most significant digit MSD and the least significant digit LSD 1 Set the MSD switch to the value that is the most significant digit in the module address 2 Set the LSD switch to the value that is the least significant digit in the module address Set a switch on a mark for the values 1 3 5 7 9 B D or F Set a switch between marks for the values 2 4 6 8 A C or E Figure 4 2 Address s...

Page 51: ...COMM ER NVRAM ER RANGE ER SYNTX ER See page 66 to troubleshoot the error response Parity The example set parity SP command sequence sets parity at seven data bits odd parity Example SP command from host 01SPO Response from module 01 PROGM OK An SPO command sets parity at seven data bits odd parity An SPE command sets parity at seven data bits even parity An SPN command sets parity at eight data bi...

Page 52: ...odule to respond to each command type Use the following equation to calculate the total response time for each type of task listed in Table 4 6 The module driver automatically shuts OFF 80 µsec after returning its response to the host Table 4 5 Baud rates and module response times Baud rate Module response time msec 1200 baud 22 msec 2400 baud 13 msec 4800 baud 7 5 msec 9600 baud 5 1 msec 19200 ba...

Page 53: ...ases Refer to Table 4 7 to find the appropriate graph Find the point at which the horizontal line representing true pressure intercepts the vertical line representing indicated N2 nitrogen equivalent pressure For example in Figure 4 3 an indicated N2 or air pressure of 10 2 Torr corresponds to a true He pressure of 1 5 x 10 2 Torr In Figure 4 4 an indicated N2 or air pressure of 20 Torr correspond...

Page 54: ... 4 3 Reading true pressure values 10 4 to 10 1 Torr Indicated pressure in Torr Nitrogen equivalent True pressure in Torr Convectron gauge axis must be horizontal Pressure unit equivalents 1 µm Hg 1 mTorr 1 x 10 3 Torr 1000 µm Hg 1 Torr 1 mbar 100 Pa 10 2 Torr 1 5 x 10 2 Torr ...

Page 55: ...log Operation RS 485 Operation Maintenance Figure 4 4 Reading true pressure values 10 1 to 1000 Torr True pressure in Torr Convectron gauge axis must be horizontal Pressure unit equivalents 1 µm Hg 1 mTorr 1 x 10 3 Torr 1000 µm Hg 1 Torr 1 mbar 100 Pa 20 Torr Indicated pressure in Torr Nitrogen equivalent 700 Torr ...

Page 56: ...igure 4 5 Reading true pressure values 10 1 to 1000 Torr True pressure in Torr Convectron gauge axis must be horizontal Pressure unit equivalents 1 µm Hg 1 mTorr 1 x 10 3 Torr 1000 µm Hg 1 Torr 1 mbar 100 Pa Indicated pressure in Torr Nitrogen equivalent 6 Torr 200 Torr ...

Page 57: ...48 are graphs that show true pressure versus indicated pressure for 12 commonly used process gases including N2 and air Refer to Table 4 8 to find the appropriate graph 3 Refer to the following example process control PC command sequence to program indicated pressures at which the relay will activate and deactivate The example PC command sequence causes relay 1 to deactivate when indicated vacuum ...

Page 58: ...e by the minimum software defined hysteresis In default mode relays 1 and 3 are assigned to the Convectron gauge and are set to activate with decreasing vacuum chamber pressure and deactivate at a higher pressure than the activation pressure as illustrated in Figure 4 6 In default mode relays 2 and 4 are assigned to the differential pressure sensor and are set to activate with increasing different...

Page 59: ...5 Operation Maintenance Figure 4 6 Relay 1 and 3 default behavior Figure 4 7 Relay 2 and 4 default behavior Deactivate Activate Deactivated Activated Software defined hysteresis Time Vacuum chamber pressure Relay activated Activate Deactivate Deactivated Activated Relay activated Time Differential pressure Software defined hysteresis ...

Page 60: ...ure is negative when atmospheric pressure is greater than vacuum chamber pressure The or that follows the pressure value is the exponent For example A pressure value of 2 00E 2 equals 2 x 10 2 Torr or 0 020 Torr A pressure value of 2 00E 2 equals 2 x 102 Torr or 200 Torr Table 4 10 explains the PC command structure Table 4 10 Command structure for relay settings Address field Command field Activat...

Page 61: ... Example RPC command from host 01RPC1D Response from module 01 2 00E 01 The RPC1 value identifies relay 1 The A or D value in the PC command designates the setpoint that is being read The A activation value is the indicated pressure at which relay 1 activates A D deactivation value is the indicated pressure at which relay 1 deactivates The same command structure applies to all four process control...

