B800-00-880 Issue D
Page 2
© Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
1.2
General description
CAUTION
Do not attempt to separate the controller from the pump since this will cause damage to the electrical
connections.
A nEXT pump consists of a turbomolecular pump with a permanently attached controller containing drive electronics.
The controller controls the electrical supply to the pump with the exception of standby speed control. It has no
manual controls and can only be operated through the logic interface. To operate the nEXT pump, connect it to the
customer control equipment and power supply or, alternatively, use the Edwards TIC Turbo Instrument Controller or
TIC Turbo Controller.
The controller drives the brush-less d.c. motor in the pump.
There are three main variants of the nEXT pump,
The ‘S’ or ‘Simplex’ variant contains only turbomolecular blades.
The ‘D’ or ‘Duplex’ variant contains turbomolecular blades and a drag mechanism allowing operation at
higher backing pressures than pure turbomolecular pumps.
The ‘T’ or ‘Triplex’ variant contains turbomolecular blades, a drag mechanism and a regenerative
mechanism. The regenerative stage offers the option to utilise ‘boost’ mode.
Also available is an ‘iD’ or ‘iT’ interstage variant, which provides an interstage port between the turbomolecular
blades and drag mechanism. For SEM and TEM applications, an ‘L’ variant is available, which offers considerably lower
vibration and stray magnetic field emissions.
nEXT pumps are supplied with an inlet screen fitted into the centering O-ring for ISO version pumps and into envelope
for CF version pumps. nEXT pumps with an NW25 interstage port are supplied with an inlet strainer that fits into the
interstage port. The inlet screen and inlet strainer protect the pump against damage that would be caused by debris
entering the pump.
The nEXT pumps have a vent port for venting the pump and vacuum system to atmospheric pressure. The pump is
supplied with a manual vent valve fitted; this can be replaced with a TAV5 or TAV6 solenoid-operated vent valve
(available as accessories – refer to
Section 7
). The TAV valve can be directly controlled by the on-board controller.
The nEXT pumps have a purge port: an inert purge gas can be introduced to protect the bearing and motor from
corrosion. An optional vent port adapter and purge restrictor can be fitted to the purge port to control the flow rate
of the purge gas and to filter the gas supply. (Refer to
Section 7
).
Air coolers and a water-cooling block are available as optional accessories to cool the nEXT pumps. (Refer to
Section 7
).
WARNING
Improper use of the equipment could cause damage to it or injury to people. The user is
responsible for the safe operation, installation and monitoring of the system.
WARNING
The drive contains electrolytic capacitors and, under certain fault conditions, may emit dangerous
fumes. Ensure that the drive is operated in a well-ventilated area.
