BOC Edwards EXT555H Instruction Manual Download Page 21

Jun 01

Issue A

EXT555H

IN
STALL

A

TION

PAGE

15

15

If you use the TAV5 or TAV6 vent valve you can

control it using an EXC controller or by other

methods. Table 7 gives an indication of the

appropriate size of orifice to be fitted to the vent

valve for given vacuum system volumes in order that

the vent rate is kept within the limits given in

Figure 3.

Refer to Section 2 for information on vent gas

specification.

3.5

Purge gas connection

3.5.1

Connect the purge gas

If you want to supply a purge gas to the pump, fit a

vent port adapter (see Section 7) in place of the

blank plug (item 6, Figure 4). Connect your gas

supply to the purge port. Your purge gas must

comply with the specification given in Section 2. 

You must limit the purge gas flow rate to the

allowed range, also specified in Section 2. To limit

the flow rate use a flow controller or a pressure

regulator and calibrated flow restrictor. The PRX10

purge restrictor accessory (see Section 7) is suitable

for this purpose. Adjust the PRX10 as described in

the instruction manual supplied with the accessory.

3.5.2

Recommended purge gas flow

The recommended purge gas flow for typical

applications is 25 sccm (0.42 mbar l s

-1

, 42 Pa l s

-1

).

This flow will protect the pump when you pump

oxygen in concentrations above 20% by volume.

3.6

Electrical installation

Note:

You must electrically bond the EXT555H

pump to earth (ground) using the earth

(ground) screw provided on the pump (item 5,

Figure 4)  to  ensure  that  the  pump  complies

with EN61010.

Always make the electrical connections to the pump

after the pump has been installed on the vacuum

system. 

The EXC controller provides the electrical supply to

the EXT555H pump through the pump-to-

controller cable. Connect and lock the bayonet

connectors at the ends of the cable to the mating

connectors on the pump and the EXC controller (if

applicable). If the cable is disconnected at either end

while the pump is operating, the EXC controller

output is switched off, which makes the cable safe. 

The EXC controller is designed to allow a pumping

system to be configured in a variety of ways, from a

basic manually operated system to a fully automatic

system with remote control. Refer to the

instruction manual supplied with the controller to

complete the electrical installation.

3.7

Cooling

3.7.1

Introduction

You must use water cooling in any of the following

operating conditions:

• When backing pressure is high (see Table 5).

• When you bake the EXT pump or the vacuum

system close to the pump.

• When the ambient temperature is above

35 °C.

• When there is high continuous gas

throughput (see Table 5).

In all other operating conditions, you can use forced

air cooling. If you use forced air cooling you must

ensure that there is an adequate supply of cooling air

to the pump.

CAUTION

You must cool the pump by forced-air or water 

cooling to prevent damage to the bearing.

Summary of Contents for EXT555H

Page 1: ...NRA 266 880 Issue A Original 98 37 EC 89 336 EEC 73 023 EEC Instruction Manual EXT555H...

Page 2: ......

Page 3: ...3 2 Inlet connection 11 3 3 3 Backing connection 11 3 3 4 Interstage connection Hi pump variants only 13 3 4 Vent options vent valve connection and control 13 3 5 Purge gas connection 15 3 5 1 Connect...

Page 4: ...and conflat only 30 7 4 6 FL20K foreline trap 31 7 4 7 TAV vent valve and vent port adaptor 31 7 4 8 ACX air cooler 31 7 4 9 WCX water cooler 32 7 4 10 Vibration isolators 32 7 4 11 PRX purge restrict...

Page 5: ...flange seals 28 12 EXC controller 28 13 Pump to controller cable 30 14 EXDC drive modules 30 15 BX bakeout band 30 16 FL20K foreline trap 31 17 TAV vent valve and vent port adaptor 31 18 ACX air coole...

Page 6: ...Issue A Jun 01 EXT555H PAGE iv iv This page intentionally blank...

Page 7: ...ase obey these instructions The use of warnings and cautions is defined below In accordance with the recommendations of EN61010 the following warning symbols may appear on the pump or its accessories...

Page 8: ...Issue A Jun 01 EXT555H PAGE 2 2 This page intentionally blank...

Page 9: ...NING Vent dangerous gases and gas mixtures safely Do not expose people to these gases WARNING Do not use EXT555H pumps to pump explosive gas mixtures as the pumps are not suitable for this purpose WAR...

Page 10: ...do not contact your supplier you may invalidate the warranty on the pump The pumps are not suitable for pumping aggressive or corrosive gases 2 2 2 Pumps with gas purge When purged with an inert gas...

Page 11: ...ification 2 5 Water cooling The following water cooling specification corresponds to a typical high quality drinking water specification Check with your water supply authority if you are in doubt abou...

Page 12: ...EXT555H Notes Mass EXT555H ISO160 13 4 kg Mass EXT555H DN160CF 21 2 kg Main inlet flange DN160ISO K DN160CF Outlet flange DN25NW Interstage port Hi variants DN25NW Vent port 1 8 inch BSP Purge port 1...

Page 13: ...ater cooling at 15 C 3 x 10 4 mbar Water cooling while pumping high concentrations of argon is not recommended Maximum continuous backing pressure light gas pumping Forced air cooled 30 C ambient 12 m...

Page 14: ...se level at 1 metre 60 dBA Recommended controllers EXC250 EXC300 EXDC160 Quiescent power consumption 35 W Pumping speeds are without inlet screen or inlet strainer EXT555Hi Inlet screens and inlet str...

