N62 Piezo Nanopositioning Scanner User Manual
14
8.1 Technical data
8. Parameter
Table3. N62 Technical data
Note:The tolerances of the above data are all ±20%
8.2 Drawing
FIG.10 Drawings
Models
N62.XY20S/K
Unit
Active axis
XY
Travel range(0~120V)
±8
μm
Travel range(0~150V)
±10
μm
Unloaded resonant frequency
2000
Hz
Load capacity
1
kg
Capacitance
1.6
μF/axis
Material
Steel, Aluminum
through hole
Cable length: 1.5m
through hole