Section 3 - Message Protocol Details
Installation and Operation Manual
X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2020
Brooks RS485 L-Protocol MFCs
3.10. Calibration Instance (Process Gas) Selection
Master controller will use this message to select which calibration instance
is to be used for flow metering.
MAC ID (Targeted MFC controller address)
STX(0x02)
Command Code(0x81 for write)
Packet Length(0x04)
Class ID(0x66)
Instance ID(0x00)
Attribute ID(0x65)
Calibration Instance ID(#)
Pad(0x00)
Checksum
23