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EBARA EV-S20 Instruction Manual Download Page 1

Doc.No.EVS_CSN_2_E_Rev.

3

 

INSTRUCTION MANUAL 

MULTI-STAGE DRY VACUUM PUMP 

MODEL

 

EV-S20 

MODEL

 

EV-S50 

MODEL

 

EV-S100 

MODEL

 

EV-S200

CE / SEMI / NRTL MODEL 
200-220V(50/60Hz)

Caution: 

Please read and understand this INSTRUCTION MANUAL 
thoroughly

 

before using this equipment. 

Be sure to keep this INSTRUCION MANUAL on hand for future 
reference. 

To Facility and Tool Manufactures: 
Be sure to distribute this INSTRUCTION MANUAL to all end-user 
personnel actually operation this equipment. 

「

Model ООО

」

  in this INSTRUCTION MANUAL is our model code. 

ISSUED BY PRECISION MACHINERY COMPANY

PM40U

EBARA 

CORPORATION 

Summary of Contents for EV-S20

Page 1: ...rstand this INSTRUCTION MANUAL thoroughly before using this equipment Be sure to keep this INSTRUCION MANUAL on hand for future reference To Facility and Tool Manufactures Be sure to distribute this I...

Page 2: ...Minister of Economy Trade and Industry Please confirm these conditions on your own For more information please contact our sales office located near you Do not reproduce or reprint any portion of this...

Page 3: ...chnology and nature prevent environmental pollution and improve the overall results of our environmental management activities We are aware that environmental protection and management activities are...

Page 4: ...n pump operation safety and maintenance please do not hesitate to contact EBARA directly Refer to Global network for contact address Three terms designating the level of hazard are used in this manual...

Page 5: ...NG Interrupt Circuit Protector CP before starting on wiring and maintenance work Do not switch on the power supply to the pump until work is completed WARNING Supply N2 gas to the exhaust piping when...

Page 6: ...move the pump cover during operation WARNING Check Safety Interlock functions periodically every 6 months to confirm the interlocks will work correctly CAUTION Disposal of process by products shall be...

Page 7: ...acket you use M6 16 bolts for fixing this bracket to the lower side of the pump When you use this bracket as lifting bracket you cannot use the M6 16 bolts because the M6 16 bolts reach to an internal...

Page 8: ...e injury Allow the piping and casing to cool before servicing 2 Hazardous voltage warning Hazardous Voltage may shock burn or cause death Turn power off and lockout before servicing WARNING Hazardous...

Page 9: ...feet fully when moving WARNING Hazardous Materials Exposure to air may cause spontaneous fire or explosion Inhalation or skin absorption will cause severe injury or death by poisoning Purge thoroughl...

Page 10: ...viii LOCATION WARNING LABEL1 PM10U EBARA CORPORATION...

Page 11: ...ix LOCATION WARNING LABEL2 PM10U EBARA CORPORATION...

Page 12: ...its factory set point opening the motor starter relay s and shutting down the pump Restoration of sufficient nitrogen flow permits restarting the pump MOTOR OVERLOAD Motor thermostat protect the pump...

Page 13: ...401 E E CP R S T B1 UL1077 A B C E MP MOTOR DRIVER LCD controller RESET U V W M E DVP414 CN_1 3 1 MP MOTOR THRMO 12V X1 CPU CPU R S T CN_8 2 1 CN_8 1 2 DVP402 User side Pump side CN_A CPU NOIZE FILTER...

Page 14: ...M E DVP414 CN_1 3 1 MP MOTOR THRMO 12V BP MOTOR THRMO X1 CPU CPU R S T CN_8 2 1 CN_8 CN_9 1 2 1 2 DVP402 User side Pump side CN_A E BP MOTOR DRIVER CPU CPU NOIZE FILTER MP TH BP TH 1 3 1 3 RS485 comm...

