Chapter 8
HYBRID Coater Service Manual ver1.1
58
LED
Used for
State
D27
till
D30
Input for ‘Up 1’ till ‘Up 4’
On = Sensor for upper limit detection of the extend
of unit 1-4 is active (up).
Off = Sensor for upper limit detection of the extend
of unit 1-4 is not active.
D31
till
D34
Input for ‘Down 1’ till ‘Down 4’
On = Sensor for bottom limit detection of the
extend of unit 1-4 is active (down).
Off = Sensor for bottom limit detection of the
extend of unit 1-4 is not active.
D35
till
D38
Input for ‘Tilt 1’ till ‘Tilt 4’
On = Sensor for tilt limit detection of the tilt function
of unit 1-4 is active (tilt).
Off = Sensor for tilt limit detection of the tilt function
of unit 1-4 is not active.
D39
till
D42
Input for ‘Normal 1’ till ‘Normal 4’ On = Sensor for normal or straight limit detection of
the tilt function of unit 1-4 is active (normal or
straight).
Off = Sensor for normal or straight limit detection of
the tilt function of unit 1-4 is not active.
8.2.3
LED’s near Connector P3 and P4 on the EL-04873
LED
Used for
State
D43 Input for left limit of X movement On = Vane is not interrupted (head not in left X
limit).
Off = Vane is interrupted (head in left X limit).
D44 Input for tight limit of X
movement
On = Vane is not interrupted (head not in right X
limit).
Summary of Contents for HC-100
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Page 106: ...Appendix A HYBRID Coater Service Manual ver1 2 104 ...
Page 107: ...HYBRID Coater Service Manual ver1 1 Appendix A 105 ...
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Page 109: ...HYBRID Coater Service Manual ver1 1 Appendix A 107 ...
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Page 111: ...HYBRID Coater Service Manual ver1 1 Appendix A 109 ...
Page 113: ...HYBRID Coater Service Manual ver1 1 Appendix B 111 ...
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Page 115: ...HYBRID Coater Service Manual ver1 1 Appendix B 113 ...
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Page 117: ...HYBRID Coater Service Manual ver1 1 Appendix B 115 ...
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Page 121: ...HYBRID Coater Service Manual ver1 1 Appendix B 119 ...
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Page 123: ...HYBRID Coater Service Manual ver1 1 Appendix B 121 ...
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Page 129: ...HYBRID Coater Service Manual ver1 1 Appendix B 127 ...
Page 131: ...HYBRID Coater Service Manual ver1 1 Appendix C 129 Option DD 52XX ...
Page 132: ...Appendix C HYBRID Coater Service Manual ver1 1 130 Option HC 1000 ...
Page 133: ...HYBRID Coater Service Manual ver1 1 Appendix C 131 Option HC 1010 ...
Page 134: ...Appendix C HYBRID Coater Service Manual ver1 1 132 Option HC1030 ...
Page 135: ...HYBRID Coater Service Manual ver1 1 Appendix C 133 Option HC 1050 1051 ...
Page 136: ...Appendix C HYBRID Coater Service Manual ver1 1 134 Option HC 1160 ...
Page 137: ...HYBRID Coater Service Manual ver1 1 Appendix C 135 Option HC 1170 Rev1 0 ...
Page 138: ...Appendix C HYBRID Coater Service Manual ver1 1 136 Option HC 1170 Rev 1 1 ...
Page 139: ...HYBRID Coater Service Manual ver1 1 Appendix C 137 Option HC 1380 ...
Page 140: ...Appendix C HYBRID Coater Service Manual ver1 1 138 Option HC 1390 ...
Page 162: ...Appendix F HYBRID Coater Service Manual ver1 1 160 ...
Page 166: ...Appendix G HYBRID Coater Service Manual ver1 1 164 ...