Brooks Automation PFC-1100HC Operation Manual Download Page 1

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Summary of Contents for PFC-1100HC

Page 1: ...Polycold Fast Cycle PFC Water Vapor Cryopump Operation Manual 825160 00 revision B...

Page 2: ...E WAVE WAVE II Zaris and Z Bot are trademarks of Brooks Automation Hardware All other trademarks are properties of their respective owners Brooks Automation 2011 All Rights Reserved The information in...

Page 3: ...on the PFC 20 Safety and Operational Interlocks 36 General Hazards 37 Electrical Hazards 40 Lockout Tagout LOTO 43 Gas Hazards 45 Vacuum Hazards 46 Fire and Explosion Hazards 47 Recycling 48 Chemical...

Page 4: ...1 Introduction PFC Operation Manual This Page left Intentionally Blank 2 825160 00 revision B...

Page 5: ...upply and return and a cryosurface with cryogenic feedthrough The refrigeration unit can pump cold or hot refrigerant for defrost in a continuous loop through the refrigerant lines and cryosurface The...

Page 6: ...l 4 825160 00 revision B Description and Applications Continued Figure 1 PFC Used to Capture Water Vapor Legend A Refrigeration Unit B Refrigerant line C Cryogenic feedthough D Vacuum chamber wall E C...

Page 7: ...1 Introduction 825160 00 revision B 5 Description and Applications Continued Figure 2 PFC Used to Minimize Backstreaming Legend A Refrigeration Unit B Refrigerant line C High vacuum valve D Cryobaffle...

Page 8: ...02 Designed for European application and bearing the CE mark these units have refrigerants compliant with EC 1005 2009 the Montreal protocol and the U S EPA SNAP PFC PFC Has two refrigerant circuits w...

Page 9: ...cryocoil surface area m2 ft2 0 5 5 4 0 5 5 4 0 7 7 5 2 0 21 6 Refrigerant Lines and Cryocoils Standard line length m ft 2 44 8 2 44 8 2 44 8 2 44 8 Single circuit Tube O D mm in 12 1 2 12 1 2 16 5 8...

Page 10: ...on the table please contact the factory Please refer to the manual for operating voltage ranges For 480 volt operation the maximum voltage is 506 VAC 6 Units were tested in a manufacturing environment...

Page 11: ...art of a complete system In such cases the PFC may be set to system specifications and acceptance tested with the system Before adjusting or changing settings on a PFC that is part of a system consult...

Page 12: ...ation or possible failure of the components of the PFC Only qualified service personnel are authorized to open or remove the panels and must work in accordance with the safety instructions presented i...

Page 13: ...fety alerts look like Figure 3 Description of a Hazard Alert WARNING ELECTRICAL HAZARD High Voltage can cause severe injury or death Disconnect power before removing access panels Table 5 Warning Labe...

Page 14: ...ts Defined Alert Description Note A note provides additional or explanatory information No pictorial is used CAUTION CAUTION without a safety alert symbol indicates a potentially hazardous situation w...

Page 15: ...atmosphere This includes installing the cryopump some inspection procedures disconnecting the refrigerant lines some troubleshooting procedures repair and disposal of the unit A qualified refrigerati...

Page 16: ...Avoid Them WARNING FLAMMABLE MATERIAL PFC 1101 ONLY Do not open the refrigerant circuit to the atmosphere Do not change the settings of the valves or loosen any fittings Opening the refrigerant circu...

Page 17: ...d Material Safety Data Sheet MSDS section for additional information and protective measures for Polycold s Cool Solutions Fast Cycle Water Vapor Cryopump CAUTION EXTREME TEMPERATURES EXIST Extreme te...

Page 18: ...d by this equipment If hazardous materials will be present users must observe the proper safety precautions and ensure that the material used is compatible with those from which the PFC is fabricated...

Page 19: ...ty Brooks Automation s responsibility for work performed by Brooks authorized technicians or for equipment transported or resold by the owner of record is determined on a case by case basis by Brooks...

Page 20: ...provided by the manufacturer for each substance Ergonomic hazards may exist with certain operations pertaining to the PFC SEMI S2 0200 Electrical Work Types For the purpose of classifying the safety l...

Page 21: ...d Symbols on the Equipment The following safety symbols are affixed to the PFC compressor unit Caution risk of electrical shock Caution refer to accompanying documents On Off Protective conductor grou...

Page 22: ...e PFC This section identifies all the safety labels and their locations on and in the PFC The safety labels are numbered in the PFC photographs Following the photographs are tables that describe the s...

