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Checking the direct cooling

The flow of the cooling water is checked by the flow switch FS 2. The
flowmeter must be connected in such a way that switching-on leads to
an alarm and stopping of the vacuum pump when the flow drops be-
low 9 l/min.

Checking the nitrogen supply

The flow of the nitrogen is checked by the flowmeter FME. The flow-
meter must be connected in such a way that switching-on leads to an
alarm. The alarm limit can be adjusted depending the type of process.

Saving the operating parameters

As soon as the vacuum pump is working under normal conditions after
being switched on:

l

Measure the working current of the DP and MB motors and save
them as reference values for all future maintenance and repair
work

Recommendations on operation

Application

WARNING

The vacuum pump is designed for use under the conditions
specified here.

If these conditions are not met, there is a risk of damage to or total
destruction of the vacuum pump and its components!

The vacuum pump may only be switched on under the specified
conditions.

The COBRA DS vacuum pumps are designed for use in the field of mi-
croelectronics and similar industries.

They can be used to suck gases and gas mixtures.

WARNING

When using toxic, inflammable and/or explosive gases, make sure
that the system corresponds in design to applicable local and
national safety regulations and that all applicable safety measures
are followed.
All product-specific safety regulations must be observed.

Solid particles must not get into the vacuum pump. Procedural errors
can result in the pump drawing in a certain quantity of liquid. If the
pump has drawn in liquid, a short drying time is necessary at the end
of the procedure.

The allowed maximum inlet gas temperature depends on the inlet pres-
sure and the type of gas: the lower the inlet pressure (Pa), the higher
the drawn gas temperature (TGas) can be.

The following indicative values for air can be considered:

– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C

The vacuum pump is intended for use in a potentially non-explosive
environment.

Max. permissible number of startings per hour: 6.

As far as temperature is concerned, the pump is suitable for continuous
duty at any pressure between atmosphere and ultimate pressure.

The vacuum pump is tight down to ultimate pressure.

CAUTION

The surface temperature of the vacuum pump can exceed 50 °C
when the vacuum pump is in operation.

Danger of burns!

The vacuum pump may not be touched when it is in operation. If
touching the pump is unavoidable, wait until the surface
temperature has cooled down or wear protective gloves.

CAUTION

The intensity of the noise of the vacuum pump is higher within a
certain area of the pump.

Risk of hearing damage.

Users must wear ear protection when spending a longer period of
time in the vicinity of a non-insulated vacuum pump.

CAUTION

The COBRA DS vacuum pumps can be delivered without oil.

Operation without oil will result in damage to the vacuum pump!

The vacuum pump must remain in a horizontal position when it has
been filled with oil.

CAUTION

The COBRA DS vacuum pumps can be delivered without cooling
liquid.

Operation without cooling liquid will result in damage to the
vacuum pump!

CAUTION

The cooling water flow, which is checked by the flow switch FS 2,
must be at least 10 l/min.

l

Make sure that all caps, safeguards and similar covers are mounted

l

Make sure that the safeguards are switched on

l

Make sure that the inlet and outlet for the cooling air are not
covered or closed and that the flow of cooling air is not impaired in
any way

l

Make sure that the system does not leak. Leakages of dangerous
substances must be prevented

l

Make sure that the “Necessary installation instructions” are
followed and especially that adequate cooling is ensured

The following must be noted when the pump is shut down for a longer
period of time:

CAUTION

If there is a risk of frost, all the cooling water must be drained out of
the vacuum pump if the pump is shut down for a longer period of
time!

Drain the cooling liquid

u

Unscrew the filler cap for the cooling liquid

u

Drain the cooling liquid completely

u

Screw on the filler cap for the cooling liquid again

u

Collect the cooling liquid and recycle it or dispose of it
according to local or national regulations

DS 3010 E

Installation and start-up

0870771509 (En)

Page 15

Summary of Contents for COBRA DS 3010 E

Page 1: ...Screw Vacuum Pumps and Roots Pumps COBRA DS 3010 E Standard version Busch Manufacturing Korea Ltd 189 51 Soicheon ro Majang myun Icheon si Gyunggi do 467 813 Republic of Korea 0870771509 181024 Origin...

Page 2: ...am 19 Weekly 19 Monthly 19 Yearly 19 Every 16 000 hours of operation at the latest after 4 years 20 Lock Out Tag Out procedure 20 Safety Lockout procedure 20 Checking the oil 20 Checking the oil level...

Page 3: ...3010 E 0870771509 En Page 3 DP IN OUT ESS MSH PTB RC COBRA DS 3010 E DP Backing vacuum pump DP 600 C ESS Emergency stop switch IN Inlet MSH Main switch OUT Discharge to silencer PTB Pump terminal box...

Page 4: ...le of cylinder DGR2 Regulating valve dilution gas end of cylinder ECO Power connection EV Expansion vessel FME Flow meter nitrogen FS 1 Flow switch cooling liquid FS 2 Flow switch cooling water HE Hea...

