STP-603/1003 Series Instruction Manual
1
Precautions for Safe Operation of the STP Pump
Installation
1.1 Usable
Gases
Chlorine or fluorine system gases can be used in chemical specific pumps
(STP-603C/1003C or other models). When you use gases including alkaline
metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC
Edwards.
◇
To prevent an accident, confirm the characteristics of gases to be
used, referring to the Material Safety Data Sheet (MSDS) you obtain
from the gas supplier.
And, keep MSDS and a safety advice of gas supplier.
CAUTION
◇
NEVER use corrosive gases (chlorine, fluorine, or other system
gases) in the STP-603/STP-1003 pump or other models without
anti-corrosion treatment.
◇
Introduce a dry N
2
gas (purge gas) to protect the inside of the STP
pump when using reactive or corrosive. The use of reactive or
corrosive gas may result in product damage.
◇
Cool the STP pump to prevent the STP pump from overheating when
pumping gases.
1.2
Maintenance and Inspection Precautions
Perform any maintenance or inspection of the STP pump and the STP control
unit, following Section 11.6, " Maintenance and Inspection."
1-1