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CON TENTS

Sec tion

Ti tle

Page

1

IN TRO DUC TION

1

1.1

Scope and defi ni tions

1

1.2

De scrip tion

2

1.3

Logic in ter face

2

1.4

In di ca tor LEDs

2

2

TECH NI CAL DATA

4

2.1

Op er at ing and stor age data

4

2.2

Me chani cal data

4

2.3

Elec tri cal data

4

3

IN STAL LA TION

7

3.1

Un pack and in spect

7

3.2

Ad just the elec tri cal con nec tor po si tion (op tional)

7

3.3

Fit the EXDC to the EXT pump

7

3.4

Elec tri cal con nec tions

8

3.4.1

In tro duc tion

8

3.4.2

Con nect the logic in ter face to your con trol equip ment

8

3.4.3

Con nect the elec tri cal sup ply

10

4

OP ERA TION

11

4.1

Start- up

11

4.2

Op era tion with high in let pres sure or tem pera ture

11

4.3

Nor mal shut down

12

4.4

Shut down due to pump un der or over- speed

12

4.5

Elec tri cal sup ply fail ure

13

5

MAIN TE NANCE

14

5.1

In tro duc tion

14

5.2

EXDC LED fault find ing

14

6

STOR AGE AND DIS POSAL

15

6.1

Stor age

15

6.2

Dis posal

15

RETURN OF BOC EDWARDS EQUIPMENT

EXDC Tur bo mo lecu lar Pump Drive Mod ules

i

Summary of Contents for D396-40-000

Page 1: ...UK Telephone 44 0 1293 528844 Fax 44 0 1293 533453 http www bocedwards com Instruction Manual EXDC Turbomolecular Pump Drive Modules Description Item Number EXDC80 Turbomolecular Pump Drive Module D39...

Page 2: ......

Page 3: ...EXT pump 7 3 4 Electrical connections 8 3 4 1 Introduction 8 3 4 2 Connect the logic interface to your control equipment 8 3 4 3 Connect the electrical supply 10 4 OPERATION 11 4 1 Start up 11 4 2 Ope...

Page 4: ...ED fault finding 14 Associated Publications Publication Title Publication Number EXT Pump Accessories B580 66 880 EXT70 and EXT250 Turomolecular Pumps B722 01 880 EXT351 and EXT501 Turbomolecular Pump...

Page 5: ...tion is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below WARNING Warnings are given where failure to observe the instr...

Page 6: ...e end of the logic interface cable Figure 1 item 3 You must use a suitable connector mating half not supplied to connect the EXDC to your own equipment refer to Section 2 3 for the connector mating ha...

Page 7: ...ecular Pump Drive Modules 3 Figure 1 The EXDC 1 Grub screw 2 Cooling fins 3 Logic interface cable 4 Phase LEDs red 5 TMP Normal LED green 6 Connector lock 7 Unlocked position 8 Locked position 9 EXT p...

Page 8: ...50082 1 2 2 Mechanical data Dimensions See Figure 2 Mass 0 2 kg Enclosure protection IP20 as defined by IEC529 Pollution degree IEC664 category 1 2 3 Electrical data Electrical supply requirements The...

Page 9: ...EXDC Turbomolecular Pump Drive Modules 5 Figure 2 Dimensions mm A Cable bend radius 30...

Page 10: ...d Maximum input current 1 1 A EXDC80 2 2 A EXDC160 Start stop control input signal Start control voltage low close 0 8 V d c Stop control voltage high open 4 to 24 V d c Speed analogue output Output v...

Page 11: ...XDC Refer to Figure 1 Use the following procedure to adjust the position of the EXT pump connector 9 and connector lock 6 with respect to the EXDC body 1 Use a hexagonal key to loosen the grub screw 1...

Page 12: ...ational speed 3 Earth ground 4 Pump speed analogue output Positive 5 6 Electrical supply 0 V 7 8 Electrical supply 80 V Positive With respect to pins 5 or 6 Table 1 Logic interface connector pins 3 4...

Page 13: ...ic diagram of the logic interface connections A EXDC logic interface plug B Mating half to EXDC logic interface plug 4 D C relay optional 5 Relay power supply optional 6 Voltmeter 1 Start stop switch...

Page 14: ...ce in the electrical supply close to the EXDC If you do not you will not be able to switch off the EXDC in an emergency WARNING Incorporate suitable fuses or current limiting devices in the electrical...

Page 15: ...EXT pump may not reach 80 of full rotational speed and the TMP Normal status output signal will not be set Use the following procedure to start up your system This procedure assumes that you will man...

Page 16: ...maximum allowable vent rate 1 Select Stop open the Start Stop control input on the logic interface connector 2 Open the vent valve after the EXT pump speed has fallen to below 50 of full rotational s...

Page 17: ...to Start the EXDC will automatically restart the EXT pump when the electrical supply is restored after an electrical supply failure Ensure that people cannot be injured by the rotating rotor blades of...

Page 18: ...stem Inspect the vacuum system and seal any leaks found Is the EXT pump faulty Inspect the EXT pump and check that it operates correctly with another EXDC or EXC Turbomolecular Pump Controller If nece...

Page 19: ...clean dry conditions until required When required for use prepare and install the EXDC as described in Section 3 of this manual 6 2 Disposal Dispose of the EXDC and any components safely in accordanc...

Page 20: ...hazardous materials Note Some contaminated equipment may not be suitable for airfreight PROCEDURE 1 Contact BOC Edwards and obtain a Return Authorisation Number for your equipment 2 Complete the Retur...

Page 21: ...roof of decontamination YOU MUST CONTACT BOC EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT Print your name _________________________________Print your job title _________________________ Print y...

Page 22: ...7KLV SDJH LQWHQWLRQDOO EODQN...

Page 23: ...631 3501 Fax 1 514 631 3502 CHINA BOC TRADING SHANGHAI CO LTD 23 Fu Te Road N Wai Gao Qiao Free Trade Zone Pudong Shanghai 200131 PRC China Tel 86 21 58669618 Fax 86 21 58669993 GERMANY BOC EDWARDS Am...

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