Page 15: ...nd the original period For repairs not covered under this Warranty EBARA will charge the customer for parts and labor Exclusions and Limitations This Warranty does not cover the following 1 Failure du...

Page 16: ...xiv PM10U EBARA CORPORATION...

Page 17: ...1 Warning 4 3 2 2 Operation Status Control 5 3 3 The way of pump moving 5 3 3 1 Preparation 5 3 3 2 Moving method 6 3 4 Release and shut off residual internal energy 7 3 4 1 Electrical Power Lockout...

Page 18: ...1 3 How to stack pumps 34 4 1 4 Pump Fixation Option 36 4 2 Piping 41 4 2 1 Vacuum and Exhaust Piping 41 4 2 2 Cooling Water Piping 42 4 2 3 N2 Gas Piping 43 4 2 4 Ventilation Duct MODEL EV S N MODEL...

Page 19: ...ion when momentarily power failure happens 78 7 Maintenance and Inspection 79 7 1 Internal energies 79 7 1 1 Power source 79 7 1 2 Cooling water 79 7 1 3 Nitrogen gas 79 7 2 Routine Inspection 80 7 3...

Page 20: ...ntroduction 2 1 Introduction Check the following items on receipt of the pump package 1 Check that the nameplate affixed to the outer cover of the pump to confirm that the pump supplied agrees with yo...

Page 21: ...ubles or environmental pollution Plan the maintenance and perform it periodically to operate the unit efficiently 3 To dispose the unit follow effective laws and ordinances applicable in the area wher...

Page 22: ...provided according to the instructions in Table 3 1 and the descriptions in Section 4 2 3 In the cases the gas concentration may become higher than the specified for safe gas exhaust introduce the ni...

Page 23: ...operation all operating conditions are monitored including power supply cooling water flow N2 gas flow casing and motor coil temperature motor speed and electric power for motor Continuous operation i...

Page 24: ...M setting conditions 3 2 2 Operation Status Control The sensor data are displayed on the LCD provided on the controller to facilitate operation status control and daily inspection All WARNING and ALAR...

Page 25: ...e pump by pushing its terminal portion alternately as directed below A B If pump needs to be moved on steps or ditches spread steel plate or the like which can sustain the pump weight over the steps d...

Page 26: ...SEMI S2 install lockable shutoff devices on electrical nitrogen and cooling water supplies These devices should be adjacent to and within sight of the pump 3 4 1 Electrical Power Lockout and Tagout Lo...

Page 27: ...d follow facility procedures for locking this valve in the off position 2 Verify that the nitrogen pressure gauge on front panel of the pump drops to 0 MPa confirming that no pressurized gas energy is...

Page 28: ...dimension and performance details 3 5 1 Model Description EV S 20 P Mark Description 20 1670 L min 50 5000 L min 100 10000 L min 200 20000 L min Standard Without N2 purge unit P Standard With N2 purge...

Page 29: ...e Press Supply 0 15 0 7 MPa Setting 0 09 0 012 MPa Approx Flow Rate N2 0 Mode 17 20 Pa m3 s 2 4 Pa m3 s Duct Venti Lation Connection 50 mm Pressure 196 Pa Approx Flow Rate 0 5 m3 min Lubrication Oil B...

Page 30: ...tting 0 09 0 012 MPa Approx Flow Rate N2 0 Mode 17 20 Pa m3 s 2 4 Pa m3 s Duct Venti Lation Connection 50 mm Pressure 196 Pa Approx Flow Rate 0 5 m3 min Lubrication Oil Brand BARRIERTA J100ES NOK Quan...

Page 31: ...Setting 0 09 0 012 MPa Approx Flow Rate N2 0 Mode 17 20 Pa m3 s 2 4 Pa m3 s Duct Venti Lation Connection 50 mm Pressure 196 Pa Approx Flow Rate 0 5 m3 min Lubrication Oil Brand BARRIERTA J100ES NOK Q...

