Model 5866
Installation and Operation Manual
541-C-005-AAA Rev D/ DRAFT
April, 2007
A-3
Section A, CE Certification of
Mass Flow Equipment
English
Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands
Subject
: Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date
: January-1996.
The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the
Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be
used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with
CE certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
Eesti
Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands
Brooksi kogu CE-märki kandev (elektriline ja elektrooniline) seadmestik on edukalt läbinud katsed vastavalt
elektromagnetilise ühilduvuse eeskirjadele (elektromagnetilise ühilduvuse direktiiv 89/336/EMÜ). Signaalikaablite
valimisel kasutamiseks koos CE-vastavusmärki omavate seadmetega tuleb siiski järgida spetsiaalseid nõudeid.
Signaalikaablite, läbiviiktihendite ja pistikühenduste kvaliteet:
Brooks valmistab kvaliteetkaableid, mis vastavad CE-sertifitseerimise spetsifikatsioonidele.
Kui te aga soovite kasutada oma signaalikaablit, peaksite valima täielikult varjestatud kaabli vähemalt 100%
varjestusega.
Kasutatavad poolümar- või ümarühendused tuleb varjestada metallekraaniga. Võimaluse korral tuleb kaablivarje
kinnitamiseks kasutada metallist kaablihoidikuid.
Kaabliekraan tuleb ühendada metallkesta või -tihendiga ning varustada mõlemas otsas varjestusega 360° ulatuses.
Varjestus tuleb ühendada maandusklemmiga.
Plaadi külgühendused on tavaliselt mittemetalsest materjalist. CE-sertifitseerimisnõuetele vastamiseks peavad
kasutatavad kaablid olema varustatud 100% varjestusega.
Summary of Contents for 5866
Page 20: ...3 3 Operation Figure 3 2 Proportional Control Figure 3 3 Integral Control ...
Page 21: ...Brooks Instrument Model 5866 Pressure Controller 3 4 Figure 3 4 P I Control ...
Page 23: ...Brooks Instrument Model 5866 Pressure Controller 4 2 ...
Page 32: ...5 9 Troubleshooting Figure 5 3 Valve Adjusting Spacer Locations ...
Page 34: ...5 11 Troubleshooting Figure 5 4 Valve Adjusting Spacer Locations Normally Open N O Valve ...
Page 43: ...Brooks Instrument Model 5866 Pressure Controller 6 6 ...
Page 45: ...Brooks Instrument Model 5866 Pressure Controller 7 2 Figure 7 1 Model 5866E Parts Drawing ...
Page 47: ...Brooks Instrument Model 5866 Pressure Controller 7 4 Figure 7 2 Model 5866M Parts Drawing ...
Page 48: ...7 5 Parts List Table 7 3 Model 5866M Parts List ...
Page 49: ...Brooks Instrument Model 5866 Pressure Controller 7 6 ...
Page 65: ......