Section 1 - Introduction
Installation and Operation Manual
Brooks RS485 L-Protocol MFCs
X-
DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2020
•
Query for Available Calibration Instances (Process Gases) - Master
controller will use this message to query available number of calibration
instances.
•
Auto Zero Enable/Disable - Master controller will use this message to
enable auto zero function.
•
Requested Zero Enable - Master controller will use this message to
enable requested function.
•
Query for Requested Zero Status
– Master controller will use this
message to query if the requested zero function has been completed.
•
Query for Sensor Current Zero - Master controller will use this message
to query the current sensor zero offset.
•
Query for Sensor Reference Zero - Master controller will use this
message to query the sensor reference zero offset.
•
Set Sensor Reference Zero - Master controller will use this message to
set sensor reference zero offset.
•
Query for Inlet Pressure (GF125 only)
– Master controller will use this
message to query the pressure transducer reading.
•
Query for Temperature
– Master Controller will use this message to
query the temperature reading
2
