Product description
Use
The roots pumps are designed for applications in the semiconductor
industry under Clean Room conditions. The WY 4500 C roots pumps
can only be used as backing pumps in conjunction with other (primary)
pumps in vacuum systems. They can be used to draw gases and
mixtures of gases.
Make sure that the system complies with the appropriate national and
international safety regulations and that all safety instructions are
followed when drawing toxic, inflammable and/ or explosive gases.
These pumps are not designed for the drawing of explosive mixtures.
Before using the vacuum pump for drawing aggressive gases, you must
imperatively contact your local Busch Agency.
Do not use the pump for other processes without a general overhaul.
Gases or products could have remained inside the pump.
The Roots vacuum pumps are usually used as backing pumps in
conjunction with other types of vacuum pumps in vacuum systems.
Conveying media with a higher density than air leads to an increased
thermal and mechanical load on the vacuum pump and is permissible
only after consultation with a Busch company.
Max. allowed temperature of the drawn gases:
See “Oil, Ambient temperature range”
Make sure that the oil level in both housings is in the target circle of
the oil sight glasses after the vacuum pump has been switched off.
The vacuum pump is intended for installation in a potentially
non-explosive environment.
Max. permissible number of startings per hour: 6.
The vacuum pump is thermally suitable for continuous operation.
The vacuum pump is capable of holding end pressure.
Principle of operation
The Roots vacuum pumps operate according to the approved principle
of the Roots type machine. Operation is both simple and effective.
Two rotors with identical profiles rotate in opposite directions within a
casing. As they rotate, gas is drawn into the space between each rotor
and the casing where it is trapped and pushed out at the discharge
through the rotation of the lobes. This action is repeated twice for each
revolution of each rotor and therefore four times for each revolution of
the drive shaft. There is no mechanical contact between rotors and
cylinder, therefore no oil lubrication in the process chamber is required.
The drive motor of the roots pump is a water-cooled motor.
Product description
Page 3
OSG
MP 1
OFP
ODP
BF
BF
IN
NP
TSA
CWO 1
CWI 1
CWO 2
RT
RT
OUT
IN
DA Directional arrow
OFP Oil filler plug
IN Inlet
NP Nameplate
OSG Oil sight glass
RT Rotor
OUT Outlet
ODP Oil drain plug
BF Base frame
MP 1 Magnetic plug
MP 2 Magnetic plug
MP 3 Magnetic plug
TSA Resistance thermometer
CWI 1 Cooling water inlet
(motor)
CWO 1 Colling water outlet
(motor)
CWI 2 Cooling water inlet
(pump)
CWO 2 Cooling water outlet
(pump)
OSG
MP 2
OFP
MP 3
DA
ODP
CWI 2
Summary of Contents for WY 4500 C
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