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BOC Edwards Seiko Seiki STP-1003 Series Instruction Manual Download Page 42

STP-603/1003 Series Instruction Manual 

Installation

 

 

◇ 

The proper amount of the gas purge is approx. 1.7

×

10 

-2

 Pa·m

3

/sec 

(10SCCM). 

◇ 

The allowable gas pressure ranges from zero [atmospheric 
pressure] to 4.9

×

10

4

Pa [gauge pressure] (zero [atmospheric 

pressure] to 0.5 kgf/cm

2

 [gauge pressure]). 

◇ 

High-pressure at the inlet port may result in a noise.    This is no 
abnormality/error. 

 

5-2

Summary of Contents for Seiko Seiki STP-1003 Series

Page 1: ...al Crawley West Sussex RH10 2LW UK Telephone 44 0 1293 528844 Fax 44 0 1293 533453 http www bocedwards com Instruction Manual Seiko Seiki STP603 1003 P039 Turbomolecular Pump System Document number MT...

Page 2: ...All rights reserved Printed in Japan STP 603 1003 Series Turbomolecular Pump INSTRUCTION MANUAL First Edition d Read through the Safety Precautions and each section of this Manual carefully before us...

Page 3: ...MBOLS The following symbols are used in this manual Death or Serious Personal Injury Failure to follow the guidelines marked with this symbol may result in death or serious personal injury Minor Perso...

Page 4: ...losive combustible toxic corrosive etc And keep MSDS and a safety advice of gas supplier Warn of the danger of the gas with the warning label when the use gas is hazardous chemical materials Always ex...

Page 5: ...ance such as replacement of fuses Perform inspections such as deposit and or the air cooling fan or Perform investigations into probable causes and action measures taken in the event of occurrence of...

Page 6: ...ifferent serial numbers an error message is indicated when they are used without tuning And the tuning is necessary when the length of the STP connection cable is changed They may not function normall...

Page 7: ...result in product damage Perform investigations into probable causes and remove them before restarting the STP pump in the event of the occurrence of a problem The use of the abnormal STP pump may res...

Page 8: ...eries of the STP 603 1003 turbomolecular pump Model Name Specification STP 603 High throughput type STP 1003 High throughput type STP 603C High throughput type chemical specific STP 1003C High through...

Page 9: ...al Requirements PRECAUTIONS 1 No part of this manual may be reproduced in any form by any means without prior written permission from BOC Edwards 2 BOC Edwards pursues a policy of continuing improveme...

Page 10: ...e warranty period 1 Handling operation or maintenance other than that specified herein 2 Failure to follow any of the warnings or cautions enumerated under or 3 Installation operation or maintenance u...

Page 11: ...the use of the product beyond limits of the use 14 Any direct incidental or consequential damage resulting from the use of the product 15 When continuously operated without overhaul after the WARNING...

Page 12: ...STP Pump Installation Positions 4 8 4 3 3 How to Secure the STP Pump 4 9 4 3 4 Vacuum Piping 4 13 4 3 5 Connecting the Purge Port 4 15 5 Gas Pumping Cooling and Baking the STP Pump 5 1 5 1 Gas Pumpin...

Page 13: ...r Set Mode 9 6 10 Safety Functions 10 1 10 1 Power Failure 10 1 10 2 Abnormal State of Magnetic Bearing 10 3 10 3 Excessive Vibration 10 3 10 4 Motor Driver Overload 10 3 10 5 Overheating Inside the S...

Page 14: ...Pump 12 1 12 2 Storage of the STP Control Unit 12 1 12 3 Disposal 12 2 13 Specifications 13 1 13 1 Specifications for the STP Pump 13 1 13 2 Specifications for the STP Control Unit 13 5 UNIT CONVERSI...

Page 15: ...tput Signal Pins 8 4 Table 8 3 Rated Contacts for Relays CR1 to CR8 8 7 Table 9 1 Data List 9 2 Table 10 1 States of Lamps and REMOTE Output Signals at a Power Failure 10 2 Table 10 2 Operations of th...

Page 16: ...of the Cooling Unit and Baking Heater 5 6 Figure 6 1 STP Control Unit Front Panel 6 3 Figure 6 2 STP Control Unit Rear Panel 6 4 Figure 6 3 Peripheral Space of the STP Control Unit 6 6 Figure 6 4 Exa...

