EBARA A07V, Instruction Manual, Page: 31 / 69

(
17)
4.2 Piping
4.2.1 Vacuum and Exhaust Piping
Connect the vacuum and exhaust pipes to the suction and exhaust flanges respectively.
Because of the narrow clearance between pump rotors, ingested foreign objects will prevent
the pump from operating. Observe the following cautions when making the flange
connections:
a) Remove all foreign matter from inside the piping.
b) When connecting flanges, ensure that no dirt or dust particles adhere to the flange
surfaces and that the flange surfaces are undamaged.
c) Prevent the ingestion of wafer fragments and of reaction byproducts that may adhere to
the APC valve. For this purpose, a filter or screen may be advisable.
d) The weight of the pipes attached to the pump can cause misalignment and leaks from
the flange connections. Support the piping properly and do not apply excessive force to
align flange faces.
e) EBARA recommends the insertion of a flexible bellows between the piping and the
suction and exhaust flanges of the pump.
f) Length of the flexible bellows on the suction side will vary according to the vacuum
drawn. Connect without applying undue force to the flexible bellows.
DANGER
Check for leaks after installing the pump. A leak may lead to the
dangerous discharge of hazardous substances or to unpredictable
reactions with air admitted into the pump.
4.2.2 Cooling Water Piping
Connect the cooling water pipes to the correct inlet and outlet ports.
The water ports are quick-connect couplers. Seat the plug firmly in the socket. The socket
sleeve will return to the front (Figure 4.2).
Do not connect the supply/return plugs in reverse. The diameters are slightly different, and
there are In/Out markings on the plugs.
Disconnection automatically blocks water flow.
Use cooling water corresponding to the specifications of Table 4.1.
EBARA Corporation