Page 15: ...all packing materials for use should you return the pump for service WARNING The EXT555H DN160CF pump variant weighs 21 kg Take care when handling the pump and ensure that you grip it firmly by the in...

Page 16: ...vent valve 2 Vacuum system 3 High vacuum gauge 4 Inlet screen 5 EXT pump 6 Backing valve 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap 10 Rotary backing pump 11 Mist filter 12 Cooling water connec...

Page 17: ...e and further damage to equipment If the inlet flange of the EXT555H is not connected to a rigid firmly fixed vacuum system ensure that the base of the pump is fixed to a firm support Remove the four...

Page 18: ...Issue A Jun 01 PAGE 12 EXT555H INSTALLATION 12 Figure 2 Diagram of inlet screen remove screws A in order to remove the inlet screen Do not remove screws B...

Page 19: ...when the rotational speed of the EXT555H pump has fallen to 50 of full rotational speed If you use a TAV vent valve or other solenoid vent valve you should only use the vent valve to vent the pump fr...

Page 20: ...Issue A Jun 01 PAGE 14 EXT555H INSTALLATION 14 Figure 3 Maximum rate of pressure rise when venting...

Page 21: ...lectrically bond the EXT555H pump to earth ground using the earth ground screw provided on the pump item 5 Figure 4 to ensure that the pump complies with EN61010 Always make the electrical connections...

Page 22: ...1 PAGE 16 EXT555H INSTALLATION 16 Figure 4 Dimensions and features of EXT555H pumps 1 Backing port NW25 2 Interstage port Hi variants NW25 3 Electrical supply connector 4 Vent valve 5 Earth bond point...

Page 23: ...ransfer paste between the water cooling accessory and the turbo pump body CAUTION Where possible if you need to pump argon you should avoid water cooling the pump in order to avoid excessive thermal g...

Page 24: ...Issue A Jun 01 EXT555H PAGE 18 18 This page intentionally blank...

Page 25: ...This can be used to allow system pressure to increase where this suits a particular process However you should not run the pump in this mode for long periods of time as the pump is not designed to be...

Page 26: ...s so that the pump will reach ultimate vacuum in the shortest possible time If you heat the pump this will also prevent condensation of vapours inside the pump You can use the Edwards BX bakeout band...

Page 27: ...g procedures 5 3 Clean the pump If the EXT555H pump is contaminated inside it may not be possible to achieve the specified ultimate vacuum or pump down time may increase The pump should be returned to...

Page 28: ...rrectly made refer to the instruction manual supplied with the EXC Controller Check that the pump to controller lead is connected If all the above checks are OK then consult BOC Edwards or your suppli...

Page 29: ...he cooling to the pump or decrease the gas load Does the rotor rotate freely If not the EXT pump bearings are damaged Consult Edwards or your supplier The EXC Controller trips into Fail all the speed...

Page 30: ...the same as the resonant frequency of the attached system If so change the natural frequency of your system or isolate the pump using flexible bellows Is the vibration being transmitted from the rota...

Page 31: ...ed in Section 3 4 Avoid long term storage if possible When long term storage is necessary the pump should be set up and run for at least eight hours every six months 6 2 Disposal Dispose of the EXT555...

Page 32: ...Issue A Jun 01 EXT555H PAGE 26 26 This page intentionally blank...

Page 33: ...e exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide BOC Ed...

Page 34: ...ange seals 7 3 3 Inlet flange seals EXT pumps are supplied with an inlet seal The Item Numbers of replacement seals are given below 7 4 Accessories 7 4 1 Installation The accessories available for use...

Page 35: ...Inlet flange seal supplied 4 Inlet screen fitted 5 EXT555H pump 6 TAV solenoid vent valve 7 DN10NW adaptor 8 Manual vent valve fitted 9 VRX vent restrictor 10 Vent port supplied with manual vent valve...

Page 36: ...le 7 4 4 EXDC drive modules Fit an EXDC Drive Module as an alternative to an EXC Controller and pump to controller cable Drive module Item Number EXDC160 D396 41 000 Table 14 EXDC drive modules 7 4 5...

Page 37: ...fitted in place of the manual valve or alternatively can be fitted with an adaptor supplied with the valve and be used with any suitable NW10 flanged port on your vacuum system The vent port adaptor a...

Page 38: ...size Inlet flange size Item Number DN160ISO K B581 25 000 DN160CF K B581 10 000 Table 20 Vibration isolators 7 4 11 PRX purge restrictor A modified DN10NW centring ring is available to filter the pur...

Page 39: ...or to restrict the flow of vent gas into the EXT pump Refer to Section 3 4 for information on the selection of the correct VRX vent restrictor Vent restrictor Orifice diameter mm Item Number VRX10 0 1...

Page 40: ...Issue A Jun 01 EXT555H PAGE 34 34 This page intentionally blank...

Page 41: ...y and then complete the Declaration HS2 3 Remove all traces of dangerous gases pass an inert gas through the equipment and any accessories which will be returned to your supplier Drain all fluids and...

Page 42: ...equipment that is contaminated with radioactive substances unless you Decontaminate the equipment Provide proof of decontamination YOU MUST CONTACT YOUR SUPPLIER FOR ADVICE BEFORE YOU RETURN SUCH EQUI...

Page 43: ......

Page 44: ...dwards Shuwa Shiba Park Building A 3F 2 4 1 Shibakoen Minato ku Tokyo 105 0011 JAPAN Tel 81 0 3 5470 6530 Fax 81 0 3 5470 6521 OSAKA 81 0 6 6384 7052 Fax 81 0 6 6384 7504 KYUSHU 81 0 96 326 7300 Fax 8...

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