EBARA EV-S20, Instruction Manual, Page: 30 / 113

P.11
Table 3.2 Specifications (Model EV-S50 / EV-S50P / EV-S50N)
Model
Model
EV-S50
Model
EV-S50P
Model
EV-S50N
Pumping Speed 5000 L/min
Ultimate Pressure 0.5 Pa
Connection
Gas Inlet NW50
Gas Outlet NW25
Approx. Power at Ultimate Pressure
(Max. Power)
0.55 kW
(3.6 kW)
Utili-
ty
Cooling
Water
Connection Rc 1/4" (Coupler)
Pressure
[Gauge Press.]
Differential Press.: Min. 0.2 MPa
Supply: Max. 0.4 MPa
Flow Rate 2.0 - 3.0 L/min
Temperature Max. 30°C
N2
Gas
Connection ---------- 1/4” Tube Fitting (Same as SWAGELOK)
Pressure
[Gauge Press.]
----------
Supply: 0.15 - 0.7 MPa
[Setting: 0.09 - 0.012 MPa]
Approx. Flow Rate
[N2-0 Mode]
----------
17 - 20 Pa m
3
/s
[2.4 Pa m
3
/s]
Duct
Venti-
Lation
Connection ----------
Φ50 mm
Pressure ---------- -196 Pa
Approx. Flow Rate ---------- 0.5 m
3
/min
Lubrication
Oil
Brand BARRIERTA J100ES (NOK)
Quantity 0.1 L
Approx. Weight 100 kg
Power
Supply
Phase/Volt/Freq. 3 Phase, 200-220V , 50 / 60Hz
Power Capacity 4.8 kVA
Connection
Japan Aviation Electronics Industry
JL04HV-2E22-22PE-B-R
Control Signal D-sub 15 Pin + D-sub 25 Pin
Communication RS-232C D-sub 9 Pin X 2
CP Rating 20 A
SCCR 1.0 kA
Airborne noise test data 57 dB
Max inlet pressure / Flow Rate (N
2
)
(for reference)
1.0kPa / 50L/min 0.7kPa / 35L/min
[Note] The ambient temperature of the pump installation place shall be 30 degrees of
centigrade of lower.
PM10U
EBARA
CORPORATION