Page 32: ...Setting 0 09 0 012 MPa Approx Flow Rate N2 0 Mode 17 20 Pa m3 s 2 4 Pa m3 s Duct Venti Lation Connection 50 mm Pressure 196 Pa Approx Flow Rate 0 5 m3 min Lubrication Oil Brand BARRIERTA J100ES NOK Q...

Page 33: ...P 14 3 5 3 Outline Drawing MODEL EV S20 OUTLINE DRAWING PM10U EBARA CORPORATION...

Page 34: ...P 15 MODEL EV S20P EV S 20N OUTLINE DRAWING PM10U EBARA CORPORATION...

Page 35: ...P 16 MODEL EV S50 OUTLINE DRAWING PM10U EBARA CORPORATION...

Page 36: ...P 17 MODEL EV S50P EV S50N OUTLINE DRAWING PM10U EBARA CORPORATION...

Page 37: ...P 18 MODEL EV S100 OUTLINE DRAWING PM10U EBARA CORPORATION...

Page 38: ...P 19 MODEL EV S100P EV S 100N OUTLINE DRAWING PM10U EBARA CORPORATION...

Page 39: ...P 20 MODEL EV S200 OUTLINE DRAWING PM10U EBARA CORPORATION...

Page 40: ...P 21 MODEL EV S200P EV S 200N OUTLINE DRAWING PM10U EBARA CORPORATION...

Page 41: ...P 22 MODEL EV S20 OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Page 42: ...P 23 MODEL EV S20P EV S 20N OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Page 43: ...P 24 MODEL EV S50 OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Page 44: ...P 25 MODEL EV S50P EV S50N OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Page 45: ...P 26 MODEL EV S100 OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Page 46: ...P 27 MODEL EV S100P EV S 100N OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Page 47: ...P 28 MODEL EV S200 OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Page 48: ...P 29 MODEL EV S200P EV S 200N OUTLINE DRAWING OPTION PM10U EBARA CORPORATION...

Page 49: ...Pa Pumping Speed L min EV S20 EV S20P EV S20N EV S20 EV S20P EV S20N Fig 3 1 MODEL EV S20 P N Performance Curve 0 1 1 10 100 1000 10000 0 1 1 10 100 1000 10000 100000 Inlet Pressure Pa Pumping Speed L...

Page 50: ...Pumping Speed L min EV S100 EV S100P EV S100N Fig 3 3 MODEL EV S100 P N Performance Curve 0 1 1 10 100 1000 10000 100000 0 1 1 10 100 1000 10000 100000 Inlet Pressure Pa Pumping Speed L min EV S200 E...

Page 51: ...re Gauge P Regulator N2 Gas Motor Driver 1 Motor 1 Main Pump Motor Driver 2 Control Connector Circuit Protector LCD Controller Cooling Water Flow Seneor Water FT2 FT1 Booster Pump Motor 2 Silencer The...

Page 52: ...pump installation and disassembly for maintenance CAUTION Install pump in a location at an ambient not exceeding 30 C Particular caution is required when the pump is operated in an enclosed room CAUTI...

Page 53: ...base shall not exceed 1mm The adjustment allowance is approximately 5 mm NOTE If the pump is not leveled shortage of the lubrication oil supply to the bearing may be caused NOTE To prevent vibrations...

Page 54: ...6 12 bolts for fixing this bracket to the upper side of the pump In this case you cannot use the M6 16 bolts because the M6 16 bolts reach to an internal part and have a possibility to break it Using...

Page 55: ...he accompanying drawing Anchor bolts should be fit for conditions of the floor where the pump is anchored WARNING In MODEL EV S20 type pump the bolt which is fixing the fixing bracket to a pump is M6...

Page 56: ...P 37 EV S20 LOCATION FIXTURE PM10U EBARA CORPORATION...

Page 57: ...P 38 EV S50 LOCATION FIXTURE PM10U EBARA CORPORATION...

Page 58: ...P 39 EV S100 LOCATION FIXTURE PM10U EBARA CORPORATION...

