BOC Edwards EXT555H, Instruction Manual

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Jun 01 Issue A
EXT555H
PAGE
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1 INTRODUCTION 1
1.1 Scope and definitions 1
2 TECHNICAL DATA 3
2.1 General 3
2.2 Pumping media 3
2.2.1 Pumps without gas purge 4
2.2.2 Pumps with gas purge 4
2.3 Vent gas specification and vent control data 4
2.4 Purge gas specification 5
2.5 Water cooling 5
2.6 Materials exposed to gases pumped 6
3 INSTALLATION 9
3.1 Unpack and inspect 9
3.2 Typical installation 9
3.3 Connection to the vacuum system 9
3.3.1 Inlet screens (supplied fitted) 9
3.3.2 Inlet connection 11
3.3.3 Backing connection 11
3.3.4 Interstage connection (Hi pump variants only) 13
3.4 Vent options, vent valve connection and control 13
3.5 Purge gas connection 15
3.5.1 Connect the purge gas 15
3.5.2 Recommended purge gas flow 15
3.6 Electrical installation 15
3.7 Cooling 15
3.7.1 Introduction 15
3.7.2 Forced air cooling 17
3.7.3 Water cooling 17
4 OPERATION 19
4.1 Start up 19
4.2 Stand-by 19
4.3 Shut-down 19
4.4 Safety interlocks and control system 19
4.5 Bakeout (conflat only) 20
5 MAINTENANCE 21
5.1 Introduction 21
5.2 Bearing maintenance 21
5.3 Clean the pump 21
5.4 Fault finding 21
6 STORAGE AND DISPOSAL 25
CONTENTS
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