Page 17: ...S you obtain from the gas supplier And keep MSDS and a safety advice of gas supplier CAUTION NEVER use corrosive gases chlorine fluorine or other system gases in the STP 603 STP 1003 pump or other mod...

Page 18: ...trol Unit Caution Label This label describes precautions for operating the STP control unit Follow these precautions No Adjust levitation according to instruction manual if pump and control unit have...

Page 19: ...ng to the precautions of Section 4 Installation of the STP Pump 5 STP Control Unit Safety Instruction Label This label describes instructions before operating the STP control unit 6 Connector Caution...

Page 20: ...warns operators to pay attention to the high voltage device 8 Rotational Direction Instruction Label This label describes the rotational direction of the STP pump The STP pump rotates in this directi...

Page 21: ...s label instructs operators so as not to touch the hot surface of the STP pump The use of the baking heater optional accessory may lead to a considerable rise in temperatures outside the STP pump This...

Page 22: ...l direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor 3 and radial electromagnet 4 A pair of axial direction active magnetic bearings consists of axial sens...

Page 23: ...anual Installation 7 Touch down bearing 7 Touch down bearing 6 Axial electromagnet 5 Axial sensor 3 Radial sensor 4 Radial electromagnet 3 Radial sensor 2 Stator blade 1 Rotor blade Figure 2 1 Cross S...

Page 24: ...ched to the inlet port flange Lift it with the aid of a suspension tool under the base when installing the STP pump without fitting hole Observe national laws regulations safety standards and so on wh...

Page 25: ...cover 1 Outlet port cover 1 STP connector cover 1 Blank flange for purge port 1 KF10 attached only to the chemical specific pumps Clamping ring for purge port 1 KF10 attached only to the chemical spec...

Page 26: ...the backing pump 3 STP Connector 60 pins Connected to the STP connection cable 4 Purge Port KF 1 10 Chemical specific pump Introduces a purge gas This port is attached only to the chemical specific pu...

Page 27: ...ruction Manual Installation 5 Cooling water port 3 STP connector 4 Purge port 2 Outlet port flange 1 Inlet port flange for water cooled Attached only to the chemical specific pump Figure 4 1 Configura...

Page 28: ...is used in an area with radiation contact BOC Edwards Install the STP pump in a place meeting the following requirements Ambient Temperature 0 to 40 C Ambient Relative Humidity 30 to 95 no dew conden...

Page 29: ...ssively The L type STP connection cable is also offered Contact BOC Edwards if necessary 4 2 3 Bench A bench must be prepared by the customer to secure the STP pump The shape and size of the bench dif...

Page 30: ...th the customer application NEVER move them while the STP pump is in operation Confirm the dimensions by the external appearance of the STP pump when designing the bench The bolt may not be able to be...

Page 31: ...ort Flange Vacuum Valve Dry Pump and other Outlet Port STP Connection Cable Power Cable To Power Supply STP Control Unit Remote Cable To Vacuum Equipment Control Circuit Front Panel Vacuum Equipment I...

Page 32: ...nt alcohol Dispose of the contaminated wipes appropriately according to the regulations of each national and or local government The splinter shield cannot perfectly prevent foreign materials from fal...

Page 33: ...n installing the STP pump in a horizontal or slanted position it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the grav...

Page 34: ...nge Refer to 2 When securing the inlet port flange with claw clamps Refer to 1 When securing the inlet port with bolts Secure the inlet port with Claw Clamps with bolts No Yes Damper In some cases the...

Page 35: ...olt Standard Standard Standard Standard Standard Standard Type of steel 1 Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel Recommended securing bolt for...

Page 36: ...screw holes for legs or all 8 attached legs Follow CAUTION on page 4 9 about legs and bolts for securing the base For the claw clamp type use the required number of claw clamps as specified in Table...

Page 37: ...he base When the base cannot be secured because of the equipment design install the pump with a torque restraint like the one shown in Figure 4 7 b Installation stallation Use a damper only at the ver...

Page 38: ...s possible to keep the gas loss as low as possible 4 It is recommended to use a backing pump of pumping speed 1300 L min or more However the pressure at the inlet and outlet ports varies with the flow...

Page 39: ...the STP pump outlet port flange and the backing pump Attach an absorption trap adjacent to the vacuum valve Attach an absorption trap adjacent to the vacuum valve Piping at the Inlet Port Flange Pipin...

Page 40: ...As shown in Figure 4 8 introduce a dry N2 gas through the electromagnetic vent valve needle valve or similar valve must be prepared by the customer from the purge port For instructions on how to intr...

