BOC Edwards EXT555H, Instruction Manual

Page: 5 / 44

Jun 01 Issue A
EXT555H
PAGE
iii
iii
1 General information 3
2 Vent gas and vent control data 4
3 Purge gas specification 5
4 Cooling water specification 5
5 Technical data 6
6 List of items supplied 9
7 Vent restrictor orifice diameter (with atmospheric
pressure at the inlet)
13
8 Fault finding 22
9 ISX inlet-screen 27
10 Inlet-strainer (EXT555Hi pump only) 28
11 Inlet-flange seals 28
12 EXC controller 28
13 Pump-to-controller cable 30
14 EXDC drive modules 30
15 BX bakeout band 30
16 FL20K foreline trap 31
17 TAV vent-valve and vent-port adaptor 31
18 ACX air-cooler 31
19 WCX water-cooler 32
20 Vibration isolators 32
21 PRX purge-restrictor 32
22 VRX vent-restrictor 33
ASSOCIATED PUBLICATIONS
Publication Title Publication Number
EXC120/120E/300/300M Turbomolecular Pump Controllers D396-14-880G
EXC250E/250L Turbomolecular Pump Controllers D396-36-880A
EXDC Turbomolecular Pump Drive Modules D396-40-880E
TABLES
Table Title Page