Page 62: ...mber pressure and relays 3 and 4 are assigned to the differential pressure sensor RPG command from host 01RPG Example response from module 01 CCDD The returned value indicates relay assignments in ascending numerical order In this example CC is the assignment for relays 1 and 2 and DD is the assignment for relays 3 and 4 A C value means the relay is assigned to the Convectron gauge A D value means...

Page 63: ...pressure unit An MBAR response designates mBar as the pressure unit An PASCAL response designates Pa as the pressure unit Reading pressure values The example read Convectron pressure RD command causes the module to return a value that indicates vacuum chamber pressure is 1 50 x 10 2 Torr Example RD command from host 01RD Example response from host 01 1 50E 02 An RD command causes the module to ret...

Page 64: ... which sets the atmospheric calibration point to 760 Torr Example TS command from host 01TS7 60E 02 Example response from module 01 PROGM OK If the module returns a message other than 01 PROGM OK in response to the TS command the atmospheric calibration has failed See page 64 to troubleshoot the problem 4 8 Calibrating Convectron gauge at vacuum chamber pressure Periodic resets of the vacuum chamb...

Page 65: ...sor zero Setting the differential pressure sensor zero decreases measurement error of the sensor Differential pressure sensor zero is the pressure offset error for the sensor when atmospheric and vacuum chamber pressures are equal the pressure differential is zero 1 Allow atmospheric and vacuum chamber pressures to achieve the same value This is a pressure differential of zero 2 Send a calibration...

Page 66: ...cation Parity 8 data bits no parity 1 stop bit Baud rate 19 2 kBaud Module address 01 Relays 1 and 3 Setpoint Activates at 1 x 103 Torr vacuum chamber pressure Activation direction Relay activates above vacuum chamber pressure setpoint State Deactivated resets relays 1 and 3 to deactivated state Returning pressure hysteresis Determined by vacuum chamber pressure Relays 2 and 4 Setpoint Activates a...

Page 67: ...at which relay 4 activates XXPC4A X XXE 0X 2 PC4D Set pressure at which relay 4 deactivates XXPC4D X XXE 0X 2 PC1O Set relay 1 to OFF disabled state XXPC1O PC2O Set relay 2 to OFF disabled state XXPC2O PC3O Set relay 3 to OFF disabled state XXPC3O PC4O Set relay 4 to OFF disabled state XXPC4O Calibration commands TS Calibrate Convectron gauge at atmospheric pressure XXTS TZ Calibrate Convectron ga...

Page 68: ...Read pressure at which relay 2 deactivates XXRPC2D RPC3A Read pressure at which relay 3 activates XXRPC3A RPC3D Read pressure at which relay 3 deactivates XXRPC3D RPC4A Read pressure at which relay 4 activates XXRPC4A RPC4D Read pressure at which relay 4 deactivates XXRPC4D RST Reset module to programmed values XXRST RU Read pressure measurement unit XXRU VER Read internal part number and firmware...

Page 69: ...uire extensive work by a qualified technician to restore the module to its normal operation f If the module has been dropped or the enclosure has been damaged g If the module exhibits a distinct change in performance If the module requires repair See pages 61 65 Phone 1 303 652 4400 or 1 800 776 6543 within the U S A or Email custserv helixtechnology com 5 2 Troubleshooting If any of the condition...

Page 70: ...t in serious product damage or personal injury due to electrical shock or fire Install only those replacement parts that are specified by Helix Technology Do not install substitute parts or perform any unauthorized modification to the module Do not use the module if unauthorized modifications have been made WARNING Failure to perform a safety check after the module has been repaired can result in ...

Page 71: ...e or differential pressure sensor is damaged for example by reactive gas or contaminated Temperature or mechanical vibration is extreme If Convectron gauge is out of calibration recalibrate it for the process gas that is being used see page 34 or page 56 If module is not mounted horizontally re mount it see page 8 If Convectron gauge is damaged replace it see page 67 If Convectron gauge is contami...

Page 72: ... A defective or contaminated Convectron gauge Excessive system pressure Failure to install the module according to the instructions on pages 5 14 Unacceptable vacuum chamber pressure or atmospheric pressure while a pressure calibration is being performed Table 5 3 on page 66 lists error messages that the module returns if you enter a command improperly or if the module non volatile memory NOVRAM c...