Page 23: ...ion B 21 Safety Labels on the PFC Continued Figure 5 PFC External Safety Labels Right Side Continued on next page 3 5 6 4 7 Information for Numbered Items 3 Table 8 on page 25 4 Table 9 on page 26 5 a...

Page 24: ...ual 22 825160 00 revision B Safety Labels on the PFC Continued Figure 6 PFC External Safety Labels Rear left side label is the same type and location Continued on next page 8 Information for Numbered...

Page 25: ...e 7 PFC External Labels Location Description 1 Main ON OFF switch and lock out tag out location for unit Contact Brooks Automation Polycold Systems for a replacement part number 2 6 and 8 Extreme temp...

Page 26: ...n 3 Line identification and pressurized gas warning P N 407040 01 3 Line identification and pressurized gas warning P N 407040 02 Note This tag is attached to the Feed line of Circuit 2 of dual circui...

Page 27: ...l 2 Safety Safety Labels on the PFC Continued Table 9 PFC External Labels Continued Location Description 4 Warning regarding use of unauthorized refrigerants P N 407192 00 Continued on next page 82516...

Page 28: ...ntinued Table 10 PFC External Labels Continued Location Description 5 This is not a safety label This label identifies the location of the accessory components 7 Evacuation valve opening instruction P...

Page 29: ...evision B 27 Safety Labels on the PFC Continued Figure 7 PFC 672 Internal Safety Labels Front Continued on next page 2 2 PRIMARY REFRIGERANT EXPANSION TANK 407020 rev 01 7996355 20 1 Information for n...

Page 30: ...Labels on the PFC Continued Figure 8 PFC 672 Internal Safety Labels Rear Continued on next page 3 This label hangs from a copper tube Close up view of interior of lower shelf 2 4 Information for numb...

Page 31: ...Operation Manual 2 Safety 825160 00 revision B 29 Safety Labels on the PFC Continued Figure 9 PFC 672 Internal Labels Left Side Continued next page 5 Information for numbered items 5 Table 12 on page...

Page 32: ...ontinued Figure 10 PFC 1102 Internal Safety Labels Front Information for numbered items PRIMARY REFRIGERANT 1 and 2 Table 11 on page 37 1 EXPANSION TANK 6 and 7 Table 13 on page 39 407020 rev 01 79963...

Page 33: ...ual 2 Safety 825160 00 revision B 31 Safety Labels on the PFC Continued Figure 11 PFC 1102 Internal Safety Labels Rear Continued next page 3 4 Information for numbered items 3 Table 11 on page 37 4 Ta...

Page 34: ...PFC Operation Manual 32 825160 00 revision B Safety Labels on the PFC Continued Figure 12 PFC 1102 Internal Safety Labels Left Side Continued next page 5 Information for numbered items 5 Table 12 on...

Page 35: ...primary refrigerant expansion tank P N 407020 rev 01 7996355 20 2 Instruction to cap the valve in order to prevent leaks P N 073024 01 3 Warning that the designated valve is under pressure when the s...

Page 36: ...fety Labels on the PFC Continued Table 12 PFC Internal Safety Labels Continued Location Description 4 Warning to leave the designated valve open P N 073017 01 5 Refrigerant and oil warning Continued n...

Page 37: ...ration Manual 2 Safety 825160 00 revision B 35 Safety Labels on the PFC Continued Table 13 PFC Internal Safety Labels Continued Location Description 6 Compressor oil notice P N 407119 00 7 Electrical...

Page 38: ...e provides a means to reduce high pressures in a manner that does not result in an explosion Compressor overload switch Detects when the temperature or current of the PFC compressor unit exceeds a saf...

Page 39: ...K All electrical supply installed by qualified personnel Use two wrenches when conne a bulkhead coupling Gas pressu to cause injury page GAS PRESSURE HAZARD Do not heat pressurized gas lines or other...

Page 40: ...epeated bending and repositioning PREVENT INJURY The PFC compressor unit weighs between 374 kg 825 lbs and 544 kg 1200 lbs depending on model Failure to take the proper precautions before moving it co...

Page 41: ...to a sharp bend near the connection MAINTAIN AMBIENT TEMPERATURE Operating outside the specifications ca equipment PRESERVE YOUR WARRANTY Modification to equipment without the consent of the manufactu...

Page 42: ...rovide the PFC with the Maximum power consumption for the PFC can be 800 Watts Turn off power Improper electrical connection or connection to an electrical supply can re electrical shock or bur proper...