Page 5: ...rogen system NC Nitrogen supply OSG 1 Oil level indicator DP OSG 2 Oil level indicator DP OSG 3 Oil level indicator MB OSG 4 Oil level indicator MB PGI Process gas inlet PGO Process gas outlet PRV Nit...

Page 6: ...id is above 100 C The pump will stop immediately after the emergency alarm ring a direct cooling water circuit in the motors in the cylinder covers A and B side of WZ rotary lobes vacuum pump and COBR...

Page 7: ...and instruct his personnel accordingly Local regulations regarding the motors and electric control elements must be observed when installing the pump in potentially explosive environments The maintena...

Page 8: ...l Switch off the water inlet first then outlet and nitrogen quick connections l Put the label or warning board Maintenance processing on or next to the pump Safety Lockout procedure l Take off the lab...

Page 9: ...ges are closed put on the protective caps included in the delivery package of the vacuum pump l Store the vacuum pump if possible the vacuum pump should be stored in its original packaging indoors dry...

Page 10: ...ills the requirements for assembly dismantling l Make sure that no temperature sensitive parts for example of plastic wood cardboard paper electronic parts come into contact with the hot surfaces of t...

Page 11: ...e that the regulations of the Electromagnetic Compatibility Directive 2014 30 EU as well as standard EN norms safety directives and especially local and national regulations are observed this is the r...

Page 12: ...g direction it can be destroyed even if this is the case for only a short moment Make sure that the vacuum pump is connected correctly before switching it on l Determine rotation sense of the motor by...

Page 13: ...ically tight NOTE It is easier to switch on the vacuum pump with cold oil when the intake line is not closed or when the intake flange is not covered by a rubber plate l Start the vacuum pump If the i...

Page 14: ...um pump at the time of rise does not exceed 5 compared to the horizontal In the event of too important slope 5 risk of oil leakage in the workspace l Before each transport requiring a means of adapted...

Page 15: ...issible number of startings per hour 6 As far as temperature is concerned the pump is suitable for continuous duty at any pressure between atmosphere and ultimate pressure The vacuum pump is tight dow...

Page 16: ...ent Level Time Before and DP Idle are idle CAUTION LL Mode Off is not recommended for Load Lock cyclic pumping due to the current load and the mechanical stress with full speed l LL Mode Auto u The mo...

Page 17: ...XTERN DS 3010 E Standard operational time chart 0870771509 En Page 17 LCD start or Remote start tool pump Pump speed Booster Dry pump Pump ready pump tool Process on tool pump 1 Cold start 2 MB on del...

Page 18: ...sec 2 MB on delay 30 sec Standard operational time chart DS 3010 E Page 18 0870771509 En Pump speed Booster Dry pump Pump ready pump tool Chamber open close gate valve on off 1 Cold start 2 MB on del...

Page 19: ...oling liquid and oil levels according to the chapters Checking the oil level and Checking the cooling liquid level open the power box cover and check that the FDP1 thermal relay is on manual reset pos...

Page 20: ...the condensate drain l Drain the oil see Draining the oil WZ MB rotary lobes vacuum pump If the oil level does not reach the target circle u Top up with oil see Refilling oil If the oil level exceeds...

Page 21: ...gs again and drain any remaining oil l Check that no metal swarf sticks to the magnet of the drain plug clean if necessary l Refit the oil drain plugs and tighten up l Dispose of the used oil in compl...

Page 22: ...of cylinder upper plate l Screw on the cooling liquid filler cap again l If liquid has run on to the outside surfaces of the vacuum pump wipe it off Draining the cooling liquid l Make sure that the v...

Page 23: ...nto pores openings and other internal parts of the vacuum pump There is a health hazard when dismantling the vacuum pump There is also a danger to the environment Prior to shipping the vacuum pump mus...

Page 24: ...ot be dismantled drain the oil u dispose of the oil according to local environmental protection regulations drain the cooling liquid u dispose of the cooling liquid according to local environmental pr...

Page 25: ...to hazardous pump conditions which could cause personal injury Oil quantity The quantity of oil specified in the following table is of informative nature only Check the oil level with the help of the...

Page 26: ...of informative nature only Respect the procedure of filling the cooling liquid Quantity Zitrec M 25 already mixed ready to use DS 3010 E approx 26 litres CAUTION The proportion of pure glycol and wate...

Page 27: ...5 15 Nominal motor speed DP 60 Hz min 1 3600 Nominal motor speed MB 90 Hz min 1 5400 Noise level EN ISO 2151 50 Hz 60 Hz dB A dB A 75 Ambient temperature C F 0 40 32 104 Maximal counter pressure Disch...

Page 28: ......

Page 29: ...equipment and following the standards Standard Title of the standard EN ISO 12100 2010 Safety of machinery Basic concepts general principles of design EN ISO 13857 2008 Safety of machinery Safety dis...

Page 30: ...Note...

Page 31: ...Note...

Page 32: ...Majang myun Icheon si Gyunggi do 467 813 Republic of Korea Phone 82 31 645 2700 Fax 82 31 631 2898 e mail busch busch co kr Malaysia Busch Malaysia Sdn Bhd 4 6 Jalan Taboh 33 22 Seksyen 33 Shah Alam T...

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