Figure 12 Dimensions - T-Station 85
All measurements indicated are shown in mm (inches)
Pump performance data
Table 16 Pump performance data - nEXT85H
Turbomolecular pump type
nEXT85H ISO63
nEXT85H CF63
nEXT85H NW40
Inlet pumping speed:
Nitrogen
84 ls
-1
84 ls
-1
47 ls
-1
Helium
78 ls
-1
78 ls
-1
61 ls
-1
Hydrogen
54 ls
-1
54 ls
-1
49 ls
-1
Argon
80 ls
-1
80 ls
-1
44 ls
-1
Inlet compression ratio:
Nitrogen
> 1 E+11
> 1 E+11
> 1 E+11
Helium
2 E+07
2 E+07
2 E+07
Hydrogen
5 E+05
5 E+05
5 E+05
Argon
> 1 E+11
> 1 E+11
> 1 E+11
Ultimate pressure:
with rotary vane backing pump
*
< 5 E-09 mbar
< 5 E-10 mbar
< 5 E-09 mbar
with diaphragm backing pump
§
< 5 E-08 mbar
< 5 E-09 mbar
< 5 E-08 mbar
*
Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing pump.
§
Ultimate pressure 48 hours after bakeout with backing pressure < 5 mbar (500 Pa).
D395-94-880A - Technical Reference
Page 37
