EBARA EV-S20, Instruction Manual, Page: 108 / 113

P.89
9. For SEMI S2 standard
Additional electrical parts required for SEMI application are shown in Table 9.1. The
process tool panel may provide these items or they may appear in an auxiliary control
panel mounted on the pump or remotely.
Table 9.1 Necessary parts for SEMI S2 standard
Parts name Conditions
CB
(Circuit Breaker)
Please use CB of 10 kA or more in the breaking
current capacity. (UL489 corresponding)
EMO
(Emergency Off)
Please select it based on the law and the standard of
installation features.
Please intercept the power supply of the pump when
EMO operates. Optional EMS Switch Button can be
used as EMO Button with External CB and Magnetic
Switch.
Safty Interlock
Hard interlock signal is output as the final safty
protection by EXT.IL connector.
Please intercept the power supply of the pump when
Hard interlock signal is open.
Pump Fixation Please fix the pump to the floor or other firm ground
with the brackets at the installation.
ＥXT.IL
Dry Contact
100mA Max.
4VDC-27VDC
(N.C)
Customer's connection
Pump side Circuit
PM10U
EBARA
CORPORATION