Page 41: ...n be used with these models When you use gases including alkaline metals but excluding Li gases including Ga Hg In or Sn or HBr contact BOC Edwards NEVER use corrosive gases chlorine fluorine or other...

Page 42: ...purge is approx 1 7 10 2 Pa m3 sec 10SCCM The allowable gas pressure ranges from zero atmospheric pressure to 4 9 104 Pa gauge pressure zero atmospheric pressure to 0 5 kgf cm2 gauge pressure High pr...

Page 43: ...le Cooling water containing foreign materials may corrode or clog the cooling water pipe When the cooling system is clogged with foreign materials clogs may possibly be removed by feeding cooling wate...

Page 44: ...ews at screw holes for cooling unit 4 M8 1 depth 20mm For the positions of screw hole for cooling unit see Figure 13 1 and 13 2 External Appearance of the STP Pump Check the rated voltage of the air c...

Page 45: ...the STP pump run the STP pump during baking 5 3 1 Attaching a Baking Heater 1 Install the backing heater special accessory near the inlet port flange in the perimeter of the envelope 2 Affix the hot...

Page 46: ...STP 603 1003 Series Instruction Manual Installation Baking heater Figure 5 1 Attaching Positions of the Cooling Unit and Baking Heater 5 6...

Page 47: ...LECT Switch flat panel switch gray LCD display Confirmation mode change function valid in both MANUAL and REMOTE operations Setting mode change function valid in both MANUAL and REMOTE operations Pres...

Page 48: ...N state 12 BRAKE Lamp green LED Lights during deceleration BRAKE state 13 POWER Lamp green LED Lights while the power is ON Goes out while the backup power is being supplied 14 FAILURE Lamp red LED Li...

Page 49: ...nstruction Manual Installation STP CONTROL UNIT ON RESET UP SELECT DOWN ENTER START STOP ACCEL BRAKE POWER TEMP CTRL NORMAL FAILURE REMOTE 1 2 3 4 5 6 7 8 9 10 12 13 14 15 11 16 Figure 6 1 STP Control...

Page 50: ...r input 18 MAIN POWER Breaker Switches ON OFF the primary power 19 P CONNECTOR Connector X1 A maximum voltage 79VAC For connection of the STP connection cable 20 REMOTE Connector X7 A maximum voltage...

Page 51: ...s A place free of radiation A place free of strong magnetic and electric fields A place free of excessive vibration A place free of a source of electric noise Installation Condition Install the STP co...

Page 52: ...bber feet Space for connecting the cables Rear 11 5 cm or more The minimum bending radius of the STP connection cable is 100 mm See Figure13 4 External Appearance of the STP Control Unit Cable Space D...

Page 53: ...ck to protect the STP control unit during transport remove the rubber foot from the bottom and attach the STP control unit to the rack using the screw holes for the rubber foot The STP control unit ca...

Page 54: ...4 100 105 97 STP Pump Side STP Control Unit Side 20 6 60 Pin L Type Connector STP Connection Cable Pin 60 Pin Socket Blue label see NOTICE Figure 6 5 External Dimensions of Each Cable There are two ty...

Page 55: ...E L L1 Crimp Type Terminal Lug Power Cable 8 1 54 36 51 25 3 Pin Socket M4 1 a without power plug 1 STP Control Unit Side Power Side Primary 1 5mm2 3 cores 8 1 Brown Blue Yellow Green or 8 8 Black1 Bl...

Page 56: ...lfunction Lock and securely tighten each connector and screw DO NOT apply voltage to each pin and DO NOT cause any short circuiting between pins Connect each cable securely DO NOT place heavy objects...

Page 57: ...or 200 V specification Single phase 100 to 120 V AC 10 for 100 V specification Both 50 60 Hz PE Yellow Green Ground Rear Panel AC POWER Outline of Connector L PE N Confirm the power voltage on the nam...

Page 58: ...ting capacity AIC 6 5 2 Emergency Off Circuit EMO Circuit Activation of EMO circuit of the equipment will interrupt electrical power from the STP control unit When the power is shut off the STP pump p...

Page 59: ...wiring of cables the STP pump is ready for start Check the following items before starting 1 Are the STP pump and the STP control unit secured according to the appropriate method 2 Is the power cable...

Page 60: ...perations are frequently performed the STP pump may overheat Avoid doing so 7 3 Stop Procedures Close the vacuum valve located at the outlet port flange side just before or after stopping the STP pump...

