EBARA A07V, Instruction Manual, Page: 67 / 69

(VII)
Appendix 4
Leak Check Procedure
NOTE
: This general procedure is not a substitute for user's work instructions or leak detector
operations manual. Read and follow the instructions for your leak detection apparatus.
Perform leak check after initial system assembly and after any breach of the system for
maintenance.
Check pump down time (that is time to go from atmosphere to target pressure) of foreline to
confirm the absence of gross leaks.
For vacuum systems and process pump exhaust lines, pressurize the system with helium
and run the probe (“sniffer”) of a mass spectrometer leak detector around all joints, seals and
fittings.
Realign joints, tighten fittings, replace seals, etc.
Repeat as necessary to eliminate all leaks.
Disconnect helium supply and place system in operating condition.
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