Page 59: ...P 40 EV S200 LOCATION FIXTURE PM10U EBARA CORPORATION...

Page 60: ...lignment and leaks from the flange connections Be sure therefore to support the piping properly and not to apply undue force when aligning the flange faces It is recommended to insert flexible bellows...

Page 61: ...ided with couplers Push in the plug till the end of socket Socket sleeve returns to front Be sure that the supply return plugs are not connected in reverse The diameters are slightly different In Out...

Page 62: ...in accident Be sure therefore to connect correctly to avoid problems CAUTION When the cooling water supply is left on while the pump is stationary dew condensation will form on the water cooled parts...

Page 63: ...detector should be installed in duct piping to take exhaust flow interlock A substance which does not corrode with used gas shall be used as the material of the exhaust duct In case of detecting gas l...

Page 64: ...er supply from the pump s power pack to any other equipment as this will result in malfunctioning of the control units and in pump failure CAUTION CB is not installed in the pump unit Please install C...

Page 65: ...g 4 3 1 Power Supply and Control Signal connects position MODEL EV S50 Fig 4 3 2 Power Supply and Control Signal connects position EXT IL LAN CN Z CN Y CN C Power supply for accessories Power supply r...

Page 66: ...ambient air temperature of the pump CAUTION Wiring should be hard wired or using twist lock Hubbel type connector at power source side Wire the connector for the main power supply 3 phase 200V 220V an...

Page 67: ...Please make sure to tighten the screw enough to fix the Plug contact Table 4 4 Pin Assignment of Power Supply Receptacle NO Phase A R B S C T D GND Fig 4 5 Power Supply Receptacle As seen from connect...

Page 68: ...remote monitoring Tables 4 6 4 7 4 8 and 4 9 and Figs 4 6 and 4 7 show the pin assignment Table 4 6 Receptacle Specification Connector No Connector type CN Z 15 pin D sub miniature Female receptacle I...

Page 69: ...2 BP START IN Run CLOSE Alternate 3 MP START STATUS OUT Run CLOSE Alternate 4 BP START STATUS OUT Run CLOSE Alternate 5 WARNING STATUS OUT WARNING OPEN Alternate 6 ALARM STATUS OUT ALARM OPEN Alterna...

Page 70: ...WARNING STATUS 2 OUT Abnormality CLOSE Alternate 3 8 RESERVED OUT 9 SAVING ENERGY STATUS OUT SAVING ENERGY MODE CLOSE Alternate 10 RESERVED OUT 11 RESERVED OUT 12 RESERVED OUT 13 14 RESET 15 SAVING E...

Page 71: ...ignal Output Signal 12VDC 1k Open Collector Pump side Circuit Customer s connection Dry Contact 10mA Min 100mA Max Pump side Circuit Customer s connection Open Collector 4VDC 27VDC Dry Contact 100mA M...

Page 72: ...insert a diode 100V 1A class in order to absorb the back electromotive force due to surge currents 4 3 3 Emergency Stop Switch Box EMS Switch Box Optional This pump has optional EMS Switch Box Details...

Page 73: ...he pump to lift the status of the ALARM 4 Example of System Flow diagram for EMO Emergency OFF This EMS switch can also work as Emergency Off EMO Hardware interlock to shut off the pump power supply w...

Page 74: ...2 5RC Plug Pin Suitable wire size HIROSE DF1B2022PCB UL1007 AWG 20 22 4 5 Power Supply for the Options Connector CN C This Power Supply is used for the options listed below and should not be used for...

Page 75: ...g WARNING and ALARM BZ OFF For buzzer mute in WARNING ALARM PRG For changing screen of pump status and Dip Switch selection ENTER For using at DIP switch selection LED BP RUN BP running It doesn t ope...

Page 76: ...Pump unit No V 6 Total operation time O P E T I M E h 7 Back Pressure Optional B A C K P R E S S U R E k P a 8 Pump N2 gas flow P U M P N 2 F L O W P a m 3 s 9 Cooling water flow W A T E R F L O W L...

