STP-603/1003 Series Instruction Manual
5
Gas Pumping, Cooling and Baking the STP Pump
Installation
5.1 Gas
Pumping
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When pumping gases, they may remain in the STP pump. Introduce
a purge gas and then exhaust all gasses.
Residual gases in the STP pump may cause an accident when the
STP pump is removed.
Confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
◇
The STP series models are chemical specific pumps; chlorine or
fluorine system gases can be used with these models. When you
use gases including alkaline metals, but excluding Li, gases
including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards.
◇
NEVER use corrosive gases (chlorine, fluorine, or other system
gases) in the STP-603/STP-1003 pump or other models without
anti-corrosion treatment.
◇
Cool the STP pump to prevent the STP pump from overheating when
pumping gases.
5.1.1
How to Introduce a Purge Gas
◇
When pumping reactive or corrosive gases, introduce a purge gas to
protect the inside of the STP pump. Doing so may result in product
damage.
Connect a needle valve or a similar part to the purge port and introduce a dry N
2
gas or other gas to perform a gas purge (See Section 4.3.5, "Connecting the Purge
Port").
5-1