Section 5 - Advanced Diagnostics (GF135 Only)
Installation and Operation Manual
X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2020
Brooks RS485 L-Protocol MFCs
5. Advanced Diagnostics (GF135 Only)
5.1. New Communication Protocol Overview
5.1.1. Objectives and Problem Statement
Through the years, issues found in the field on Brooks MFCs have been very
difficult to troubleshoot due to lack of information given to failure analysis
teams. Issues that are random in occurrence and are specific to the field
setup are the most difficult to reproduce therefore troubleshooting takes
longer.
This new communication capability will enable the device to perform a series
of self validation at regular interval and report its status to the tool software.
Some of the self validation will require at least knowing the state of certain
part of the tool over which the device typically had neither control nor access.
The capabilities of the GF135 will enable short interval control of the
upstream isolation valve in a manner consistent with good safety practices.
Those capabilities do not exist in any protocol currently in use in the field.
5.1.2. Protocol Description
The communication protocol shall be implemented over RS485 physical
layer.
The protocol shall be able to handle the following type of communications
between the device and the tool:
•
Tool request for Commissioning status
•
Tool request for valve leak status, ROD measurements
These are the minimum requirements to support advanced diagnostics.
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