STP-603/1003 Series Instruction Manual
FIGURES
Figure 2.1
Cross Sectional View of the STP Pump ....................................................................... 2-2
Figure 3.1
Example of Lifting the STP Pump ................................................................................. 3-2
Figure 4.1
Configuration of the STP Pump...................................................................................... 4-2
Figure 4.2
Installation of the STP Pump to the Vacuum Equipment ............................................... 4-6
Figure 4.3
STP Pump Installation Positions .................................................................................... 4-8
Figure 4.4
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump ........... 4-8
Figure 4.5
Example of securing the STP pump (When securing the inlet port with bolts) ............ 4-10
Figure 4.6
Example of securing the STP pump
(When securing the inlet port flange with claw clamps) ............................................... 4-11
Figure 4.7
Example of securing the STP pump
(When installing the damper in the inlet port flange) .................................................... 4-12
Figure 4.8
Connecting the Purge Port ........................................................................................... 4-15
Figure 5.1
Attaching Positions of the Cooling Unit and Baking Heater ........................................... 5-6
Figure 6.1
STP Control Unit Front Panel ......................................................................................... 6-3
Figure 6.2
STP Control Unit Rear Panel.......................................................................................... 6-4
Figure 6.3
Peripheral Space of the STP Control Unit ...................................................................... 6-6
Figure 6.4
Example of Securing the STP Control Unit .................................................................... 6-7
Figure 6.5
External Dimensions of Each Cable ............................................................................... 6-8
Figure 6.6
External Dimensions of Each Cable ............................................................................... 6-9
Figure 7.1
STP Pump Operation Procedures .................................................................................. 7-7
Figure 8.1
REMOTE X7 Input Signal Pins ..................................................................................... 8-3
Figure 8.2
REMOTE X7 Output Signal Pins .................................................................................. 8-6
Figure 9.1
Tuning Procedures ......................................................................................................... 9-3
Figure 9.2
Confirmation Mode Operation Method ........................................................................... 9-5
Figure 9.3
Parameter Setting Method.............................................................................................. 9-7
Figure 9.4
Remote Mode Setting Method........................................................................................ 9-8
Figure 13.1 External Appearance of the STP Pump (STP-603 Series) ......................................... 13-2
Figure 13.2 External Appearance of the STP Pump (STP-1003 Series) ....................................... 13-3
Figure 13.3 Label Affixing Positions for the STP Pump ................................................................. 13-4
Figure 13.4 External Appearance of the STP Control Unit ............................................................ 13-7
Figure 13.5 Label Affixing Positions for the STP Control Unit ....................................................... 13-8
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