Chapter 3
HYBRID Coater Service Manual ver1.1
22
3.12
ZØ Movement at HC-200
Two stepper motors are used for these movements. The bottom one is the one for the Z and
the upper one for the rotation. Both
stepper motors are not directly
coupled to the spline shaft.
The Ø stepper motor is mounted on
a gear which has a 10:1 ratio. On
the output shaft a pulley of 44 teeth
is mounted. The pulley on the Ø part
of the spline shaft has 72 teeth. One
revolution of the stepper motor gives
a rotation of 33 / (73*10) * 360 =
16.73 degrees.
The Z stepper motor contains a
pulley with 22 teeth. The pulley on
the Z-part of the spline shaft has 72
teeth. One rotation of the stepper
motor gives a Z movement of 22 / 72
* 25 = 7.639mm.
Spare parts:
EL-02527
Inductive proximity switch M8
EL-07164
Vane switch of photo interrupter OPB815W
EL-07183
Three channel encoder module
HC-200-SS-80
Encoder disc 2” 2500lines with Index
HC-100-SS-53
Stepper motor SECM-268-E3.0A with connector
Summary of Contents for HC-100
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Page 131: ...HYBRID Coater Service Manual ver1 1 Appendix C 129 Option DD 52XX ...
Page 132: ...Appendix C HYBRID Coater Service Manual ver1 1 130 Option HC 1000 ...
Page 133: ...HYBRID Coater Service Manual ver1 1 Appendix C 131 Option HC 1010 ...
Page 134: ...Appendix C HYBRID Coater Service Manual ver1 1 132 Option HC1030 ...
Page 135: ...HYBRID Coater Service Manual ver1 1 Appendix C 133 Option HC 1050 1051 ...
Page 136: ...Appendix C HYBRID Coater Service Manual ver1 1 134 Option HC 1160 ...
Page 137: ...HYBRID Coater Service Manual ver1 1 Appendix C 135 Option HC 1170 Rev1 0 ...
Page 138: ...Appendix C HYBRID Coater Service Manual ver1 1 136 Option HC 1170 Rev 1 1 ...
Page 139: ...HYBRID Coater Service Manual ver1 1 Appendix C 137 Option HC 1380 ...
Page 140: ...Appendix C HYBRID Coater Service Manual ver1 1 138 Option HC 1390 ...
Page 162: ...Appendix F HYBRID Coater Service Manual ver1 1 160 ...
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