Dry
air
0.1
1
10
100
Flow rate
(L/min)
N
2
O
2
H
2
Flammable gas
Ar
Applicable fluids
Liquid crystal
Floating transport system of glass
Semiconductor
Automobiles, other
Flow rate control of argon gas for welding
Glass processing
Burner flame control
Liquid crystal
Flow rate management
of ionizer purge gas
Available with a broad flow rate range.
Flow rate control of air is possible.
Wire bonding
Ideal for tension control of wire bonding
that requires high precision.
Ideal for float (non-contact) transportation
of large FPD glass.
Semiconductor
Purge gas flow rate control
Available with a broad flow rate range.
Flow rate control of purge gas can be done.
Foodstuffs
Filling and packaging
Ideal for inert gas filling of food packaging, etc.
Control of N
2
gas in laser oscillator and semiconductor
manufacturing equipment
Available with a broad flow rate range.
Flow rate control of argon gas for welding is possible.
Suitable for controlling burner flame by
allowing low pressure gas supply.
Applications
Used in various fields
RAPIFLOW is available for a wide variety of applications in industries such as machinery,
automobiles, precision components, and cutting-edge fields such as semiconductors and
biotechnology, medical care, foodstuffs, and more.
Summary of Contents for FCM-0001 AI
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