EBARA A07V, Instruction Manual, Page: 12 / 69

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Contents
Record of Changes.........................................................................................................i
Safety Information .........................................................................................................ii
Important Precautions..................................................................................................iii
Contents .........................................................................................................................x
1 Foreword..................................................................................................................1
2 Introduction .............................................................................................................1
3 Product Description................................................................................................2
3.1 Summary ........................................................................................................2
3.1.1 Pump Module....................................................................................2
3.1.2 N
2
Gas ...............................................................................................2
3.1.3 Cooling Water...................................................................................2
3.1.4 Exhaust .............................................................................................2
3.2 Control System ..............................................................................................2
3.2.1 Warning.............................................................................................3
3.2.2 Operation Status Control.................................................................3
3.3 Moving the Pump...........................................................................................3
3.3.1 Preparation .......................................................................................3
3.3.2 Moving Method.................................................................................4
3.4 Detailed Specifications .................................................................................4
4 Installation ............................................................................................................. 16
4.1 Location ....................................................................................................... 16
4.2 Piping ........................................................................................................... 17
4.2.1 Vacuum and Exhaust Piping ......................................................... 17
4.2.2 Cooling Water Piping ..................................................................... 17
4.2.3 N
2
Gas Piping.................................................................................. 19
4.2.4 Ventilation Duct .............................................................................. 19
4.3 Electrical Wiring .......................................................................................... 20
4.3.1 Power Supply Wiring ..................................................................... 20
4.3.2 Control Signal Wiring..................................................................... 21
4.4 Operation Mode ........................................................................................... 24
5 Operation ............................................................................................................... 26
5.1 Before Starting............................................................................................. 26
5.2 Operation ..................................................................................................... 30
5.2.1 Local (Pump side) Operation ........................................................ 31
5.2.2 Remote (Distant) Operation........................................................... 31
6 Maintenance and Overhaul................................................................................... 32
6.1 Routine Inspection ...................................................................................... 32
6.2 Piping Maintenance..................................................................................... 33
6.3 Lubricant Oil ................................................................................................ 33
6.4 Spare (Maintenance) Parts List .................................................................. 34
6.5 Overhaul....................................................................................................... 35
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