Page 73: ...gas inlet relocate module farther away from inlet see page 7 LO ATM V Atmospheric pressure is pressure represented in TS command TO command was sent while atmospheric pressure was high limit of measurement range Module is too near pump If atmospheric pressure is too low increase atmospheric pressure then recalibrate Convectron gauge see page 56 If atmospheric pressure was too low increase pressure...

Page 74: ...s related to data entry or inability to process a command Messagefrom module Possible causes Solution COMM ER Parity error in command from host Verify that parity from host matches parity configuration for module NVRAM ER Module cannot write data to non volatile memory NOVRAM 1 Send FAC command to reset module to factory defaults 2 Re send process control set or calibrate command 3 Return module t...

Page 75: ...tance values Pins Normal resistance Ω Pins 1 to 2 15 to 25 Ω Pins 2 to 3 50 to 60 Ω Pins 1 to 5 175 to 190 Ω WARNING Removing or replacing the Convectron gauge in a high voltage environment can cause an electrical discharge through a gas or plasma resulting in serious property damage or personal injury due to electrical shock or fire Vent the vacuum chamber to atmospheric pressure and shut off pow...

Page 76: ... plate that does not have a connector then remove both sides of the blue housing 5 Carefully unplug the Convectron gauge from the vertical PC board by pulling the gauge housing away from the board 6 Allow the differential pressure sensor tube to slide out of the port on the Convectron gauge housing Figure 5 2 Removing the Convectron gauge 4 Remove four Phillips head screws from both module end pla...

Page 77: ... connections on the vertical PC board Carefully insert the Convectron gauge pins into the mating connections on the vertical PC board 5 Position the end plates and put both blue parts of the housing into place making sure the gauge grounding springs and cradles are in line with the gauge envelope 6 Re install the Phillips head screws into the end plates 7 Use the fitting to re attach the module to...

Page 78: ...atic dissipative envelopes to store or ship static sensitive devices or printed circuit boards Helix Technology will supply return packaging materials at no charge upon request Shipping damage on returned products as a result of inadequate packaging is the customer s responsibility Photocopy the service form fill it out and return it with the module A module that is returned without a service form...

Page 79: ...essure or hazardous materials Yes No If Yes please list the types of gas chemicals common names specific chemical biological materials or other potentially contaminating or harmful materials exposed to the product during its use ______________________________________________________________________________________________ ____________________________________________________________________________...

Page 80: ...72 Convectron ATM Vacuum Gauge Module Instruction Manual ...

Page 81: ...asures the pressure of air correctly within the accuracy specification for the instrument If the module will measure the pressure of a gas other than N2 or air you must adjust relays for the process gas Differential pressure measurement Measurement range 750 Torr below atmospheric pressure to 250 Torr above atmospheric pressure Accuracy 2 5 Torr 2 5 of reading Setpoint range 750 Torr below atmosph...

Page 82: ...le throw SPDT Form A RS 485 version relays are single pole single throw SPST Form C Contact rating 1 A 30 VDC resistive 30 VAC non inductive Power requirements 11 5 to 26 5 VDC RS 485 version 3 3 W maximum Analog version 1 6 W maximum at 12 VDC Mounting position Horizontal axis see page 8 Convectron sensing wire filament Gold plated tungsten Convectron gauge internal volume 40 cm3 2 5 in 3 ...

Page 83: ...x glass ceramic silicon epoxy RTV nickel Weight 340 g 12 oz with 1 8 NPT fitting Dimensions Dimensions are in cm in 11 4 3 4 1 1 6 6 4 2 5 5 5 2 2 Dim H Vacuum connections Dim H cm in 1 8 NPT pipe thread inch inside diameter 2 2 0 9 inch 4 VCR type fitting female 3 0 1 2 inch 8 VCR type fitting female 3 9 1 5 NW16KF flange 3 1 1 2 NW25KF flange 3 1 1 2 NW40KF flange 3 7 1 5 1 33 inch NW16CF ConFla...

Page 84: ...ure Hysteresis 30 mV Range 1 x 10 3 to 1000 Torr Relay 2 Relay 2 is assigned to the differential pressure sensor which indicates pressure differential between atmospheric and vacuum chamber pressures In default mode relay 2 activates with increasing and deactivates with decreasing differential between atmospheric and vacuum chamber pressures Hysteresis 8 Torr Range 750 to 125 Torr Analog I O male ...

Page 85: ...uge or the differential pressure sensor Relays 1 and 3 In default mode relays 1 and 3 are assigned to the Convectron gauge which indicates vacuum chamber pressure Range 10 3 to 1000 Torr Relays 2 and 4 In default mode relays 2 and 4 are assigned to the differential pressure sensor which indicates pressure differential between atmospheric and vacuum chamber pressures Range 750 to 125 Torr RS 485 ma...

