Freiberg
Instruments
GmbH
ּ Am St. Niclas Schacht 13 ּ 09599 Freiberg – Germany
45 / 78
Figure 24:
checking system pressures
4.1.2.
Lift up the measurement chamber
First remove all 5 hand screws of the chamber and check the chamber pressure. The
pressure has to be almost zero. If there is lower pressure you can fill the chamber with
nitrogen by software. It is recommended to switch of the system before lifting the
measurement chamber.
Figure 25:
measurement chamber screws
The measurement chamber can be lifted by the arm in the rear area inside the device, now.
Figure 26:
lift the measurement chamber
Remove all 5 screws
Arm to lift the measurement
chamber
Control of chamber pressure
Control of inert gas pressure
Setting of air pressure for the
pneumatic system
Setting of inert gas pressure