Page 61: ...ER ON state The POWER lamp lights 2 The STP control unit executes the self test If no error is found the LCD displays LEVITATION In case of the STP pump with the TMS unit optional accessory the TEMP C...

Page 62: ...mps of ACCEL NORMAL and BRAKE are off The magnetic bearing stops the rotor lands and the POWER lamp goes out POWER OFF state In case of the STP pump with the TMS unit optional accessory the TEMP CTRL...

Page 63: ...executes the self test If no error is found the LCD displays LEVITATION In case of the STP pump with the TMS unit optional accessory the TEMP CTRL lamp also lights and the TMS unit starts 7 5 2 Start...

Page 64: ...ssory the TEMP CTRL lamp also goes out and the TMS unit stops 7 5 5 Starting the STP Pump after a Safety Function Operates A safety function operates when an abnormality error occurs in the STP pump o...

Page 65: ...nit Version Execute Self Test Levitation State Breaker ON Acceleration State Normal Operation State Brake State Self test completed upper only Self test in progress upper only Stop Operation of the ST...

Page 66: ...connector is M2 6 2 19 37 1 20 Operation REMOTE X7 Pin Arrangement Procure the connector for remote connection at your company 8 1 Input Signal Pins Use input signal pins according to Table 8 1 and Fi...

Page 67: ...used to start the STP pump open the circuits between 1 3 to stop the pump 1 22 COM RESET IN Pins for inputting the abnormality RESET signal Short the circuits between 1 22 for 0 3 seconds or more to t...

Page 68: ...gnal START STOP RESET INHIBIT 2 In case of Start 2 1 In case of Start 1 Figure 8 1 REMOTE X7 Input Signal Pins 1 pin 0V is insulated from the frame ground The input current of remote input signal is a...

Page 69: ...ON state signal These pins are closed when the magnetic bearing functions and the rotor levitates This output is cut OFF at a power failure 10 29 ACCELERATION N O OUT Pins for outputting the ACCELERAT...

Page 70: ...erature of the TMS unit is within the setting temperature range 10 C the pins between 17 16 are closed and the pins between 17 35 are opened If the TMS unit function is not valid the pins do not funct...

Page 71: ...ERATION state signal output pins 12 13 32 33 15 14 REMOTE ACCELERTION NORMAL COM N C OUT NORMAL OPERATION state signal output pins BRAKE NO OUT ALARM COM N O OUT N O OUT N C OUT 16 17 35 26 AT TEMP CO...

Page 72: ...relays CR1 to 8 in Figure 8 2 Table 8 3 Rated Contacts for Relays CR1 to CR8 Resistance Load COS 1 Rated Load 125V AC 0 5A 24V DC 1A Rated Current 2A Maximum Contact Point Current 1A Maximum Open Clo...

Page 73: ...ch cable 2 Switch ON the breaker on the rear panel 3 After the STP pump completes the self test and enters the levitation state or the error message CAUTION Bad EEPROM content is displayed set MANUAL...

Page 74: ...STP pump and STP control unit When tuning after changing the configuration the STP pump serial number the STP control unit serial number the STP pump data overrides the STP control unit data except c...

Page 75: ...eaker ON CAUTION Bad EEPROM content Levitation Autotest Complete Software Version VER Tuning Tuning Complete Levitation State Press the RESET switch for about 5 sec Tuning Tuning Complete etc a status...

Page 76: ...Operation The emergency vent valve is not used with this series of STP pump The TMS unit is not used with this series of STP pump Confirmation Method See Figure 9 2 1 Press the SELECT switch to enter...

Page 77: ...ed speed Remote mode Emergency vent valve Inhibit function TMS Function Total hours of running pump Total hours of acceleration normal operation and deceleration Total hours of running control unit To...

Page 78: ...rough 7 above are displayed in order 2 Press the UP switch to display the next parameter and the DOWN switch to display the previous one 3 Press the ENTER switch to set the parameter to the new settin...

Page 79: ...ELECT NORM rpm UP 500rpm DOWN 500rpm Allowable range 1 2 rated speed to rated speed Speed Set Point xxxx rpm Speed Set Point xxxx rpm Inhibit Command DISABLE Inhibit Command ENABLE TMS Function DISABL...

Page 80: ...dbus and LONWORKS only They are not displayed in I O Remote Mode UP DOWN Remote Mode Detail Settings To STORAGE Menu Press SELECT to go to next menu or ENTER to set to new parameter Press SELECT to go...

