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PIPS II Owners Manual and Users Guide
Align ion source so that the moulded assembly is aligned to the screw hole in
the housing.
8.
Insert the screw into the molded connector assembly and tighten.
This assembly should be aligned squarely with the Chamber.
9.
Test the gun before inserting into the Work Chamber.
Use an ohmmeter and test the gun to ensure that a short does not exist across
the HV contacts. A direct short usually indicates the gun was not assembled
properly. A higher resistance short up to 2M
indicates the presence of small
conductive whiskers within the gun. If this is the case, the cleaning steps
described above should be repeated.
10.
Place a light film of vacuum grease around the Work Chamber gun
port.
11.
Insert the complete assembly into the Work Chamber.
Align the reference mark on the diameter of the gun housing to the mating
mark on the Chamber.
12.
Replace the gun knob in the gun housing.
Guide the gun knob over the toggle stick until it is firmly in place and screw
in the two retaining screws.
Repeat this procedure on the second gun.
5.6.3.
Servicing the Focus Electrode
The focus electrode should not normally require maintenance. Sputtered
material may build up on the electrode or insulator and need to be removed.
1.
Shut down the power to the PIPS II.
Wait at least 10 min to allow the MDP to come to a complete stop. Then vent
the Work Chamber by opening the Vent valve.
2.
Remove the gun knob from the gun housing.
Rotate the gun knob to the 10° Top position. Use the 3.0mm hex wrench to
remove the two screws from the gun knob and pull the knob from the gun
housing.
3.
Remove the gun housing from the work chamber.
4.
Remove the upper front housing electrode from the gun housing.