
(
i)
Record of Changes
Rev. Date Page
Position
Contents
Reason
0 2-Jun-94
Newly
issued
1 13-Jul-94 5
6-10
14
17
21
22
A07V Spec.
Outline Drawing
Fig. 3.4
Fig. 4.2
Fig. 4.6
Table 4.5
Pumping Speed
Water Sup./Rtn
Sys. Flow
Coupler
Ctrl. Wiring
Pin Assign.
Correction
Add NPT
Add Note
Add Drawing
Correction
Add note
2 14-Nov-96
ⅲ
,
ⅳ
ⅴ
,
ⅵ
,
ⅶ
4
21
25
26
33
35,36
37
44,45
Fig. 1,2,3,4,5
Drawing
3.3 List
Dig. 4.4
Table 4.6
Fig. 4.7
Table 6.1
6.3
7 (8)
9
Safety warning
labels
Warning label
Location
Detailed
specifications
Power Sup. Rec
Dipswitch
S.W setting
Typical check
items
Spare Parts
Pump Lifting
Service Net.
Add
Add
Add List
Correction
Design Change
Design Change
Add Table
Add List
Add Note
Add List
A 12-Dec-97
New
release
per ECO 2905
3 20-May-99 21
44,45
5,6,18,
27,28,
32
Tab. 4.2
9. Service Network
-----
Suitable wire
Japan, Taiwan
(Add., Phone, Fax)
The Unit was
changed in terms
of Domestic
regulation for
Measurement low.
Correction
Change
-----
3A
27-Apr-01
ETI release of
EC Rev 3 per
ECO 5394.
3B June
2002 20
iv
Thruout
Add UL grounding
note
Add LCD “hot
surface” note
Add appendices
Language Edit
Third-party
marking
Third-party
marking
SEMI S2
ECO 5771
EBARA
Corporation
Summary of Contents for A07V
Page 9: ...vii EBARA Corporation...
Page 10: ...viii EBARA Corporation...
Page 11: ...ix EBARA Corporation...
Page 14: ...xii Blank page EBARA Corporation...
Page 21: ...7 EBARA Corporation Outline Drawing A70W...
Page 22: ...8 Outline Drawing A30W EBARA Corporation...
Page 23: ...9 EBARA Corporation Outline Drawing A25S...
Page 24: ...10 EBARA Corporation Outline Drawing A10S...
Page 25: ...11 EBARA Corporation Outline Drawing A07V...
Page 60: ...46 Blank Page EBARA Corporation...
Page 63: ...III Label Country US Label Emergency Number 716 293 3330 EBARA Corporation...