Page 77: ...y will return to the motor current indication when no operation takes place after the lapse of 1 minute 7 Use the Display Select Switch to change the display The WARNINGs ALARMs that have currently be...

Page 78: ...2 51 00 020901 12 25 26 Occurrence date History No The lower number is newer Analog value Alarm 2nd code Alarm 1st code How to read the alarm history ENTER ENTER ENTER ENTER 001MP START 070101 12 00 0...

Page 79: ...cuit activated OH1 04 Inner communication error BP driver 02 MP s driver protective circuit activated OH2 05 Inner communication error IO 03 MP s driver protective circuit activated CPF 06 Inner commu...

Page 80: ...E Switches the running modes NORMAL and S ENERGY Setting the rotational speed in the NORMAL mode SET NORMAL SPEED Sets the pump rotational speed in the NORMAL mode Setting the rotational speed in the...

Page 81: ...Setting the rotational speed in the S ENERGY mode Pressing the key PRG for 3 sec or more when the status screen is displayed switches to the operational mode setting screen When the mode you want to...

Page 82: ...ou do not need to set press PRG key to go back to the previous screen 5 3 2 Setting the DIP switch See 5 4 for details of the DIP switch SET CONTROL MODE PRG PRG ENTER ENTER ENTER NOW LOCAL MODE SET C...

Page 83: ...ys to change the setting value Increase the setting speed by 0 1 kmin 1 Decrease the setting speed by 0 1 kmin 1 Upper limit MP BP The value lower than the set value for the rated speed Lower limit MP...

Page 84: ...e setting speed by 0 1 Pam3 s Delay time 1 sec Decrease the setting speed by 0 1 Pam3 s Delay time 1 sec Upper limit 81 0 Pam3 s Delay time 60 sec Lower limit 0 5Pam3 s Delay time 5 sec S ENERGY SPEED...

Page 85: ...down arrow keys to change the setting value Increase the setting speed by 0 5 kPa Decrease the setting speed by 0 5 KPa Upper limit 30 0 KPa Lower limit 5 0 KPa Use the keys and to set SET POINT BACK...

Page 86: ...start mode Automatic Manual Table 5 5 Dip Switch B Settings No Mode Off On 1 MP Speed control Not used Used 2 BP Speed control Not used Used 3 4 5 6 Remote Interface IF Exclusive special IF No use st...

Page 87: ...hen the former is selected the pump is started stopped in response to the external start signal When the latter is selected the pump is stopped regardless of the external signal NOTE You can change th...

Page 88: ...external signal set dip switch B No 2 to ON DIP SW B No 6 Activate or inactive the special interface Set this to OFF to activate the interface optional Set this to ON to inactivate the interface defau...

Page 89: ...ch numbers This sets the selected dip switch ON This sets the selected dip switch OFF ENTER Move display level Or indicate set up conditions DIP Switch A DIP Switch B indicates the dip switch number 1...

Page 90: ...andard BP Operation in Remote Automatic Operation MP SPEED CONTROL Not used BP SPEED CONTROL Not used Remote IF Not used LCD screen initialize Carry out initialize Output the pump N2 warning Normal Op...

Page 91: ...onnections Slowly turn the pressure adjustment knob clockwise to set the pressure gauge pressure to 0 05 MPa first Then press the red stopper to lock the knob in position WARNING Be sure to purge with...

Page 92: ...sed on the law and the standard in the installation region 4 The LCD controller counts down 10 seconds after placing the Circuit Protector CP into the ON position NOTE The pump cannot start while the...

Page 93: ...is entered Either press the RESET button or enter an external RESET signal from the control signal connector In the BUZZER Enabled mode using DIP switches it is possible to stop the buzzer by pressing...

Page 94: ...nutes of stopping the process gases CAUTION Process gases will remain in the vacuum pipes and the pump even after the pump has been stopped Be sure therefore to purge for at least 1 hour after the pum...