Page 43: ...Fuse Protection Location Reference Designation Protection Provided Rated Voltage and Amperage CB1 Over current 460 VAC 1 A CB2 Over current 460 VAC 1 A H e B CB3 Over current 24 VAC 5A igh Voltag ox C...

Page 44: ...h nergize ible Potential exposures are 60 vo or 240 volt cations ment Energized cir exposed and ertent un insulated e greater than 30 volts RMS 42 4 volts peak d parts is poss lts DC amps in dry lo If...

Page 45: ...w the procedures for LOTO i n power switc ed to be used as a LOTO power switch see Figure 13 When this switch is in the OFF position the top of the switch can be swiveled vealing the ho Fig Continued...

Page 46: ...el The SAME person shall remove e lock and tag once the work has been completed One key is to be provided for each lock nd must be kept by the person doing the work The tag and its attachment shall be...

Page 47: ...are intact and capable of operating properly ea around the equipment to ensure that all employees have been sa removed gs should only be removed by those employees who attached them Notify Gas Hazards...

Page 48: ...injury or death It valve or atmospheric door may result in severe damage to y event that the c evelops a refrigerant leak while under vacuum the acuum chamber should have a pressure relief valve to av...

Page 49: ...es present the possibility of fire or explosion Cleaning fluids may leave a flammable residue If they are being used during servicing of the PFC the proper precautions for use of those fluids must be...

Page 50: ...gout procedure before using any cleaning solutions to prevent the risk of electrical shock When a chemical is used while servicing the PFC the standard precautions for use of that chemical must be obs...

Page 51: ...le 18 Emergency Actions for the Polycold PFC Emergency Electric Shock Disconnect from power source Fire Use a non conductive fire extinguisher Class C Emergency Contact Information Main Office Technic...

Page 52: ...te at http www brooks com pages 2135_polycold_material_safety_data cfm H identifies the materials that are contained or shipped with the PFC Read and understand the Material Safety Data Sheet MSDS for...

Page 53: ...tors on PFC Continued next page Compressor pressure gauges Temperature re selector display Temperatu LOW PRESSURE LED HIGH PRESSURE LED HIGH DISCHARGE TEMPERATURE LED HIGH LIQUID TEMPERATURE LED Unit...

Page 54: ...accord High Discharge Temper and unit operation is determined by two thermal emperature of the compressor discharge 275 F this switch starts a 40 minute timer If the t ure above this setpoint after 40...

Page 55: ...uns continuously when the refrigeration unit is on 24 Vdc ON OFF Applies 24 Vac to the System Control board for conversion to Vdc which is used by 24 the control system High Voltage Box Lamp h This is...

Page 56: ...nated so as to maintain your process requirements If the second circuit is a baffle for a diffusion pump this is normally not a problem However when both circuits cool cryocoils you must evaluate the...

Page 57: ...le the other cryosurface is defrosted This is because refrigerant from both cryosurfaces is combined in the common r line Contact the Polycold service department for an evaluation if this warm up will...

Page 58: ...Step Action Starting and cooling the system 1 itch the unit to STANDBY via the unit s control panel see Figure 15 or remote control cuit Control Sw Figure 15 Cir 2 Turn ON the main power switch on the...

Page 59: ...be operated in initely in STANDBY ote 2 If the unit is off for m it ma to Standby to ling age 61 def N N ore than 12 hours attain complete precoo in 5 nce the unit has cooled to the desired temperatur...

Page 60: ...ain in STANDBY for at least 5 minutes before selecting COOL Note To shorten the DEFROST cycle terminate DEFROST early by putting the unit in STANDBY CAUTION ulating in an undesirable location GENERAL...

Page 61: ...ure 14 e 51 3 If the 24 Vdc ON OFF switch is turned OFF switch it ON 4 Wh refrigerant at a set low tempera COOL mode Note If the unit is off for more than 12 hours it may take up to 60 minutes after g...

Page 62: ...sted to regen ore depending upon the am d the vacuum level r ffle Complete defrosti 8 Switch off the high vacuum pump 9 witch the refrigeration unit OFF or switch it to STANDBY S CAUTION GENERAL HAZ S...

Page 63: ...PFC Operation Manual 4 Appendix 825160 00 revision B 61 4 Appendix Cryos Continued next page urface Temperature Versus Water Vapor Partial Pressure...

Page 64: ...3 Operation PFC Operation Manual 62 825160 00 revision B Cryosurface Temperature Versus Water Vapor Partial Pressure Continued...

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