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II. Description / Specification
The CPS-1001/S/13.56MHZ is a RF Generator operating with a center frequency of 13.56 MHz. The
power source produces maximum transfer of power into a 50 ohm resistive load, yet it is designed to
withstand large deviations in load impedance without failure.
The primary features of the CPS-1001 series are its solid-state design, small physical size and
reliability.
The CPS-1001 series amplifier is constructed with two main sections. The DC power section includes
all of the filter capacitors, rectifiers and regulators, as well as the three-phase 208 VAC power
transformer. Transformers to accommodate other line voltages are available through special order. The
rectifiers and bleeder resistors are mounted on a water-cooled copper heatsink. These components are
operated at about half of their rated outputs to insure the high reliability of this section. The RF section
consists of the oscillator control board (OCB), driver, PA 1000 power amplifier, combiner and
directional coupler assembly. The driver and power amplifier modules are mounted on water-cooled
heatsinks. All components are used well below their dissipation ratings for long life and low
maintenance operation.
The CPS-1001 is enclosed in a standard 19” rack mounted chassis. The chassis is 5.25” high and
16.125” deep (See the Control Drawing for further mechanical detail).
NOTE:
This product is subject to a “Copy Exact” agreement that requires written notification to the
contract specialist prior to implementing any PART or PROCESS Changes.
A. Electrical Specifications
1. A/C Input Voltage: 180-229 VAC, 49-61Hz, three phase, NO NEUTRAL
2. Line Current Protection: 10 Amp, 3 pole circuit breaker.
3. Output Power: (within specified range of line voltage)
3.1 0 to 1.0 KW continuous forward power into a 50 ohm load, 0 degrees nominal phase.
3.2 0 to 1.0 KW continuous forward power into a plasma load of complex impedance
with appropriate matching network.
3.3 Forward power out to track command setpoint for reflected power less than 200 watts.
4. Generator frequency: 13.56 MHz
5. Frequency stability: +/- .005%
6. Load Mismatch: Continuous operation into any load mismatch. Automatic forward power
limiting above 200 watts reflected power.
7. Harmonic distortion: All harmonics minimum 30 db below fundamental at full power
8. Accuracy / Linearity / Regulation/ Stability:
Setpoint Zero Offset: - 2% of full scale max
Input to Output Linearity: +/- 3% of setpoint from 10-100%
Input to Output Accuracy: +/ - 3% of setpoint from 10-100%
A/C Line Regulation: 2% max output change over rated voltage
Forward Power Regulation: +/- 5% of setpoint max for load variations from 1:1 to
Summary of Contents for CPS-1001/S/13.56MHZ
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