Page 95: ...6 When DIP switch A No 4 is placed into the ON position and this switch is changed from the LOCAL to the REMOTE setting the pump will stop regardless of the external signal input PM10U EBARA CORPORATI...

Page 96: ...er The MP and BP will stop simultaneously The RUN lamp goes out and the display gives a power reading of 0 0kW 6 2 2 REMOTE Start Stop a START Enter the external MP start signal input from the control...

Page 97: ...operation is continued when the supply voltage is back to normal more than 170V within 1 second Pump operation is stopped when the momentarily power failure is continued more than 1 second Then contr...

Page 98: ...0 4 MPa Disconnection of the cooling water resulted from improper handling may cause electrification and unit damage For service and transportation unplug the cooling water connection plugs on the inl...

Page 99: ...on oil See the section 7 4 Lubrication oil when adding the oil WARNING Switch off the power supply to the pump first and interrupt the Circuit Protector CP and lockout before you start on maintenance...

Page 100: ...If any abnormal symptoms other than those displayed on the LCD controller appear take action in accordance with the instruction of Section 10 Troubleshooting When the BZ OFF button is pressed in the B...

Page 101: ...into the purge port and do check Be sure to following the instructions below when carrying out maintenance work on the vacuum and exhaust piping of the pump 1 Before you remove and wash the piping be...

Page 102: ...e waited until the internal pump pressure returns to atmospheric normal pressure remove the plug from the oil filler inlet See Figs 7 2 3 Check the level through the window of the oil level gauge Then...

Page 103: ...sure only to use the lubricant oils listed in specification table 3 1 CAUTION Waste oil shall be disposed of by industrial waste disposal dealer in accordance with Material Safety Data sheets appendix...

Page 104: ...endable Spare Parts Not needed for each pump Parts Name Type Part No Oil level gauge C 5350 000 7900 Water flow sensor 10 L min C 5138 107 0001 N2 flow sensor 84 4 Pa m3 s C 5300 000 5300 T C bolt T T...

Page 105: ...on Remarks Lubricant oil Inside of pump module See section 7 3 Refer to Appendix 1 2 for Material Safety Data Sheet Lithium battery CPU board No necessary to replace at usual maintenance Refer to App...

Page 106: ...appropriate measurement equipment Without assurance of gas safety instruct the workers to wear proper personnel protective equipment if necessary to protect them from gas hazards The personnel protect...

Page 107: ...ly qualified operator personnel Be sure that the wire rope and crane used for lifting the pump are in proper order and match the weight of the pump To prevent unequal weight distribution suspend the p...

Page 108: ...ff Please select it based on the law and the standard of installation features Please intercept the power supply of the pump when EMO operates Optional EMS Switch Button can be used as EMO Button with...

Page 109: ...sure that pump and exhaust piping do not come in contact with humans or inflammable substances Do not remove the pump cover during operation WARNING Check for gas leaks after installing and maintainin...

Page 110: ...Remote Start up conditions are not satisfied Startfail is displayed Satisfy all start up conditions Instrument failure Replace instruments BP does not start BP start signal is not entered in REMOTE or...

Page 111: ...e or overhaul pump Cooling water flow is reduced Increase cooling water flow WARN BP MOTOR TEMP HIGH WARN MP MOTOR TEMP HIGH Booster pump BP motor coil temp rises Main pump MP motor coil temp rises Co...

Page 112: ...act Accumulation of by products Substance plunge Replace or overhaul pump Instrument failure Replace instrument ALARM BP MOTOR STEP OUT ALARM MP MOTOR STEP OUT Booster Pump BP motor step out Main Pump...

Page 113: ...Replace instruments WARN PRESS HIGH Exhaust pressure rises Exhaust valve is closed Check exhaust pipe Accumulation of by products in pipes Check exhaust pipe Instruments failure Replace instruments AL...

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