PIPS II O
Owners Man
Va
Th
Fi
Ai
th
sta
Co
is
Pr
Mo
ro
di
Di
di
on
W
is
de
low
Ga
pr
an
G
G
(F
se
th
nual and Use
acuum
:
his screen is
gure 3-30. V
rlock:
Raise
e airlock. V
age. Lower i
old Cathode
automatica
ressure displ
olecular Dra
tational spe
splays the po
aphragm Pu
sabled when
n. Backing
When this pre
less than 1
etermine wh
wered.
as Line Pres
ressure is out
nd the system
uns:
un reading
Figure 3-31).
t. Touching
e left or righ
ers Guide
used to cont
Vacuum page
e is used to
Vacuum is u
is used to pu
Gauge:
On
ally turned o
ays the pres
ag Pump:
ed of the pu
ower drawn
ump:
On/O
n the MDP i
Pressure dis
essure is high
10 Torr the
hen the airlo
ssure:
Meas
tside of the a
m will not mi
gs:
This pa
. The Adjust
the up or do
ht gun.
trol and mon
.
raise the sta
used to pum
ump out the a
n/Off control
off when th
sure measur
On/Off co
ump, where
by the MDP
Off controls
is on, so the
splays the p
her than 10
DP is set
ock is pump
sures the pre
acceptable r
ill.
age displays
t Flow butto
own arrow w
nitor the vac
age into the
mp out the a
airlock and l
ls the power
he MDP sp
red by the ga
ontrols the
e the nomina
P. Status sho
s power to
DP cannot
pressure me
Torr, the DP
to half spe
ped out suff
essure of the
range, an err
the high vo
ons are visibl
will increase
cuum pumps
airlock. Ven
airlock with
lower the sta
to the CC g
peed is less
auge.
pump. Spe
al speed is
ows any erro
the pump.
be turned o
easured in t
P is set to fu
eed. This re
fficiently for
e Argon gas
ror message
oltage power
le when Ma
e or decrease
and gauges
nt is used to
out lowerin
age.
gauge. The p
s than 1275
eed displays
1500 Hz. P
ors (0= none)
This contr
ff if the MD
the backing
ull speed, wh
ading is use
r the stage t
s inlet line. I
will be disp
r supply rea
anual Gas Fl
e the gas flow
55
.
o vent
g the
power
5 Hz.
s the
Power
).
rol is
DP is
line.
hen it
ed to
to be
If the
layed
dings
ow is
w for