Page 81: ...the alarm signal output is reset ii The STP control unit does not detect a power failure of less than approx 2 seconds continuing rotating the STP pump 2 When the rotational speed is less than approx...

Page 82: ...essage POWER lamp FAILURE lamp Power ON signal ALARM signal 8 500 or more Mains Failure OFF ON OFF ON Less than 8 500 OFF OFF OFF OFF OFF Troubleshooting Troubleshooting Table 10 2 Operations of the S...

Page 83: ...uch the touch down bearing due to external vibration impact intrusion of atmosphere or foreign materials into the STP pump or rotor imbalance the STP pump decelerates and stops The FAILURE lamp lights...

Page 84: ...s not stop If the STP control unit overheats further the STP pump decelerates and stops The FAILURE lamp lights and the LCD displays error message CNT Overheat 10 7 Overspeed When the rotational speed...

Page 85: ...bnormal magnetic bearing Rotor descends onto the touch down bearing FAILURE Disturbance _ ALARM The STP pump stops STP connection cable breakage STP connection cable disconnection Abnormal control cir...

Page 86: ...vacuum equipment or piping Continuous repetition of startup stop Extraordinarily high temperature Possible CAUTION Overheat The STP pump does not stop Overheating inside the STP control unit Temperatu...

Page 87: ...ter and cooling water valve is OFF Abnormal cooling water Heater disconnect Possible Failure of TMS unit TMS heater overheats FAILURE TMS Overheat ALARM The STP pump decelerates and stops Output of he...

Page 88: ...er Failure Establish a sequence so that the power can be supplied to the STP control unit immediately after a power recovery 11 1 2 Troubleshooting Other Abnormality Error Troubleshooting Refer to Sec...

Page 89: ...l display the contents of the next or previous error message The UP or DOWN switch can also be input in Remote Mode Example Press DOWN Switch BRAKE 00rpm Error n 1 3 BRAKE 00rpm Error n 2 3 Press UP S...

Page 90: ...ring turning 2 Use of different version of the software 3 Failure of the STP pump or the STP control unit 1 Perform turning again Reconfigure the initialized settings 2 Perform tuning 3 Contact Servic...

Page 91: ...function information DRIVER com Failure Failure of the STP control unit Contact Service office Malfunction information DSP PCB com fail Failure of the STP control unit Contact Service office Malfuncti...

Page 92: ...STP pump 3 Check the piping system for leakage 4 Repetitious start stop operations may cause the STP pump to overheat 5 3 5 2 4 3 4 7 3 M_TEMP SENSOR LOST Failure of the STP pump Contact Service offic...

Page 93: ...on cable Connect the cable correctly If the cable is not locked lock it securely 6 4 2 Failure of the TMS connection cable Contact Service office Malfunction information Disconnection of the TMS senso...

Page 94: ...e detection temperature of the TMS unit becomes 10 C or less such error cannot be detected within 1 hour after startup 1 Failure of the TMS heater 2 Failure of the TMS unit 1 Contact Service office 2...

Page 95: ...1 Contact Service office 2 Contact Service office Malfunction information Malfunction information Tuning Error 1 Tuning Error 2 Tuning Error 3 Tuning Error 4 Tuning Error 5 Tuning errors No LEVITATION...

Page 96: ...curred 10 1 11 3 2 Abnormalities When Performing the STP Pump Start Operation When the FAILURE lamp lights and the LCD displays an error message see Section 11 2 When Error Message is Displayed on LCD...

Page 97: ...If gases remain inside the STP pump contact Service office when it is needed to be cleaned 5 3 11 6 3 2 The STP pump stops ROTATION INHIBIT signal input pins REMOTE X7 1 5 are opened When not using t...

Page 98: ...WARNING message cannot be reset by the RESET switch Service office is in charge of resetting the WARNING message The STP pump can operate even when the WARNING message is displayed It is recommended...

Page 99: ...he error record push the SELECT switch follow the instructions for entering Confirmation Mode in Section 9 2 The error number of up to the last 10 errors is displayed on the upper line of the LCD in t...

Page 100: ...g maintenance and inspections of the STP pump and STP control unit Failure to do so may result in the inadvertent rotation of the STP pump which may result in an accident Do not touch any place other...

Page 101: ...nterior The decontamination overhaul in the STP pump is executed in Service office When overhaul is needed contact Service office Exterior Wipe with proper solvent such as alcohol When dust has accumu...

