Current control mode (Select LL mode = AUTO)
Standard DP current level
DP current level
40 A (200V)
20 A (400V)
Time Before
40 sec
** it depends on the process time, chamber capacity and end vacuum level
Standard setting (time)
1) Cold start
900 sec
2) MB on delay
30 sec
Standard operational time chart
DS 3010 E
Page 18
0870771509 (En)
Pump speed
Booster
Dry pump
Pump ready
(pump
ĺ
tool)
Chamber open/close
(gate valve on/off)
1) Cold start
2) MB on delay
90Hz
30Hz
delay (5 sec)
50/60Hz
pump start-up
processing
pump stop
open(on)
close(off) open(on)
close(off) open(on)
close(off)
DP Current
35 A
5 A
delay (5 sec)
Time before (40 sec)
DP current level 20 A
LCD start or
Remote start
(tool
ĺ
pump)