Page 86: ... value two significant digits 1 digit exponent and or sign for the exponent in XX Y format Pressure range 1 0 x 10 4 Torr to 999 Torr If differential pressure is indicated or sign to left of 2 digit window indicates positive or negative pressure differential and or sign to left of 1 digit window is for the exponent If absolute pressure is indicated or sign to left of 2 digit window does not illumi...

Page 87: ... chamber pressures cause the diaphragm to move The differential pressure sensor connects to the vacuum chamber through a port on the Convectron gauge A second port extending from the sensor is open to atmosphere and provides the pressure comparison that enables differential pressure measurement The differential pressure sensor provides a direct accurate electromechanical measurement of differentia...

Page 88: ...he ambient gas pressure increases The more molecules contact the sensing wire the more power is required to keep the sensing wire at a constant temperature So as pressure increases the voltage across the Wheatstone bridge also increases The large interior volume of the Convectron gauge enables convection currents to develop enabling greater measurement resolution at higher pressures The Convectron...

Page 89: ...fore increase The increased resistance through R1 causes the bridge to become unbalanced and a voltage to develop across the null terminals The bridge controller senses the null voltage and decreases the voltage across the bridge until the null voltage again equals zero When the bridge voltage decreases the power dissipation in the sensing wire decreases causing R1 resistance to decrease to its pr...

Page 90: ...82 Convectron ATM Vacuum Gauge Module Instruction Manual ...

Page 91: ...heory of operation 79 81 B Baud rate 44 and RS 485 module response times 44 RS 485 response time per command type 44 Before you begin 1 3 C Calibration analog Convectron gauge at atmospheric pressure 34 35 analog Convectron gauge at vacuum chamber pressure 36 analog differential pressure sensor zero 37 Convectron gauge 13 differential pressure sensor zero 37 differential pressure zero 57 RS 485 Co...

Page 92: ...peration 79 Digital format 77 Digital protocol 77 E Error messages troubleshooting 65 66 Error responses from RS 485 module 43 F Factory defaults for RS 485 module 57 Factory settings for analog module 38 Firmware version for RS 485 module 57 Fittings 1 8 NPT pipe thread 9 ConFlat flange fitting 9 KF flange 9 VCR type 9 Front panel features of analog 16 features of RS 485 41 G Ground connection to...

Page 93: ...9 60 RS 485 optional display 55 RS 485 output 45 O Operation analog front panel 15 analog module 15 38 analog output 18 analog setpoint relay 1 behavior 26 analog setpoint relay 2 behavior 27 below 10 3 Torr 36 57 error responses from RS 485 module 43 preparing analog module 15 preparing RS 485 module 39 programming RS 485 setpoint relay assignments 53 reading RS 485 relay setpoint status 54 readi...

Page 94: ...R Radio frequency interference RFI 14 Reading setpoints analog 34 RS 485 53 Relief devices 7 Returning a damaged module 70 RS 485 commands 43 44 address 42 baud rate 44 factory defaults 58 firmware version 57 pressure units reading 55 pressure units sending 55 process control calibration and set 59 read 60 response time 44 structure 43 summary 59 60 RS 485 module components 6 digital format 77 dim...

Page 95: ...ecifications for RS 485 77 test point voltage versus pressure 29 30 type 74 Specifications 73 78 analog and RS 485 modules 73 75 analog module 76 analog output 76 analog setpoint relays 76 CE compliance 73 Convectron gauge internal volume 74 Convectron gauge sensing wire 74 differential pressure measurement 73 I O connector 74 module dimensions 75 mounting position 74 physical characteristics 75 p...

Page 96: ...ange 9 connections 75 ground connection to 12 KF flange fitting 9 pressure measurement 73 VCR type fitting 9 Voltage analog differential pressure 31 example test point 29 30 W Wheatstone bridge 80 Wiring connecting cable 10 ground connection to vacuum chamber 12 grounding 12 I O connector for analog module 11 76 I O connector for RS 485 module 11 77 I O connector specifications 74 installation 10 ...

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Page 98: ...ansfield MA U S A 02049 9171 Phone 508 337 5000 To obtain a copy of this instruction manual online visit our website at www helixtechnology com Adobe Reader version 5 0 or higher required 2004 Helix Technology Corporation Convectron ATM Vacuum Gauge Module Instruction Manual Instruction manual part number 385004 Revision 01 September 2004 ...

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