Page 102: ...or adhesion of deposit while watching the outlet port flange If deposit has accumulated to some extent an overhaul cleaning is required Contact Service office Note that the costs of troubleshooting pr...

Page 103: ...rocess 2 years Processes resulting in accumulation of deposits in the pump will require more frequent service Clean applications Only vacuum pumping 5 years Other use 2 years Dependent on application...

Page 104: ...e returning the STP pump for repairs overhaul or other purposes To avoid any accident by gases or corrosion inside the STP pump particularly when corrosive reactive or flammable gases have been used i...

Page 105: ...e are corrosive gases Place subjected to dripping water Place with a lot of dust Place with insufficient ventilation Place subjected to strong magnetic or electric fields Place subjected to radiation...

Page 106: ...e the STP pump thoroughly Residual gases may result in an accident when disposing of the STP pump If the STP pump has been used with reactive or corrosive gasses always clean thoroughly before disposi...

Page 107: ...1 Pa Torr 1 3 10 2 1 10 4 Allowable backing pressure 1 Pa Torr 13 0 1 Rated speed rpm 35 000 Starting time min 6 Stopping time min 6 Noise dB 50 at 35 000 rpm Baking temperature C 120 Lubricating oil...

Page 108: ...03 Series STP 1003 Series Unit mm 1 JIS 2 JVIS 1 58 26 28 27 50 15 13 208 245 130 MIN 323 147 5 133 5 1 6 0 2 1 0 2 0 4 5 Outlet port flange KF 1 40 Screw hole for leg M8 Depth 20 4 pcs Viewed from ar...

Page 109: ...7 50 15 13 208 245 130 MIN 323 Outlet port flange KF 40 1 Screw hole for cooling unit M8 Depth 20 4 pcs 1 Screw hole for leg M10 Depth 24 8 pcs 1 STP connector Purge port KF 10 1 Bending dimensions of...

Page 110: ...NO MANUFACTURING DATE WEIGHT kg RATED SPEED rpm MA NUFACTURED B Y BOC Edward s Te chnologies L td Narashino Jap an Manufactured by BOC Edwa rds at the forme r Seiko Seiki plan t in Nar ashi no Japan...

Page 111: ...under rated operation Hz 583 Ambient temperature range C 0 to 40 Storage temperature range C 25 to 55 Mass 1 kg 9 Dimensions mm W210 H132 5 D401 6 TMS control unit Internal Operation switches START s...

Page 112: ...TE X7 37 pins Input output cables Power primary cable STP connection cable TMS connection cable optional accessory Safety functions Magnetic bearing abnormality error detection STP pump overheat detec...

Page 113: ...STP 603 1003 Series Instruction Manual Figure 13 4 External Appearance of the STP Control Unit 13 7...

Page 114: ...CU MANUFACTURING DATE POWER CONSUMPTION POWER SUPPLY 50 60Hz 1 AC WEIGHT kg V VA Manufactured by BOC Edwards at the former Seiko Seiki plant in Narashino Japan MANUFACTURED BY BOC Edwards Tecnologies...

Page 115: ...inch 1 100 1 00x10 3 39 4 0 01 1 10 0 0 394 1x10 3 0 10 1 39 4x10 3 25 4x10 3 2 54 25 4 1 Weight g kg lb 1 1 00x10 3 2 20x10 3 1x10 3 1 2 20 454 0 454 1 Pressure Pa Torr kgf cm 2 1 7 50x10 3 1 02x10...

Page 116: ...facture BOC Edwards Japan Limited 2 4 1 Shibakoen Minato ku Tokyo 105 0011 JAPAN Telephone Domestic 03 5470 6530 International 81 3 5470 6530 Facsimile Domestic 03 5470 6521 International 81 3 5470 65...

Page 117: ...hazardous materials Note Some contaminated equipment may not be suitable for airfreight PROCEDURE 1 Contact BOC Edwards and obtain a Return Authorisation Number for your equipment 2 Complete the Retur...

Page 118: ...roof of decontamination YOU MUST CONTACT BOC EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT Print your name _________________________________Print your job title _________________________ Print y...

Page 119: ...C EDWARDS Ammerthalstra e 36 85551 Kirchheim Munich Tel 49 89 99 19 18 0 Fax 49 89 99 19 18 99 HONG KONG S A R BOC EDWARDS ASIA 12 Chun Yat Street Tseung Kwan O Industrial Estate Tseung Kwan O Kowloon...

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