PIPS II O
Owners Man
Ac
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vo
ac
on
th
cu
be
is
by
ne
th
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it
be
sa
Th
If
vo
lik
vo
11
kV
co
se
Fi
G
Le
nual and Use
ccelerating V
ischarge Vo
oltage sustai
ccelerating v
nly used whe
e sum of the
urrent is prop
eam and curr
the current t
y the Faraday
eutral ions o
e mass flow
ccelerating c
includes neu
ecause it inc
ample. Farad
he gun main
the discharg
oltage in vol
kely shorted
oltage is app
100 uA and
V beam vol
onditions app
ctors.
gure 3-31 Gu
un tilt:
Thi
eft/Right Gu
ers Guide
Voltage is t
oltage is the
ins the plas
voltage. Focu
en the accele
e currents on
portional to
rent lost to t
through the
y cups, but
r current tha
controllers.
current is a b
utrals. The d
ludes the pa
day cup curre
ntenance scre
ge current in
ts, and the a
d. For examp
proximately
the accelera
ltage, then
ply during b
un Readings
is option is o
un Angles se
the voltage
e voltage be
sma. The d
us voltage i
erating volta
n the left and
the total bea
the focus ele
plasma. Fara
is not used i
at misses the
better approx
downside to
art of the bea
ent is not use
een can be u
n microamps
accelerating
ple, when th
1100 V. If
ating current
the gun is
beam modula
.
only function
et the tilt an
on the anod
etween the
discharge vo
is used to fo
age is lower
d right gun fo
am current. I
ectrodes and
aday Cup cu
in PIPS II. T
e Faraday cu
ximation of
o this measu
am that strik
ed in PIPS II
used to help d
s is approxim
current is un
he beam vo
f the dischar
t is significa
likely sho
ation when t
nal for system
ngle the left
de. This is t
anode and t
oltage floats
ocus low en
than 2.5 kV
focus electrod
It includes n
d housings. D
urrent is the
This current
up. Gas flow
the total Arg
urement is th
kes the hous
I and should
determine if
mately equal
nusually low
ltage is 6 k
rge current
antly lower t
orted. Note
the guns are
ms that have
t/right guns
the beam en
the cathode
s on top o
ergy ions, a
. Focus curr
des. Acceler
neutral ions i
Discharge cu
current mea
does not in
w is measure
gon dose bec
hat it over-c
ing or misse
d read close t
f a gun is sho
l to the disch
w; then the g
kV, the disch
is approxim
than normal
that these
e between m
e motorized
should be s
56
nergy.
, this
of the
and is
rent is
rating
in the
urrent
sured
clude
ed by
cause
ounts
es the
to 0.
orted.
harge
gun is
harge
mately
for 6
same
milling
guns.
set to,